Femtosecond laser micromachining in 2026: overview
Femtosecond laser micromachining directs ultrashort pulses at a material to create small features or change its structure. The short interaction can limit heat transfer to surrounding material, making the process useful for hard, brittle or heat-sensitive substrates. Its reach extends from precision holes and cuts to functional surface patterns and structures written inside transparent materials. Process control remains a central challenge: pulse energy, focus, pulse accumulation and material response affect quality, while redeposition, edge chipping and heat-related defects can limit the result.
Recent work targets both process understanding and new functions. In September 2026, Jilin University examined how ambient pressure and pulse shaping affect drilling quality in glow discharge polymer films, while Chinese Academy of Sciences researchers studied low-taper molybdenum grids. An August 2026 study from Empa, EPFL and ETH Zurich demonstrated mid-infrared monitoring during in-bulk glass processing, pointing toward feedback-compatible control. News in August 2026 also highlighted depth-controlled femtosecond-laser slicing of silicon-carbide wafers. The direction is toward measurable, controlled processing, not just smaller features.
- 1Control is the bottleneck: Recent studies target redeposition, taper, chipping and accumulated thermal defects by tuning pulse shape, focus, pressure and in-process feedback.
- 2Surfaces are gaining ground: Surface texturing is expanding into wetting control, self-cleaning and thermal functions, linking precision machining to designed material performance.
- 3Beyond surface removal: Internal glass modification and laser-written waveguides show how the technology can build optical structures within materials as well as cut or texture them.
Top organizations working on femtosecond laser micromachining
Ranked by Linknovate activity score · last 24 monthsThe activity score adds up the relevance of every patent, publication, grant and news item linking an organization to femtosecond laser micromachining. Showing 7 of 435 organizations.
| # | Organization | Approach | Signals (24 mo) | Momentum | Why it matters |
|---|---|---|---|---|---|
| 1 |
Chinese Academy of Sciences CAS
Research · China |
Hybrid and assisted processing | PUB 41 · NEWS 2 | +131% | Recently, its researchers studied femtosecond-laser fabrication of low-taper molybdenum grids and ultrasonic-assisted ablation of silicon carbide, exploring process control and vibration-assisted material removal. |
| 2 |
Xi'an Jiaotong University
Research · China |
Ablation cutting and drilling | PUB 35 | -16% | Its researchers study femtosecond-laser drilling of turbine film-cooling holes and ablation-based fabrication of microstructures in infrared-window materials. |
| 3 |
Beijing Institute of Technology
Research · China |
Surface texturing | PUB 36 | +25% | Recently, its researchers used phase-modulated radially polarized beams to tune feature sizes in femtosecond-laser nanofabrication, alongside work on laser-formed electrodes and processing of sapphire. |
| 4 |
Northeastern University
Research · United States |
Internal modification and dicing | PUB 24 | +280% | Recently, its researchers reported a femtosecond-laser-fabricated fiber sensor for simultaneous temperature and microstrain monitoring, extending laser-written optical sensing structures for structural health applications. |
| 5 |
University of Chinese Academy of Sciences
Research · China |
Hybrid and assisted processing | PUB 25 | +112% | Recently, its researchers studied low-taper molybdenum-grid fabrication and ultrasonic-assisted femtosecond-laser ablation of silicon carbide; other work examines laser drilling of ceramic composites and black-silicon surface structures. |
| 6 |
Central South University
Research · China |
Surface texturing | PUB 26 | +0% | Recently, its researchers fabricated a corrugated femtosecond-laser pressure-sensor structure and laser-architected FeCo-oxide/Ni-foam surfaces for controlling adsorption. Its work also covers microstructures for infrared optics. |
| 7 |
University of Sao Paulo
Research · Brazil |
Internal modification and dicing | PUB 13 | +125% | Recently, its researchers reported femtosecond-laser-written waveguides in lanthanum fluorogermanate glass for nonlinear photonics. They also use laser microfabrication to pattern MXene micro-supercapacitor electrodes. |
| 8 | ··Hidden organizationCompany | Approach | PAT 00 · PUB 00 GRANTS 0 · NEWS 00 | +00% | Available to registered users. |
| 9 | ··Hidden organizationCompany | Approach | PAT 00 · PUB 00 GRANTS 0 · NEWS 00 | +00% | Available to registered users. |
| 10 | ··Hidden organizationCompany | Approach | PAT 00 · PUB 00 GRANTS 0 · NEWS 00 | +00% | Available to registered users. |
Leading research centers
Leading research institutions 382 total
Chinese Academy of Sciences CASChinaRecently, its researchers studied femtosecond-laser fabrication of low-taper molybdenum grids and ultrasonic-assisted ablation of silicon carbide, exploring process control and vibration-assisted material removal.
Xi'an Jiaotong UniversityChinaIts researchers study femtosecond-laser drilling of turbine film-cooling holes and ablation-based fabrication of microstructures in infrared-window materials.
Beijing Institute of TechnologyChinaRecently, its researchers used phase-modulated radially polarized beams to tune feature sizes in femtosecond-laser nanofabrication, alongside work on laser-formed electrodes and processing of sapphire.- ··Hidden research institutionCountryAvailable to registered users, with their key researchers.
- ··Hidden research institutionCountryAvailable to registered users, with their key researchers.
Where femtosecond laser micromachining innovation happens
Share of documents with at least one organization from each country.
Open the interactive map with all 435 organizationsMain technical approaches
Last 24 months| Approach | What it is | Documents | Leading organizations |
|---|---|---|---|
| Ablation cutting and drilling | Focused pulses remove material to form cuts and holes; the trade-off is controlling taper, redeposition and defects as energy accumulates. | 164 |
Bystronic Laser AG, Xi'an Jiaotong University, Coherent |
| Surface texturing | Laser-written micro- and nanostructures tune surface functions such as wetting or friction, but uniform results across complex surfaces remain difficult. | 275 |
Harbin Institute of Technology, Northwestern Polytechnical University, University of Science and Technology of China |
| Internal modification and dicing | Pulses modify material below a transparent surface or define internal separation paths; focus control and process monitoring are key challenges. | 48 |
Dongguan University of Technology, Hong Kong Polytechnic University, Shanghai University |
| Two-photon microfabrication | Nonlinear absorption confines fabrication to the focal volume for intricate three-dimensional structures, trading feature complexity against throughput. | 38 |
Polytechnic University of Milan, Psychological and Teaching Science, Institute of Systems and Technologies for the Sustainable Production |
| Hybrid and assisted processing | Added vibration, fluids or other process aids can improve material removal and hole quality, but add complexity to setup and control. | 56 |
Polytechnic University of Milan, Huazhong University of Science and Technology, Jilin University |
Emerging trends
Last 12 months vs previous 36 monthsTerms whose frequency in the last 12 months grew the most compared with the previous 36 months.
Funding and investment
Recent funding rounds
The available funding data associates $8.8 million in grants across 15 awards since 2020 with this field. Treat this as an indicator rather than a complete measure of dedicated investment.
Patent landscape
Top patent holders · last 24 monthsRecent developments
Latest news, duplicates removed- Sep 2026Accurate measurements of rapidly changing radiated power help researchers understand and control fusion plasmas. A bolometer is a device that can be used for this purpose when incident radiation causes its temperature…News & Analysis from AIP
- Sep 2026Delivering drugs directly to the skin provides a targeted means of treating dermatological conditions while minimizing side effects. The approach is limited, however, by the stratum corneum – the skin’s outer layer –…Physics World
- Sep 2026High-entropy alloys are highly promising structural and functional materials. Among them, refractory high-entropy alloys possess outstanding high-temperature mechanical properties and have broad application prospects in…AZoM.com - Materials and Engineering News Feed
- Sep 2026Newswise — High-entropy alloys are highly promising structural and functional materials. Among them, refractory high-entropy alloys possess outstanding high-temperature mechanical properties and have broad application…Newswise: SciNews
- Month 20XXHidden developmentAvailable to registered users with alerts enabled.
Frequently asked questions about femtosecond laser micromachining
What companies are working on femtosecond laser micromachining?
The company set includes 53 companies, and named organizations include Luxinar, Coherent and Bystronic Laser AG. Luxinar reported expanded femtosecond-laser production in July 2026. Coherent and Bystronic Laser AG appear among organizations active in ablation cutting and drilling. The list spans different roles, so not every named organization should be treated as a machine supplier.
Who are the main femtosecond laser micromachining manufacturers or suppliers?
Luxinar, Coherent, Bystronic Laser AG and Golden Laser are named commercial organizations in this field. Luxinar reported expanding femtosecond-laser production in July 2026 to support industrial manufacturers. Coherent, Bystronic Laser AG and Golden Laser appear among organizations associated with ablation cutting and drilling. The available information does not establish a complete ranking of equipment suppliers.
Which universities and research centers lead femtosecond laser micromachining research?
Chinese Academy of Sciences CAS, Xi'an Jiaotong University and Beijing Institute of Technology are prominent research organizations in the available activity data, with 43, 35 and 36 documents respectively in the 24-month window. Their work includes assisted ablation, turbine-hole drilling, infrared-window microstructures and beam shaping for nanofabrication.
How much funding has femtosecond laser micromachining received?
The available data records $8,835,246 in grants across 15 awards since 2020. This figure is an indicator, not necessarily a complete total of funding dedicated exclusively to femtosecond laser micromachining. Broader institutional funding entries may not correspond directly to this technology, so assess individual awards before treating them as sector investment.
Who holds the most femtosecond laser micromachining patents?
Unomedical A S is the leading named patent holder, with 2 patents in the available holder data. South China University of Technology, Technical University of Denmark, Shandong Normal University, Applied Materials, Spine Wave and ASM IP Holding B.V. each have 1 listed patent. These figures identify recorded holders, not the full scope of their intellectual-property portfolios.
Is femtosecond laser micromachining patent activity growing?
No: the recorded patent activity declined by 69.2% in the latest 12-month comparison, with 17 patents in the 24-month window. By contrast, publications reached 603 in the latest year, up 10.8%. This split suggests that research output is expanding while patenting activity in the tracked window has softened.
What are the latest developments in femtosecond laser micromachining?
Recent developments include Jilin University's September 2026 study of pressure and pulse shaping during polymer-film drilling and Chinese Academy of Sciences research on low-taper molybdenum grids. An August 2026 glass-processing study from Empa, EPFL and ETH Zurich used mid-infrared monitoring for feedback-compatible diagnostics. Research also addresses ultrasonic-assisted drilling of ceramic composites and depth-controlled silicon-carbide wafer slicing.
What are the main approaches in femtosecond laser micromachining and how do they differ?
The five named approaches are ablation cutting and drilling, surface texturing, internal modification and dicing, two-photon microfabrication, and hybrid and assisted processing. They differ in whether they remove material, functionalize a surface, modify a transparent material internally, build three-dimensional structures, or add process aids. The best fit depends on material, feature geometry and acceptable process complexity.
What are the applications of femtosecond laser micromachining?
The recorded applications include optical and photonic components, with 144 documents; aerospace and energy materials, with 75; biomedical devices and microfluidics, with 71; and semiconductor manufacturing, with 53. Examples include waveguides and fiber sensors, turbine cooling holes, ceramic processing, microfluidic structures and semiconductor substrates. These applications use precise material removal, surface structuring or internal modification.
Which countries lead femtosecond laser micromachining?
China leads the recorded activity with 2,355 documents, followed by the United States with 1,000, Germany with 513 and Japan with 456. China accounts for 42.4% of the recorded documents and the United States for 18.0%. The country data indicates research and technology activity, not necessarily commercial market share.