Zygo Corporation is a company that specializes in optical systems & equipment for areas such as optical metrology. Zygo's metrology systems are based on optical interferometry measuring displacement, surface figure, and optical wavefront. Metrology and optical markets for end-user and OEM applications include semiconductor capital equipment, aerospace/defense, automotive, and research.Zygo Corporation is listed on NASDAQ and traded under the symbol ZIGO. It is headquartered at Middlefield, Connecticut, and has 484 employees worldwide. Wikipedia.
Zygo Corporation | Date: 2015-07-14
Determining information about a degree of freedom of rigid body motion of an encoder scale includes: directing a first beam toward an encoder scale, in which the first beam diffracts from an encoder scale; combining a diffracted component of the first beam with a second beam to form an interfering output beam; monitoring changes in the output beam as a function of a wavelength of the first and second beams; and determining the information about a degree of freedom of rigid body motion of the encoder scale based on changes in the output beam as a function of the wavelength.
Zygo Corporation | Date: 2014-10-23
An encoder interferometry system includes an interferometer positioned to receive first and second beams having different frequencies, in which the interferometer has at least one polarizing beam splitting element for directing the first beam along a measurement path to define a measurement beam and the second beam along a reference path to define a reference beam. The encoder interferometry system further includes a encoder scale positioned to diffract the measurement beam at least once, a detector positioned to receive the measurement and reference beams after the measurement beam diffracts from the encoder scale, and an output component positioned to receive the measurement and reference beams before they reach the detector and deflect spurious portions of the first and second beam away from the detector.
Zygo Corporation | Date: 2014-03-12
Disclosed herein is a system for determining information about one or more defects on or in a test object. The system includes a light source configured to illuminate a test object with spatially coherent light; a multi-element detector positioned to detect an interference pattern of light associated with one or more defects on or in the illuminated test object; and an electronic control module in communication with the multi-element detector and configured to process the interference pattern to determine information about the one or more defects on or in the test object.
Zygo Corporation | Date: 2015-10-12
An encoder interferometry system includes an encoder scale arranged to receive and diffract a measurement beam. The system further includes one or more optical elements configured and arranged to receive a first diffracted measurement beam and a second diffracted measurement beam from the encoder scale and to redirect the first diffracted measurement beam and the second diffracted measurement beam toward the encoder scale such that the first diffracted measurement beam and the second diffracted measurement beam propagate along non-parallel beam paths having an angular separation following a second diffraction at the encoder scale. The system further includes a first detector arranged to receive the first diffracted measurement beam and a second detector arranged to receive the second diffracted measurement beam.
Zygo Corporation | Date: 2015-08-13
A method for determining information about a transparent optical element including a lens portion and a plane parallel portion, the lens portion having at least one curved surface and the plane parallel portion having opposing first and second surfaces, includes: directing measurement light to the transparent optical element; detecting measurement light reflected from at least one location on the first surface of the plane parallel portion; detecting measurement light reflected from the second surface of the plane parallel portion at a location corresponding to the at least one location on the first surface; determining, based on the detected light, information about the plane parallel portion; and evaluating the transparent optical element based on the information about the plane parallel portion.