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Wang P.,Huazhong University of Science and Technology | Chen S.,CAS Shenzhen Institutes of Advanced Technology | Gan X.,Yantai IRay Technology Co. | Sun R.,Yantai IRay Technology Co. | And 3 more authors.
IEEE Electron Device Letters | Year: 2015

This letter presents a 17 μ m pixel pitch 640 × 512 uncooled infrared focal plane arrays based on the double sacrificial layer microbolometer technology incorporating amorphous vanadium oxide thin film and frequency selective structure. The amorphous vanadium oxide thin-film features low-noise and high-thermal coefficient of resistance characteristics, which help to improve the radiometric performance of the microbolometer. By incorporating a frequency selective second platform, the responsivity of the microbolometer was improved by nearly 30% over 8~14 μ m spectra band. Noise equivalent temperature difference of less than 35 mK was obtained at 300 K ambient temperature with f/1.0 optics. © 1980-2012 IEEE.


Wang P.,Yantai IRay Technology Co. | Wang H.,Yantai IRay Technology Co.
IRMMW-THz 2015 - 40th International Conference on Infrared, Millimeter, and Terahertz Waves | Year: 2015

Small pixel microbolometer technology has shown dramatic improvements in uncooled infrared focal plane arrays in recent years. The uncooled microbolometer makers have transitioned through smaller pitches about every six years while maintaining a noise equivalent temperature difference (NETD) of 20-50mK. IRay commercialized 25μm pixel pitch 640×512 and 384×288 uncooled infrared focal plane arrays (IRFPAs) and 20μm pixel pitch 640×512 and 384×288 IRFPAs in the past five years. Vanadium oxide (VOx) microbolometers incorporated in these products is depicted in this paper. A 17μm pixel pitch 640×512 uncooled IRFPA with NETD of less than 35mK is also presented. The detectors are designed to enhance its manufacturability, life time, and its reliability under shock and vibration to meet security applications and Driver's Viewer Enhancer (DVE) requirements. © 2015 IEEE.

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