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Posth O.,Vakuum Komponenten and Messtechnik GmbH | Wunderlich H.,Arbeitsgruppe STREAM Purity | Flammich M.,Abteilung Forschung und Entwicklung Bei VACOM | Bergner U.,Vakuum Komponenten and Messtechnik GmbH
Vakuum in Forschung und Praxis | Year: 2012

Ultra-clean vacuum components and assemblies are fundamental to some cutting edge high-tech sectors like semiconductor industry, particle accelerators, and surface analytics. Exceptionally critical for these applications are particles that stick at the vacuum facing surfaces as well as desorption of water and hydrocarbons from the surfaces into the system, because this may interfere with the sensitive ultrahigh vacuum (UHV) and ultra-clean vacuum (UCV) processes. In this contribution, some established cleaning methods and surface treatments are discussed with respect to their effect on reducing particle contamination and outgassing of water and organic compounds from stainless steel surfaces. It is clarified that the resulting cleanliness severely depends on the detailed steps during the surface treatment and subsequent cleaning. As a consequence, the discussed methods should be chosen and adapted with great care according to the specific demands of the final application area. Copyright © 2012 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

Rietmann T.,Vakuum Komponenten and Messtechnik GmbH | Gottschall S.,Produktgruppe Vakuumschauglaser | Sahib C.,Produktgruppe Vakuumschauglaser | Flammich M.,Abteilung Forschung und Entwicklung | Bergner U.,Vakuum Komponenten and Messtechnik GmbH
Vakuum in Forschung und Praxis | Year: 2013

Many applications in high technology use optical signals, optical information or laser radiation in vacuum as a part of manufacturing or characterization processes. These optical signals often have to be transferred into or out of a vacuum system. This article shows basic requirements and specifications for assemblies that connect optical elements and vacuum components hermetically. Four different, common joining methods are presented that fulfill both optical and vacuum requirements. The ability of these joining methods to preserve the properties of the individual components is discussed. After pointing out strengths and weaknesses of the joining methods, typical specifications profiles for each method are derived. It is concluded, that vacuum optics holds proper solutions for every application and its specific requirements. Copyright © 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

Iwicki J.,Vakuum Komponenten and Messtechnik GmbH | Pongrac I.,Vakuum Komponenten and Messtechnik GmbH | Gottschalk P.,Vakuum Komponenten and Messtechnik GmbH | Bauer R.,Vakuum Komponenten and Messtechnik GmbH | And 3 more authors.
Vakuum in Forschung und Praxis | Year: 2013

Cold cathodes gauges have been used in various areas of vacuum technology for decades. Their unique properties make them the method of choice even despite the residual magnetic field, poor ignition characteristics in the UHV-region and long term stability. In other applications they do not significantly shorten the maintenance intervals. However, especially in the UHV or XHV region these properties lead to an extinguishing of cold cathode discharge. Considering the underlying processes and their correlation in this contribution an improved cold cathode will be presented. The measured data show a residual magnetic field of 1 mT in close vicinity to the gauge and an extended operating pressure range down to the 10-12 mbar region. Furthermore the ignition characteristics were improved to < 60 s at 1×10-9 mbar. Copyright © 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

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