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Bergner U.,VACOM Vakuum Komponenten and Messtechnik GmbH | Wolfgramm S.,Abteilung Technology and Entwicklung Bei VACOM | Gottschall S.,Abteilung Forschung and Entwicklung Bei VACOM | Flammich M.,Abteilung Forschung and Entwicklung Bei VACOM
Vakuum in Forschung und Praxis | Year: 2015

The mechanical strength of 6000 series Al alloys is sufficient to generate stable CF knife edges. In order to preserve the mechanical strength it is vitally important that the maximum temperature of the material is not exceeded both during the production process and in the application. The suitability of these Al alloys in UHV and XHV applications is verified by measurements of the knife edge geometry. © 2015 Wiley-VCH Verlag GmbH & Co. KGaA. Source


Hauer V.,Karlsruhe Institute of Technology | Battes K.,Karlsruhe Institute of Technology | Flammich M.,VACOM Vakuum Komponenten and Messtechnik GmbH | Ierardi V.,University of Genoa | And 2 more authors.
Vacuum | Year: 2015

A new outgassing rate facility applying the difference method was established at KIT. This system was validated within the framework of Joint Research Project IND 12 of the European metrology Research programme by several outgassing reference probes. These served as transfer standards for comparison with three other outgassing rate systems available in the project. Two of the probes were newly developed reference devices and exhibit a known, constant outgassing rate of water. Further two probes were also newly developed outgassing reference devices which emit mixtures of gases. Additionally another probe was an elastomer which was loaded with a known gas mixture. The last probe was a commercially available plastic material whose outgassing shows a large spectrum of gases. The other outgassing rate facilities applied the in-situ calibration of quadrupole mass spectrometers by a primary method, the continuous expansion method (Physikalisch-Technische Bundesanstalt) and the known gas quantity method (Institute of Metals and Technology) or the throughput method (VACOM company).The comparison of the results shows a satisfactory agreement between the measurements. © 2015 Elsevier Ltd. Source


Von Freyhold N.,VACOM Vakuum Komponenten and Messtechnik GmbH | Gottschalk P.,VACOM Vakuum Komponenten and Messtechnik GmbH | Bergner U.,VACOM Vakuum Komponenten and Messtechnik GmbH
Measurement: Journal of the International Measurement Confederation | Year: 2012

The application of hot cathode ionisation gauges in vacuum deposition processes (PVD, CVD) is critical regarding durability of the sensors, due to the inherent risk of contamination and discharges. Unstable calibration after relatively short periods of operation is an often reported problem, which arises from contamination with film forming substances contained in the residual gas. Furthermore, contamination often lead to early gauge drop outs and consequently to unsatisfyingly short life cycles of the gauges. Research was conducted to obtain improved solutions for prevention of gauge contamination on the one side, as well as optimised sensor designs for improved robustness and insensitivity against contaminants on the other side. This contribution discusses approaches for the desired improvements by evaluating the effectiveness of system-based methods to reduce the exposure of the sensor to contaminations, by indicating interactions between those system-based means and gauges, and by indicating options for improving gauge durability. © 2011 Elsevier Ltd. All rights reserved. Source


Bauer R.,VACOM Vakuum Komponenten and Messtechnik GmbH | Wolfgramm S.,VACOM Vakuum Komponenten and Messtechnik GmbH | Flammich M.,VACOM Vakuum Komponenten and Messtechnik GmbH | Bergner U.,VACOM Vakuum Komponenten and Messtechnik GmbH
Vakuum in Forschung und Praxis | Year: 2013

In engineering sciences the finite element method (FEM) is widely accepted as standard for the simulation of solid body characteristics. Modern FEM-Software, used with a CAD-system, enables the optimization of mechanical systems in an early development stage. Vacuum-mechanic engineers can use FEM to adapt vacuum vessels on specific mechanical and thermal requirements. The use of aluminum alloys for vacuum components, especially vessels for UHV / XHV, needs to consider the mechanical properties of aluminum. FEM is an easy to use method to enable this, regarding safety and low cost aspects. In the context of the new development and advancement of vacuum-flange-systems, FEM can be conducive to gain important insight to their functionality. Assembly parameters and operating conditions can be derived with such investigations. The following article describes the basic principles of an FEM-analysis and presents the respective procedure using examples of vacuum mechanics. Copyright © 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim. Source


Bergner U.,VACOM Vakuum Komponenten and Messtechnik GmbH | Wolfgramm S.,VACOM Vakuum Komponenten and Messtechnik GmbH | Gottschall S.,VACOM Vakuum Komponenten and Messtechnik GmbH | Worsch C.,VACOM Vakuum Komponenten and Messtechnik GmbH | Flammich M.,VACOM Vakuum Komponenten and Messtechnik GmbH
Vakuum in Forschung und Praxis | Year: 2015

It has been shown that present-day aluminum alloys possess sufficient stability to produce aluminum CF flanges for multiple tightening cycles. In order to preserve the mechanical strength it is vitally important that the critical limiting temperature of the materials is not exceeded both during the production process and later in the application. Reproducible welding parameters guarantee vacuum tight welding seams with neat root formation. It could be verified experimentally that critical temperatures in the knife edge area will not be exceeded in case of design according to material properties and special welding parameters. Comparative measurements of identically designed vacuum chambers of stainless steel and aluminum proved that UVH conditions can be achieved much faster and with less energy input (lower bakeout temperature) with aluminum than with stainless steel. © 2015 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim. Source

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