Dutheil P.,University Of Limoges12 Rue Atlantis87068Limogesfrance |
Orlianges J.-C.,University Of Limoges12 Rue Atlantis87068Limogesfrance |
Crunteanu A.,CNRS XLIM Research Institute, Limoges |
Catherinot A.,University Of Limoges12 Rue Atlantis87068Limogesfrance |
Champeaux C.,University Of Limoges12 Rue Atlantis87068Limogesfrance
Physica Status Solidi (A) Applications and Materials Science | Year: 2015
(0002)-oriented AlN and ZnO thin films are deposited on C-sapphire substrates by pulsed laser deposition at 700°C. Multilayered structures AlN/ZnO and ZnO/AlN are also grown on C-sapphire and investigated by X-ray diffraction, scanning electron microscopy and transmission measurements. Ellipsometry analysis is employed to investigate the stack of layers and the optical properties of thin films. This non-destructive analysis identified an intermediate layer between AlN and ZnO thin films for AlN/ZnO multilayer which didn't change the crystalline structure or piezoelectric properties of the multilayer. Surface acoustic wave velocities are respectively 5060ms-1 for AlN and 5350ms-1 for ZnO. In fact, investigations of surface acoustic wave (SAW) devices revealed a similar resonant frequency for both multilayers and in agreement with those measured for ZnO or AlN thin films. © 2015 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.