ULVAC PHI Inc.

Kawasaki, Japan

ULVAC PHI Inc.

Kawasaki, Japan

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Patent
Ulvac Inc. and Ulvac Phi Inc. | Date: 2011-01-05

The object of the present invention is to analyze a functional organic compound with high accuracy. In the present invention, cluster ions are accelerated so that the kinetic energy of cluster ions is less than 3.1 eV per one atom that makes up the cluster ion and the cluster ions enter a sample 18. Since the functional organic compound in the sample 18 is etched without the breakdown of the chemical structure, the functional organic compound, which has not been chemically denatured, is exposed on the surface of the sample 18. By alternately performing the etching and the surface analysis of the sample 18, or performing the surface analysis of the sample 18 while performing the etching, the sample 18 can be accurately analyzed in the depth direction.


Patent
Ulvac Inc. and Ulvac Phi Inc. | Date: 2010-10-19

The object of the present invention is to analyze a functional organic compound with high accuracy. In the present invention, cluster ions are accelerated so that the kinetic energy of cluster ions is less than 3.1 eV per one atom that makes up the cluster ion and the cluster ions enter a sample. Since the functional organic compound in the sample is etched without the breakdown of the chemical structure, the functional organic compound, which has not been chemically denatured, is exposed on the surface of the sample. By alternately performing the etching and the surface analysis of the sample, or performing the surface analysis of the sample while performing the etching, the sample can be accurately analyzed in the depth direction.


Kubo A.,Keio University | Ishizaki I.,ULVAC PHI INC. | Kawasaki H.,Keio University | Nagao K.,Keio University | And 2 more authors.
Scientific Reports | Year: 2013

The stratum corneum (SC), the outermost barrier of mammalian bodies, consists of layers of cornified keratinocytes with intercellular spaces sealed with lipids. The insolubility of the SC has hampered in-depth analysis, and the SC has been considered a homogeneous barrier. Here, we applied time-of-flight secondary ion mass spectrometry to demonstrate that the SC consists of three layers with distinct properties. Arginine, a major component of filaggrin-derived natural moisturizing factors, was concentrated in the middle layer, suggesting that this layer functions in skin hydration. Topical application of metal ions revealed that the outer layer allowed their passive influx and efflux, while the middle and lower layers exhibited distinct barrier properties, depending on the metal tested. Notably, filaggrin deficiency abrogated the lower layer barrier, allowing specific metal ions to permeate viable layers. These findings elucidate the multi-layered barrier function of the SC and its defects in filaggrin-deficient atopic disease patients.


Patent
Ulvac Phi Inc. and Japan National Institute of Materials Science | Date: 2011-03-30

[Object] The present invention provides an X-ray irradiation device capable of adjusting the energy of X-rays in a wide range, and an analysis device equipped with the X-ray irradiation device. [Solving Means] An X-ray irradiation device according to an embodiment of the present invention focuses X-rays emitted from an X-ray generation mechanism to a predetermined focal position by a focusing mechanism. The X-ray generation mechanism has a structure which generates a plurality of X-rays having different wavelengths. The focusing mechanism has a structure in which the plurality of X-rays are focused to the same focal position by focusing elements having diffraction characteristics suitable for the wavelengths of the respective X-rays generated by the X-ray generation mechanism.


Patent
Japan National Institute of Materials Science and Ulvac Phi Inc. | Date: 2013-01-02

[Object] The present invention provides an X-ray irradiation device capable of adjusting the energy of X-rays in a wide range, and an analysis device equipped with the X-ray irradiation device. [Solving Means] An X-ray irradiation device according to an embodiment of the present invention focuses X-rays emitted from an X-ray generation mechanism to a predetermined focal position by a focusing mechanism. The X-ray generation mechanism has a structure which generates a plurality of X-rays having different wavelengths. The focusing mechanism has a structure in which the plurality of X-rays are focused to the same focal position by focusing elements having diffraction characteristics suitable for the wavelengths of the respective X-rays generated by the X-ray generation mechanism.


Miyayama T.,ULVAC PHI INCORPORATED
Journal of the Vacuum Society of Japan | Year: 2016

Argon Gas Cluster Ion Beam (Ar-GCIB) is now widely spread in the field of practical surface analysis, such as X-ray photoelectron spectroscopy (XPS) and Time-of-Flight secondary ion mass spectrometry (TOF-SIMS), because of its unique sputtering effect of low chemical degradation for organic materials. GCIB provides the lateral sputtering effect and the high sputtering yield of which are never achieved by monotonic Ar ion beam on organic materials, so that the low chemical degradation of organic materials with high depth resolution and high sputtering rate could be achieved. Of course, a study of the GCIB sputtering phenomena with chemically reactive gasses, instead of Ar gas, for the advanced materials is one of the interesting things from an academic point of view. But the Ar-GCIB technique is expected to use for more practical applications, especially in the industrial field. In this paper, some practical applications of Ar-GCIB with recent XPS and TOF-SIMS instruments will be briefly introduced.


Sanada N.,ULVAC PHI Inc.
Zairyo to Kankyo/ Corrosion Engineering | Year: 2015

Auger Electron Spectroscopy (AES), X-ray Photoelectron Spectroscopy (XPS), and Time-of-Flight Secondary Ion Mass Spectrometry (TOF-SIMS) are surface analysis techniques which provide atomic- and molecular-level surface chemical information. They are widely used for failure analysis, quality control, and research and development of advanced materials and devices. In this review, we overview the recent progress of the commercial apparatus, and also highlight their improved sensitivity and depth profiling capabilities. We also introduce their recent application in corrosion science.


A system and method for acquisition of mass spectrometry data is configured to provide a stream of charged particles (e.g., from an analytical volume). A primary mass spectrometer (e.g., time-of-flight mass spectrometer) may be used to separate charged particles of the stream of charged particles based on their mass-to-charge ratio and detect the charged particles in a mass-to-charge spectrum. A stream of precursor ions having a selected mass range may be diverted from the stream of charged particles for fragmentation to provide fragment ions (e.g., fragment ions from the analytical volume). The fragment ions may be provided to a second mass spectrometer for analysis of the fragment ions (e.g., during the same time as the time-of-flight mass spectrometer is separating and detecting charged particles of the stream of charged particles based on their mass-to-charge ratio).


Patent
ULVAC PHI Inc. | Date: 2015-01-20

Provided are an ion source, an ion gun, and an analysis instrument, which are capable of performing sputtering without damage to a surface of a sample and improving detection sensitivity in mass spectroscopy. In the ion source, an emission opening to which ionization liquid is supplied is disposed in an electric field formed in vacuum environment by an extracting electrode so that super large droplet cluster ions are generated from the emission opening. When the sample is irradiated with a super large droplet cluster ion beam, the sample surface is subjected to sputtering without damage, so as to remove contamination substances or to expose a new surface of the sample. In mass spectroscopy, detection sensitivity is improved.


Patent
Ulvac Phi Inc. | Date: 2015-07-29

Provided are an ion source, an ion gun, and an analysis instrument, which are capable of performing sputtering without damage to a surface of a sample and improving detection sensitivity in mass spectroscopy. In the ion source (102), an emission opening (135) to which ionization liquid is supplied is disposed in an electric field formed in vacuum environment by an extracting electrode (122) so that super large droplet cluster ions (145) are generated from the emission opening (135). When the sample is irradiated with a super large droplet cluster ion beam, the sample surface is subjected to sputtering without damage, so as to remove contamination substances or to expose a new surface of the sample. In mass spectroscopy, detection sensitivity is improved.

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