Susono, Japan
Susono, Japan

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Ajan A.,Fujitsu Limited | Sato K.,Fujitsu Limited | Aoyama N.,Fujitsu Limited | Tanaka T.,Fujitsu Limited | And 6 more authors.
IEEE Transactions on Magnetics | Year: 2010

A method of making a cost-effective bit-patterned medium combining: 1) a pattern imprint; 2) ion doping; and 3) an ashing process is described. The Nitrogen ion was doped to change the magnetic properties of the Co/Pd and CoCrPt magnetic layer. The Nitrogen ion induces surface and lattice, and the exchange coupling strength changes during doping which suppress the magnetization and anisotropy of Co/Pd and CoCrPt magnetic layers. This can be achieved at relatively lower dosages so that a subsequent ashing process creates a smooth surface. The thermal stability of doped film and dot was good for practical applications. Monte-Carlo simulations were used to estimate the lateral ionic distribution within the dot region and compared with magnetic-force microscopy. To demonstrate this technique, areal densities of 134 Gb/in2 on Co/Pd media and 250 Gb/in2 on CoCrPt media are shown. © 2006 IEEE.

Sato K.,Fujitsu Limited | Ajan A.,Fujitsu Limited | Aoyama N.,Fujitsu Limited | Tanaka T.,Fujitsu Limited | And 6 more authors.
Journal of Applied Physics | Year: 2010

We propose a bit patterned media fabrication method based on low energy nitrogen ion implantation. Nitrogen ion implantation of fcc-Co/Pd multilayer or hcp-CoCrPt single layer suppresses their magnetizations at room temperature. Ion implantation reduces the Curie temperature from 600 to 400 K (or lower) as a result of lattice expansion and reduced exchange interaction between the magnetic atoms in the magnetic layer. We have made media with magnetic dots of 190 to 30 nm in diameter by nitrogen ion doping through resist patterns. Writing and reading of the signal from individual dots were performed with a commercial perpendicular magnetic recording head. © 2010 American Institute of Physics.

Aoyama N.,Fujitsu Limited | Ajan A.,Fujitsu Limited | Sato K.,Fujitsu Limited | Tanaka T.,Fujitsu Limited | And 6 more authors.
IEEE Transactions on Magnetics | Year: 2010

We investigated switching and read/write (R/W) characteristics of head flyable (Co/Pd) multilayer bit patterned media (BPM) fabricated by ion implantation. Two-dimensional (2-D) signal mapping of the dc magnetized media shows a clear image of 134 $\hbox{Gbit/in}^{2}$ dots (60 nm $\times$ 80 nm pitch, 28 nm dot size). We performed synchronized writing with individual bits with alternate polarity (ac magnetized) and 2-D mapping of 134 ${\hbox{Gbit/in}}^{2}$ patterns. The results substantiated the potential of the fabrication technique. From the read-back signal amplitude, we estimated the effective dot size as 24 nm, slightly smaller than the expected value. We discuss R/W properties and important characteristics such as glide height and magnetic structure of BPM. © 2006 IEEE.

Yuyama J.,ULVAC Japan Ltd. | Suetsugu Y.,High Energy Accelerator Research Organization
Journal of the Vacuum Society of Japan | Year: 2013

Presented here are the fundamental concepts of evacuation process and the key features of various vacuum pumps. Several essential terms, including evacuation time constant, pumping speed and conductance, are introduced to help the understanding of evacuation mechanism and to enable the design of vacuum systems. The vacuum pumps are systematically classified with their operating principles, structures and characteristics. It will help readers to select the proper vacuum pumps and to realize the reasonable vacuum system in different situations.

Mount D.,ULVAC Japan Ltd.
SAE Technical Papers | Year: 2012

Thin films and vacuum technology are used frequently throughout advanced, environmentally-friendly automobile manufacturing. From automotive light-weighting of conventional ICE automobiles, to hybrid and EV manufacturing, thin films deposited in vacuum systems, vacuum heat-treating, and vacuum leak testing are a major part of automotive device, component and sub-assembly manufacturing. Starting with new applications of polycarbonate glazing by plasma coating, which provides lower CO2 emissions, greater design freedom and cost reduction through parts consolidation. For high-strength, light-weight automotive steel stampings used in chassis and body parts, wear-resistant coatings are applied in vacuum systems to provide wear protection and to extend the stamping die lifetimes. Thin film vacuum equipment is also used for the manufacturing of: control circuits, film capacitors (EVs, PHEVs and HEVs), power ICs (hybrids), sensors (air bag, tire pressure, etc.), secondary batteries (EVs), coatings for mirrors, interior lighting, lamps (LEDs and reflectors), front grilles, touch-screen displays used in navigations systems, and gauges. Vacuum brazing is used to fabricate automobile radiators and air conditioners. Vacuum leak-testing is used to test the integrity of a wide-array of components, from tire rims and heat exchangers, to transmissions, braking systems, airbag inflators, and torque converters. This paper will elaborate on the vacuum equipment and processes used in advanced, in-vehicle product solutions. Copyright © 2012 SAE International.

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