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Patent
Trumpf Laser Und Systemtechnik Gmbh | Date: 2013-03-15

The invention relates to extreme ultraviolet EUV radiation generating systems that include a vacuum chamber where a target material can be positioned at a target position for generation of EUV radiation, and a beam guiding chamber for guiding a laser beam from a driver laser device towards the target position. The EUV radiation generating apparatus includes an intermediate chamber which is arranged between the vacuum chamber and the beam guiding chamber, a first window which seals the intermediate chamber in a gas-tight manner for entry of the laser beam from the beam guiding chamber and a second window which seals the intermediate chamber in a gas-tight manner for exit of the laser beam into the vacuum chamber. The invention also relates to a method for operating the EUV radiation generating apparatus.


Patent
Trumpf Laser und Systemtechnik GmbH | Date: 2013-03-15

The inventions relate to beam guides for guiding a laser beam from a driver laser device in the direction of a target position for generating extreme ultraviolet (EUV) radiation. The beam guides include a device for increasing or decreasing the beam diameter of the laser beam. The device includes a first off-axis parabolic mirror having a first convex curved reflecting surface and a second off-axis parabolic mirror having a second concave curved reflecting surface. The beam guides also include a moving device arranged to change a distance between the first and the second reflecting surfaces to change the opening angle (), e.g., the convergence or divergence angle, of the laser beam. The inventions also relate to methods for adjusting an opening angle () of a laser beam using such beam guides.


The invention relates to an optical arrangement comprising an optical module having a first carrier body to which there are attached at least one optical element and a plurality of first mounting elements, and a housing having a second carrier body for at least one further optical element, wherein a plurality of second mounting elements is attached to the carrier body. Also comprised is a movement device for displacing the first carrier body relative to the second carrier body in a movement direction between a removal position from which the optical module can be removed from the housing and a mounting position in which the movement device presses the first mounting elements against the second mounting elements. The invention relates also to an optical module and to a method for correctly positioning an optical module in a housing.


Patent
TRUMPF Laser und Systemtechnik GmbH | Date: 2014-10-10

A cooling arrangement for cooling laser gas for a gas laser includes a first cooling circuit having a first cooling assembly and a first heat exchanger for cooling laser gas which flows from a fan to a resonator of the gas laser, and a second cooling circuit which is independent of the first and which has a second cooling assembly and a second heat exchanger for cooling laser gas which flows from the resonator to the fan. The second cooling circuit has at least one additional heat exchanger for additionally cooling the laser gas which flows from the fan to the resonator.


Patent
TRUMPF Laser und Systemtechnik GmbH | Date: 2014-08-04

Methods, devices and systems for laser decoating of coated metal sheets, in particular for removing a metal protective layer from a metal sheet by a laser beam. The laser beam is directed onto a surface of a metal sheet coated with a metal protective layer, such that the laser beam strikes the surface of the metal sheet at a laser spot and melts material of the metal protective layer. A gas is directed by a plurality of nozzles at a pressure of at least 3 bar and at an acute angle with respect to the laser beam onto the laser spot. The nozzles are arranged around the laser beam such that the gas directed from the nozzles blows away the melted material of the metal protective layer from the metal sheet.

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