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Châteauneuf-Grasse, France

Siviero F.,SAES Getters S.p.A. | Bonucci A.,SAES Getters S.p.A. | Conte A.,SAES Getters S.p.A. | Moraja M.,SAES Getters S.p.A. | And 2 more authors.
Proceedings of SPIE - The International Society for Optical Engineering | Year: 2012

Thin-film getter integration is one of the key technologies enabling the development of a wide class of MEMS devices, such as IR microbolometers and inertial sensors, where stringent vacuum requirements must be satisfied to achieve the desired performances and preserve them for the entire lifetime. Despite its importance, the question about lifetime prediction is still very difficult to answer in a reliable way. Here we present an experimental approach to the evaluation of lifetime, based on an accelerated life test performed varying both the storage conditions and the getter area. A test vehicle based on a resonator device was used. The hermeticity was evaluated by means of specific leak testing, while MEMS behavior during the ageing test was studied monitoring device functional parameters and by residual gas analysis (RGA). Unexpected results were observed leading to the discovery that methane is pumped by the getter below 100°C. These results served as the inputs of a suitable model allowing extrapolating the device lifetime in operating? conditions, and pointed out that RGA is an essential tool to correctly interpret the aging tests. © 2012 SPIE. Source


Patent
Tronics Microsystems | Date: 2012-02-02

An inertial sensor including at least one measurement beam and one active body formed of a proof body and of deformable plates, said active body being maintained in suspension inside of a tight enclosure via its plates, the measurement beam connecting a portion of the proof body to an internal wall of said enclosure, said measurement beam having a lower thickness than the proof body.


Trademark
Tronics Microsystems | Date: 2013-03-21

Electronic components, namely, MEMS (micro-electro-mechanical systems) components used in electronic equipment, namely, accelerometers, seismic sensors, gyrometers, magnetometors, and pressure sensors; microsensors, namely, accelerometers, gyroscopes and seismic transducers; microswitches, namely, reed relay switches, radio frequency switches, current switches and optical switches; RF MEMS circuits; RF circuits, namely, phase shifters, phased array antennas, filter banks and switch matrices; microfluidic components, namely, micro-pumps, micro-valves and micro-needles; optical MEMS, namely, optical switches and interferometers; and electronic circuits associated with all these components, and specifically excluding electrical connectors, electric cables and electrical junction boxes. Design and development of electronic components; design, engineering, research and development, process development and consulting in the field of electronic components, namely, MEMS (micro-electro-mechanical systems) components used in electronic equipment, namely, accelerometers, seismic sensors, gyrometers, magnetometors, and pressure sensors, microsensors, namely, accelerometers, gyroscopes and seismic transducers, microswitches, namely, reed relay switches, radio frequency switches, current switches and optical switches, RF MEMS circuits, RF circuits, namely, phase shifters, phased array antennas, filter banks and switch matrices, microfluidic components, namely, micro-pumps, micro-valves and micro-needles, optical MEMS, namely, optical switches and interferometers, and electronic circuits associated with all these components, but specifically excluding electrical connectors, electric cables and electrical junction boxes.


Patent
Tronics Microsystems | Date: 2010-07-05

Device for measuring pressure through the capacitive effect between two electrodes including at least one sensitive electrode spaced apart from and opposite a stationary electrode so as to define a cavity in which a reference pressure (Pref) exists. The device in accordance with the invention further includes a protective housing for insulating at least the stationary electrode from the ambient environment in which the pressure to be measured exists, the housing having at least one solid portion forming a recess for containing at least the stationary electrode, and a thinned portion forming the sensitive electrode.


Axo

Trademark
Tronics Microsystems | Date: 2016-03-22

Accelerometers, inertial plants comprising solid-state gyroscopes and accelerometers, electronic sensors in the form of MEMS sensors.

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