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Linxi D.,Hangzhou Dianzi University | Linxi D.,CAS Shanghai State Key Laboratory of Transducer Technology | Shouluo L.,Hangzhou Dianzi University | Baoqing L.,Hangzhou Dianzi University | And 2 more authors.
2011 China-Japan Joint Microwave Conference Proceedings, CJMW 2011 | Year: 2011

In this paper the closed-loop model of a novel MEMS inertial sensor with the actuators drived by Lorentz force for increasing the initial sensing capacitance is established and the simulations are finished by using Matlab/Simulink. By comparing the different results between the open-loop and closed-loop, the performance of the sensor is analyzed. The results show that in closed-loop state, when the resonant frequency is 1173 Hz, the linearity range of the sensor is within - 10g ∼ 10g, which is almost twice over the situation in open-loop state. The bandwidth frequency is also up to 2865 Hz and the stability has been improved dramatically. © 2011 CJMW. Source


Linxi D.,Hangzhou Dianzi University | Linxi D.,CAS Shanghai State Key Laboratory of Transducer Technology | Wei W.,Hangzhou Dianzi University | Shouluo L.,Hangzhou Dianzi University | And 2 more authors.
2011 China-Japan Joint Microwave Conference Proceedings, CJMW 2011 | Year: 2011

A novel MEMS inertial sensor with the actuators drived by Lorentz force for increasing the initial sensing capacitance is proposed. The model of the sensor system is established and the simulations are finished by using Matlab/Simulink. The mechanical noise, the displacement response, the fringe effect and the air damping under various initial capacitance distance are analyzed, respectively. The results show that the working rang of the novel MEMS accelerometer is 4 μ m∼9 μ m, the static capacitance can reach to 25.17 pf for 4μm initial comb capacitance distance, the displacement sensitivity is 0.7 μm/g, and the displacement response time is less than 0.05s. The mechanical noise is reduced from 13.2 to 1.2 by etching damping slots in the sensing combs of the actuators. © 2011 CJMW. Source


Dong L.,Hangzhou Dianzi University | Dong L.,CAS Shanghai State Key Laboratory of Transducer Technology | Cui Y.,Hangzhou Dianzi University | Huo W.,Hangzhou Dianzi University | And 2 more authors.
Integrated Ferroelectrics | Year: 2013

A novel MEMS (Micro Electronic Mechanical System) capacitive accelerometer is presented, which is mainly composed of supporting beam, seismic mass, grid strip capacitances, comb capacitances and electrostatic driver. The damping of grid strip capacitances with variable overlapping area is mainly affected by the slide film air damping, which is small and neglectful, and the damping between comb capacitor is squeeze film air damping. The comb sensing gap can be reduced by electrostatic actuators by which the aspect ratio can reach to 75:1 which greatly depress the limitation of DRIE (Deep reactive ion etching) process on high aspect ratio, and the initial sensing capacitance increases from 2.97 pf to 14.87 pf. The squeeze film damping is reduced from 0.046 Nm/s to 0.0015 Nm/s by designing the comb-shaped grooves on the fixed comb electrodes. The comb initial sensing gap is optimized according to formation factors of system noise, and the noise is reduced from 1.395 μg/√HZ to 0.591 μg/√HZ. The simulation results show that the accelerometer sensitivity achieves 8.40 pf/g, which is two times of the conventional devices. © 2013 Copyright Taylor and Francis Group, LLC. Source


Dong L.,Hangzhou Dianzi University | Dong L.,CAS Shanghai State Key Laboratory of Transducer Technology | Li Y.,Hangzhou Dianzi University | Yan H.,Toshiba Hydro Electro Equipments Company | Sun L.,Hangzhou Dianzi University
High Technology Letters | Year: 2011

Sensing structure of grid strip capacitors can be used in the design of capacitive micro-electro-mechanical system (MEMS) resonators, accelerometers etc. A grid strip structure consists of non-entirely overlap plates so that the capacitor fringe effect cannot be neglected in the design. Electric-magnetic Finite Element Method (FEM) software ANSOFT-Maxwell is employed to analyze the fringe effect of a grid strip capacitor. The analysis includes capacitance changes with change of overlap length, overlap width, plate thickness, grid strip density etc. The results show that fringe effect leads to non-linear change of grid strip capacitance with the change of overlap length and width, that the capacitance increases with the increase of grid strip width and plate thickness, and that sensitivity can be improved through the increase of grid strip density in the condition of identical total overlap area, but linearity is reduced. © by HIGH TECHNOLOGY LETTERS PRESS. Source


Linxi D.,Hangzhou Dianzi University | Linxi D.,CAS Shanghai State Key Laboratory of Transducer Technology | Yongjie L.,Hangzhou Dianzi University | Haixia Y.,Toshiba Hydro Electro Equipments Company | Lingling S.,Hangzhou Dianzi University
Journal of Semiconductors | Year: 2010

A novel MEMS accelerometer with grid strip capacitors is developed. The mechanical and electrical noise can be reduced greatly for the novel structure design. ANSOFT-Maxwell software was used to analyze the fringing electric field of the grid strip structure and its effects on the designed accelerometer. The effects of the width, thickness and overlapping width of the grid strip on the sensing capacitance are analyzed by using the ANSOFT-Maxwell software. The results show that the parameters have little effect on the characteristics of the presented accelerometer. The designed accelerometer was fabricated based on deep RIE and silicon-glass bonding processes. The preliminary tested sensitivities are 0.53 pF/g and 0.49 pF/g in the x and y axis directions, respectively. A resonator with grid strip structure was also fabricated whose tested quality factor is 514 in air, which proves that the grid strip structure can reduce mechanical noise. © 2010 Chinese Institute of Electronics. Source

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