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Akashi, Japan

Arai M.,Japan Central Research Institute of Electric Power Industry | Suidzu T.,TOCALO Co.
Journal of Thermal Spray Technology | Year: 2013

A transpiration cooling system for gas turbine applications has significant benefit for reducing the amount of cooling air and increasing cooling efficiency. In this paper, the porous ceramic coating, which can infiltrate cooling gas, is developed with plasma spraying process, and the properties of the porous coating material such as permeability of cooling gas, thermal conductivity, and adhesion strength are examined. The mixture of 8 wt.% yttria-stabilized zirconia and polyester powders was employed as the coating material, in order to deposit the porous ceramic coating onto Ni-based super alloy substrate. It was shown that the porous ceramic coating has superior permeability for cooling gas. The adhesion strength of the porous coating was low only 20% compared with the thermal barrier coating utilized in current gas turbine blades. Simulation test of hot gas flow around the gas turbine blade verified remarkable reduction of the coating surface temperature by the transpiration cooling mechanism. It was concluded that the transpiration cooling system for the gas turbine could be achieved using the porous ceramic coating developed in this study. © 2013 ASM International.


[Problem] To provide a fluoride spray coating covered member adhered with a fluoride spray coating having excellent properties on quality by suppressing a thermal decomposition reaction and an oxide reaction, and to propose a method for forming a cover by firmly adhering the coating. [Solution] A method for forming a fluoride spray coating in an implantation structure onto a substrate surface by spraying particles of a fluoride spraying material onto a substrate surface or a pretreated substrate surface, if necessary through an undercoat layer or spray particle dotted parts of carbide cermet, at a flying velocity of particles of not less than 500 m/sec with an inert gas as a working gas for coating formation at an inert gas temperature of 600 C.-1300 C. as well as a fluoride spray coating covered member.


[Problem] To provide a fluoride spray coating covered member in which a fluoride spray coating firmly adheres by coating carbide cermet to a surface of a substrate and interposing it, and to propose a method therefor. [Solution] A fluoride spray coating is formed in such a manner that an undercoat layer of carbide cermet, which covers a substrate in a film-shaped manner while a tip portion of carbide cermet particles is embedded in the substrate, or a primer part of carbide cermet, is formed by blowing a carbide cermet material at a high velocity by using a spray gun to a surface of the substrate, and after that, a fluoride particle is sprayed thereon.


Forming a densified layer in a spray coating which forms a densified layer providing a sufficient effect while preventing generation of excessively large cracks and does not cause the increase of costs; also provided in a spray coating covering member. When a high-energy beam for remelting and resolidifying a coating composition of a surface layer of an Al


Patent
Tocalo Co. | Date: 2012-04-11

Provided is a member for semiconductor manufacturing device which hardly causes component contamination and is capable of sufficiently reducing generation of particles in a semiconductor manufacturing device. A spray coating is formed by spraying a ceramic onto a mounting member of a transfer arm, and laser beam is irradiated to the spray coating to remelt and resolidify the ceramic composition for modification to thereby form a high-strength ceramic layer made from a ceramic recrystallized material and having a net-like crack, whereby particles dropped out from the mounting member due to external factors in a semiconductor manufacturing device are reduced to an extent not affecting a semiconductor manufacturing process.

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