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Jee S.H.,Yonsei University | Lee M.-J.,Konkuk University | Ahn H.S.,Auburn University | Kim D.-J.,Auburn University | And 5 more authors.
Solid State Ionics | Year: 2010

In this study, the feasibility of applying lithium phosphorous tungsten oxynitride (Li-P-W-O-N) thin films as solid-state electrolytes in solid-state ionic energy systems such as thin film batteries and super-capacitors was evaluated. The Li-P-W-O-Nthin film electrolyte was prepared by radio frequency (RF) magnetron sputtering under various working pressures of nitrogen (N 2) reactive gas. We propose that the LiPON/Li-P-W-O-N/LiPON structure makes it possible to use a Li-P-W-O-N thin film as a thin film solid electrolyte because of the potential short circuiting of the Li-P-W-O-N thin film. To prepare the structure, a LiPON thin film was also deposited by RF magnetron sputtering onto Steel Us Stainless (SUS)/SiO2/Si. When a LiPON thin film interlayer was deposited on the sandwich structure of the Li-P-W-O-Nthin film electrolyte, the current was less than 1 μA. For the final cell structure of SUS/LiPON/Li-P-W-O-N/LiPON/SUS/SiO2/Si, impedance measurements conducted at room temperature revealed ionic conductivities in the range of 1.5-1.2×10-7Scm-1 for the various deposition conditions of the Li-P-W-O-N thin films. This result suggests that the LiPON/Li-P-W-O-N/LiPON structured thin film electrolyte has potential as a solid oxide thin film electrolyte in solid-state ionic devices. © 2010 Elsevier B.V. All rights reserved.

Ha T.-J.,Yonsei University | Park H.-H.,Yonsei University | Jung S.-Y.,Yonsei University | Yoon S.-J.,Thin Film Materials Research Center | And 2 more authors.
Thin Solid Films | Year: 2010

Mesoporous TiO2 films were prepared by using titanium tetraisopropoxide as the titania precursor and triblock copolymer as the structure directing agent. The synthesized mesoporous TiO2 film was confirmed to have the ordered pore structure with rutile phase by small angle and wide angle X-ray diffraction analyses. The mesoporous TiO2 film has the porosity range from 21.6 to 35.6%, and its Seebeck coefficient was changed according to its porosity, up to -88.6 μV/K. From the obtained Seebeck coefficient, the ordered mesoporous TiO2 film was found to be a good candidate of thermal sensing layer of thin film thermal sensor. © 2010 Elsevier B.V. All rights reserved.

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