Gao X.,The Key Laboratory of Material Physics |
Feng H.,The Key Laboratory of Material Physics |
Lin Q.,The Key Laboratory of Material Physics |
Zhang L.,The Key Laboratory of Material Physics |
And 8 more authors.
Thin Solid Films | Year: 2010
High-quality hydrogenated amorphous silicon films (a-Si:H) were deposited on quartz glass substrates by radio-frequency plasma-enhanced chemical vapor deposition method. The films were then annealed at 800 °C for 3 min by rapid thermal processing (RTP). As confirmed by X-ray diffractometry and Raman spectrometry, hydrogenated microcrystalline silicon films were obtained after the annealing procedure. The mechanism of the rapid solid-phase recrystallization of a-Si:H film by RTP was theoretically mainly attributed to the interaction between short-wavelength photons and ground-state precursor radicals (silicon, SiH2 and SiH3). © 2010 Elsevier B.V. All rights reserved.