Brno, Czech Republic
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Denisyuk A.,TESCAN ORSAY HOLDING | Hrncir T.,TESCAN Brno | Vincenc Obona J.,TESCAN ORSAY HOLDING | Sharang,TESCAN Brno | And 2 more authors.
Microscopy and Microanalysis | Year: 2017

We report on the mitigation of curtaining artifacts during transmission electron microscopy (TEM) lamella preparation by means of a modified ion beam milling approach, which involves altering the incident angle of the Ga ions by rocking of the sample on a special stage. We applied this technique to TEM sample preparation of a state-of-the-art integrated circuit based on a 14-nm technology node. Site-specific lamellae with a thickness <15 nm were prepared by top-down Ga focused ion beam polishing through upper metal contacts. The lamellae were analyzed by means of high-resolution TEM, which showed a clear transistor structure and confirmed minimal curtaining artifacts. The results are compared with a standard inverted thinning preparation technique. © Microscopy Society of America 2017


Hrncir T.,TESCAN Brno | Dluhos J.,TESCAN Brno | Hladik L.,TESCAN ORSAY HOLDING | Moyal E.,LatticeGear LLC | And 2 more authors.
Conference Proceedings from the International Symposium for Testing and Failure Analysis | Year: 2014

Cross sections of large Through Silicon Vias (TSV) and solder bumps are often prepared using the Focused Ion Beam (FIB). The high current Xe plasma ion source allows fast and precise target preparation of TSV with small diameter. Solder bumps can be accessed due to the high milling rate too. However, the high current milling by plasma FIB causes the worsening of the milled surface quality. An optimized FIB scanning strategy accompanied with the novel rocking stage for the sample tilting during the milling has been developed for the plasma FIB. Whole milling process is observed by the Scanning Electron Microscopy (SEM). Time to prepare a cross section is accelerated and the excellent quality is suitable for subsequent failure analysis. Also important is proper sample cleaving before FIB milling. Using an accurate method to cleave the sample prior to FIB preparation further reduces the overall sample preparation time. The high quality cross sections prepared using this new method are ready not only for SEM but also for EDX and EBSD analysis, either 2D or 3D, when combined with FIB slicing. Broadening the analysis to these techniques increases the obtainable information, allowing the arrangement of materials and their crystalline structure to be studied in a detail. Copyright © 2014 ASM International® All rights reserved.


Khatibi Shahidi M.,Karolinska Institutet | Krivanek J.,Masaryk University | Kaukua N.,Karolinska Institutet | Ernfors P.,Karolinska Institutet | And 12 more authors.
Journal of Dental Research | Year: 2015

In organized tissues, the precise geometry and the overall shape are critical for the specialized functions that the cells carry out. Odontoblasts are major matrix-producing cells of the tooth and have also been suggested to participate in sensory transmission. However, refined morphologic data on these important cells are limited, which hampers the analysis and understanding of their cellular functions. We took advantage of fluorescent color-coding genetic tracing to visualize and reconstruct in 3 dimensions single odontoblasts, pulp cells, and their assemblages. Our results show distinct structural features and compartments of odontoblasts at different stages of maturation, with regard to overall cellular shape, formation of the main process, orientation, and matrix deposition. We demonstrate previously unanticipated contacts between the processes of pulp cells and odontoblasts. All reported data are related to mouse incisor tooth. We also show that odontoblasts express TRPM5 and Piezo2 ion channels. Piezo2 is expressed ubiquitously, while TRPM5 is asymmetrically distributed with distinct localization to regions proximal to and within odontoblast processes. © International & American Associations for Dental Research 2015.


Hrncir T.,TESCAN Brno | Obona J.V.,TESCAN Brno | Petrenec M.,TESCAN Brno | Michalicka J.,TESCAN ORSAY HOLDING | Lang C.,Oxford Instruments
Conference Proceedings from the International Symposium for Testing and Failure Analysis | Year: 2015

Reducing FIB induced damage on TEM samples is very important in order to preserve the sample structure, especially on modern semiconductor devices. We have compared the damage caused by Ga ion beam to our measurements of the damage caused by Xe ion beam and came to the conclusion that Xe ion beam induced damage is significantly lower at 30keV beam energy. This has been proven by several independent analytical methods. Our results show that TEM sample preparation by Xe ion beam causes less amorphous damage and increase the quality of the lamella and in many cases it will allow to prepare the lamella by finishing it even at 30 keV, without the final cleaning step at the low beam energy. Final polishing step by Xe beam at beam energy 3 keV further reduces the amorphous layer, but the difference against Ga beam is not so significant like at 30 keV. Copyright © 2015 ASM International® All rights reserved.


PubMed | Ludwig Maximilians University of Munich, Karolinska Institutet, TESCAN ORSAY Holding, Masaryk University and Medical University of Vienna
Type: Journal Article | Journal: Journal of dental research | Year: 2015

In organized tissues, the precise geometry and the overall shape are critical for the specialized functions that the cells carry out. Odontoblasts are major matrix-producing cells of the tooth and have also been suggested to participate in sensory transmission. However, refined morphologic data on these important cells are limited, which hampers the analysis and understanding of their cellular functions. We took advantage of fluorescent color-coding genetic tracing to visualize and reconstruct in 3 dimensions single odontoblasts, pulp cells, and their assemblages. Our results show distinct structural features and compartments of odontoblasts at different stages of maturation, with regard to overall cellular shape, formation of the main process, orientation, and matrix deposition. We demonstrate previously unanticipated contacts between the processes of pulp cells and odontoblasts. All reported data are related to mouse incisor tooth. We also show that odontoblasts express TRPM5 and Piezo2 ion channels. Piezo2 is expressed ubiquitously, while TRPM5 is asymmetrically distributed with distinct localization to regions proximal to and within odontoblast processes.


Drapala J.,VSB - Technical University of Ostrava | Brozova S.,VSB - Technical University of Ostrava | Szurman I.,VSB - Technical University of Ostrava | Konecna K.,VSB - Technical University of Ostrava | And 4 more authors.
Metalurgija | Year: 2016

The influence of rare earth metals (REM) addition on solidification structure of the low-carbon 42CrMo4 steel was investigated. Alloys were prepared by means of a centrifugal casting. The addition of cerium, praseodymium or mischmetal in the steel produced greatly improved solidification structure with a suppressed columnar grain zone, finer grain size in the equiaxed grain zone. The additions occurred in the steel bath in the form of REM oxide and/or oxide-sulphide inclusions and as dissolved REM segregated along with other elements at prior grain boundaries and interdendritic spaces. Microstructure (light microscope), SEM/EDX chemical microanalysis, and TOF-SIMS analysis – mapping of elements in the structure of alloys were obtained. © 2016, Faculty of Metallurgy. All Rights Reserved.


Garnier A.,STMicroelectronics | Filoni G.,STMicroelectronics | Hrncir T.,Tescan Orsay Holding | Hladik L.,Tescan Orsay Holding
Microelectronics Reliability | Year: 2015

Plasma FIB is relatively new technique that is growing but it is growing fast to respond to larger and larger application field requests. Born to provide large milling areas at wafer levels, it offers many solutions to investigate new complex embedded systems in particular multi-chips packages, MEMS devices .... Some applications have been experimented on a large range of products in the last year in ST Microelectronics failure analysis laboratory and this paper is an illustration of the potentialities of the technique. New hardware improvements are rising to fasten more and more the analyses, to increase the success rate in case of defect analysis and to fit better with new technologies. © 2015 Elsevier Ltd.


Beran P.,Nuclear Physics Institute of Czech Republic | Petrenec M.,Tescan Orsay Holding | Heczko M.,Academy of Sciences of the Czech Republic | Smetana B.,VSB - Technical University of Ostrava | And 4 more authors.
Intermetallics | Year: 2014

In-situ heating/cooling neutron diffraction experiments were performed on a γ-TiAl based alloy doped with Mo and/or C. The structural analysis was complemented by differential scanning calorimetry and electron microscopy. Description of high temperature α phase with new model of partially disordered α2′-Ti3Al phase instead of a fully disordered α-Ti is proposed. The atomic redistribution in the γ phase is related to a wide α-transus signal on the DSC curves. Sections of temperature phase stability diagrams constructed from diffraction data for heating and cooling are presented. © 2014 Elsevier Ltd. All rights reserved.

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