Taylor Hobson Ltd

Leicester, United Kingdom

Taylor Hobson Ltd

Leicester, United Kingdom

Time filter

Source Type

Patent
Taylor Hobson Ltd. | Date: 2015-05-13

A device and method for geometrically measuring an object includes a carrier for the object, at least one reference object that can be fixed relative to the carrier, and a holder which can be moved in at least one direction (x,z) relative to the reference object and on which a reference body and a distance measuring device are arranged, which distance measuring device is designed for measurement of a distance between the object and the reference body. A first and a second reference sensor are arranged at a distance from each other on the holder or on the reference body while facing the reference object, said reference sensors being designed to measure a first and a second distance to the reference object.


Patent
Taylor Hobson Ltd | Date: 2015-04-27

A method for characterising instrument error in a surface measurement instrument, comprising obtaining first calibration measurement data representing a known surface form of a first reference object and obtaining second calibration measurement data representing a known surface form of a second reference object. At least a portion of the second calibration measurement data represents a measurement range that overlaps with at least a portion of a measurement range of the first calibration measurement data. A common error function is obtained that characterises the instrument error.


Patent
Taylor Hobson Ltd. | Date: 2015-05-13

A device and method for geometrically measuring an object, with a base and a support system arranged thereon for the object, at least one reference object which can be fixed relative to the base, at least one distance measuring system, by means of which a distance between the reference object and the surface of the object facing the reference object can be determined, and an object holder having a top side and an underside, to which the object can be attached, wherein the object holder can be selectively arranged in a first orientation and a second orientation on the support system, wherein the distance measuring system and the object holder are movable relative to each other in order to scan the surface of the object, and the object holder has on the top side thereof and on the underside thereof respective reference structures corresponding to the relative motion of the object holder and to the distance measuring system.


Patent
TAYLOR HOBSON Ltd | Date: 2017-03-29

The present invention relates to a device and a method for geometrically measuring an object (14), comprising a carrier (12) for the object (14), at least one reference object (18, 20) that can be fixed relative to the carrier (12), and a holder (126) which can be moved in at least one direction (x, z) relative to the reference object (18, 20) and on which a reference body (128) and a distance measuring device (70) are arranged, which distance measuring device (70) is designed for measurement of a distance (38, 140) between the object (14) and the reference body (128). A first and a second reference sensor (150, 152) are arranged at a distance from each other on the holder (126) or on the reference body (128) while facing the reference object (18, 20), said reference sensors being designed to measure a first and a second distance (51, 53) to the reference object (18, 20).


Patent
TAYLOR HOBSON Ltd | Date: 2017-03-29

The present invention relates to a device and method for geometrically measuring an object (14), with: - a base (11) and a support system (12) arranged thereon for the object (14); - at least one reference object (18, 20) which can be fixed relative to the base (11); - at least one distance measuring system (70), by means of which a distance between the reference object (18, 20) and the surface (14a, 14b) of the object (14) facing the reference object (18, 20) can be determined; and - an object holder (100) having a top side (104) and an underside (106), to which the object (14) can be attached, wherein the object holder (100) can be selectively arranged in a first orientation (1) and in a second orientation (2) on the support system (12); - wherein the distance measuring system (70) and the object holder (100) are movable relative to each other in order to scan the surface (14a, 14b) of the object (14), and the object holder (100) has on the top side (104) thereof and on the underside (106) thereof respective reference structures (108, 110) corresponding to the relative motion of the object holder (100) and the distance measuring system (70).


Patent
Taylor Hobson Ltd | Date: 2012-01-18

Light reflected by a sample surface region and a reference surface interfere. A detector senses light intensity at intervals during relative movement along a scan path between the sample surface and the reference surface to provide a series of intensity values representing interference fringes. A data processor receives first intensity data comprising a first series of intensity values resulting from a measurement operation on a surface area of a substrate and second intensity data comprising a second series of intensity values resulting from a measurement operation on a surface area of a thin film structure. A gain is determined for each thin film of the thin film structure. Substrate and apparent thin film structure surface characteristics are determined on the basis of the first and second intensity data, respectively. The apparent thin film structure surface characteristic is modified using the substrate surface characteristic and the determined gain or gains.


Patent
Taylor Hobson Ltd | Date: 2013-02-27

A metrological apparatus has a workpiece support surface (16) and a mover (9) to carry out a measurement by effecting relative movement in a measurement direction, X, between the workpiece support surface and a stylus (11) such that the stylus is deflected as a stylus tip of the stylus follows surface variations. A transducer (39) provides a measurement data set in a measurement coordinate system representing the deflection, a, of the stylus at measurement points in the measurement direction, X. A rotation device (16) effects relative rotation of the workpiece support surface and the mover about a rotation axis. A data processor is provided to determine a location of intersection of a first measurement data set representing a measurement along a measurement path on a calibration component surface which is not symmetric about the rotation axis and a second measurement data set representing a measurement along a measurement path on the calibration component surface after rotation of 180 degrees about the rotation axis and to determine the frame of reference of the apparatus using the determined intersection.


Patent
Taylor Hobson Ltd | Date: 2013-02-27

A stylus is deflected as a tip of the stylus follows surface variations along a measurement path on a surface of a workpiece. A transducer provides measurement data in a measurement coordinate system. A data processor is configured to: determine a relationship between the data in the measurement coordinate system and nominal surface data representing the expected surface characteristic of the workpiece in a workpiece coordinate system; simulate a measurement data set for the nominal surface using the nominal surface data and the determined relationship; if a simulated range of the simulated data set does not meet a given criterion, adjust a selected measurement data value for a selected point and repeat the simulation to determine an adjusted data value for which the simulated range meets the criterion; and determine start conditions required for a measurement procedure to provide the adjusted data value for the selected measurement point.


A metrological apparatus includes an optical measurement system (1) such as a coherence scanning interferometer operable to obtain measurement data representative of a surface of a workpiece and a rotation device (15) to effect relative rotation between the optical measurement system and the workpiece about a measurement axis to enable a plurality of measurement data sets to be obtained with each measurement data set being obtained by the optical measurement system at a respective one of a number of different relative rotational orientation s of the optical measurement system and the workpiece. A data corrector (323) is provided to obtain correction data to enable correction of a measurement data set. The correction data may be an average of the plurality of measurement data sets.


Patent
Taylor Hobson Ltd | Date: 2013-02-13

A computer implemented method of determining the surface shape of an aspheric object using a metrological apparatus includes positioning the object on a support surface of a turntable so that an axis of the object is tilted with respect to the axis of rotation of the turntable; using a measurement probe to make a first measurement of the object; rotating the turntable; after rotation of the turntable, using a measurement probe to make a second measurement of the object, diametrically opposite the first measurement, estimating a first angle based on fitting the first measurement data using a surface model including: a dependency on the axis tilt angle and a dependency on the radius of the base of the object; estimating a second angle based on fitting the second measurement data to the surface model; and determining the tilt angle based on the first angle and the second angle.

Loading Taylor Hobson Ltd collaborators
Loading Taylor Hobson Ltd collaborators