Schönau am Königssee, Germany
Schönau am Königssee, Germany

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Vetter J.,Sulzer Metaplas | Muller J.,Sulzer Metaplas | Erkens G.,Sulzer Metaplas
IOP Conference Series: Materials Science and Engineering | Year: 2012

AlTiN and CrN coatings were deposited in hybrid DOMINO platforms by magnetron sputtering (DC-MS, DC-MS+HCP-MS, HCP-MS) and vacuum arc evaporation. The ion cleaning was done by the AEGD process. The coating rates and the energy efficiency of both deposition processes were compared. The roughness effects of the different coating types were discussed. Preliminary results of the change of pulse characteristics during simultaneously running of HCP-MS plus vacuum arc evaporation are shown. © Published under licence by IOP Publishing Ltd.


Vetter J.,Sulzer Metaplas | Ackerman C.,Sulzer Metaplas | Meunier F.,Sulzer Metaplas | Jarry O.,Sulzer Metaplas | And 2 more authors.
Vakuum in Forschung und Praxis | Year: 2012

Different dLc coating types are applied at an industrial scale by sulzer Metco thin Film. The coatings are generated with different coating architecture. Deposition methods are: magnetron sputtering, electron beam evaporation and PA-cVd. Reactive magnetron sputtering is used to deposit metal containing a-c:h coatings (a-c:h:Me), e.g. MAXit W-ch. Pure a-c:h coatings as functional top coatings are used for cavidur®, MAXit® AhdLc and special versions of dylyn® coatings. In addition to the pure a-c:h coatings, doped a-c:h coatings are also used. The dylyn® family of coatings is comprised of at least one layer a-c:h:si:O. The dylyn® coatings may be doped with metal (a-c:h:ti:si:O) to adapt selected properties like electrical conductivity. Copyright © 2012 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

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