Storex Technologies

Bucharest, Romania

Storex Technologies

Bucharest, Romania
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Pavel E.,Storex Technologies | Jinga S.I.,Polytechnic University of Bucharest | Vasile B.S.,Polytechnic University of Bucharest | Dinescu A.,Romanian National Institute for Research and Development in Microtechnologies | And 3 more authors.
Optics and Laser Technology | Year: 2014

Many attempts have been made to break the diffraction limit, a major problem in optical lithography. Here, we report and demonstrate a lithography method, quantum optical lithography, able to attain 1 nm resolution by optical means using new materials (fluorescent photosensitive glass-ceramics and QMC-5 resist). The performance is several times better than that described for any optical or electron beam lithography (EBL) methods. The written patterns on resist were transferred to Si wafer. SEM measurements show 5 nm line widths. © 2014 Elsevier Ltd.


Pavel E.,Storex Technologies | Jinga S.,Polytechnic University of Bucharest | Andronescu E.,Polytechnic University of Bucharest | Vasile B.S.,Polytechnic University of Bucharest | And 7 more authors.
Optics Communications | Year: 2013

Optical lithography is a key technique in the development of semiconductor industry. However, diffraction effects limit the minimal resolvable feature size to the Rayleigh diffraction limit of λ/2, where λ is the optical wavelength. Many technologies have been proposed in the past to replace optical lithography. Here, we present a new quantum optical method to do subwavelength lithography which is realizable by our current technology now. Using TEM, STEM, SEM and AFM measurements we show that 2 nm width lines could be written in novel materials such as fluorescent photosensitive glass-ceramics by a quantum multiphoton confinement effect. Exposure to the focus laser diode beam (λ=650 nm) writes high-density lines with 4 nm pitch on the sample surface at room temperature, far beyond the diffraction limit, a fundamental barrier to the exploitation of optical lithography. 2 nm Quantum Optical Lithography is an important step to enable full-wafer-level nanofabrication at this resolution. © 2012 Elsevier B.V.


Pavel E.,Storex Technologies | Mihailescu M.,Polytechnic University of Bucharest | Nicolae V.B.,Polytechnic University of Bucharest | Jinga S.,Polytechnic University of Bucharest | And 4 more authors.
Optics Communications | Year: 2011

In this paper we investigate the holographic recording properties of the fluorescent photosensitive glass-ceramics. The materials described here, stable up to 400 °C, represent a substantial advancement in the development of long lifetime media for holographic data storage. A detailed physical-chemical characterization of the proposed material is presented. It is shown that volume holograms were obtained after the recording process using a continuum high power laser in an off-axis setup. © 2010 Elsevier B.V. All rights reserved.


Pavel E.,Storex Technologies | Jinga S.,Polytechnic University of Bucharest | Andronescu E.,Polytechnic University of Bucharest | Vasile B.S.,Polytechnic University of Bucharest | And 3 more authors.
Nanotechnology | Year: 2011

Here we present a new approach to overcome the optical diffraction limit by using novel materials. In the paper, we report experimental results obtained by high-resolution transmission electron microscopy (HRTEM) and optical absorption spectroscopy, for a fluorescent photosensitive glass-ceramic containing rare-earth ions such as samarium (Sm). Using a home built dynamic tester, with a low power laser, we recorded nanostructures having 5 nm line widths. In the line structure, measurements reveal the presence of silver nanocrystals with few nanometre sizes. HRTEM shows that there is a random orientation of the nanocrystals. A writing mechanism with three steps is proposed. © 2011 IOP Publishing Ltd.


Pavel E.,Storex Technologies | Jinga S.I.,Polytechnic University of Bucharest | Vasile B.S.,Polytechnic University of Bucharest | Dinescu A.,National Institute for RandD in Microtechnologies | And 2 more authors.
Optics and Laser Technology | Year: 2015

We report novel results for 3D recording of an optical disk with ultra-high density. Multilayer 5 nm nanomarks were experimentally obtained by using fluorescent photosensitive glass-ceramics and an optical head with λ=650 nm and NA=0.60. The distance between adjacent 5 nm nanomarks has been reduced to 10 nm. Ultra-high density optical data is recorded by focusing laser beam of a CW laser diode operating at low power (Pmax=10 mW). © 2015 Elsevier Ltd. All rights reserved.


Mihailescu M.,Polytechnic University of Bucharest | Pavel E.,Storex Technologies | Nicolae V.B.,Polytechnic University of Bucharest
Applied Optics | Year: 2011

We have investigated the dynamics of the record-erase process of holograms in photochromic glass using continuum Nd:YVO4 laser radiation (λ = 532 nm). A bidimensional microgrid pattern was formed and visualized in photochromic glass, and its diffraction efficiency decay versus time (during reconstruction step) gave us information (D, Δn) about the diffusion process inside the material. The recording and reconstruction processes were carried out in an off-axis setup, and the images of the reconstructed object were recorded by a CCD camera. Measurements realized on reconstructed object images using holograms recorded at a different incident power laser have shown a two-stage process involved in silver atom kinetics. © 2011 Optical Society of America.


Pavel E.,Storex Technologies
Applied Optics | Year: 2015

Two- and three-dimensional effects observed in quantum optical lithography indicate the existence of a longdistance energy migration, greater than 500 nm, to a reaction center with a diameter smaller than 1 nm. The confinement effect was obtained by energy transfer of coherent Frenkel excitons in an electric field gradient followed by a cooperative process of rare-earth ions in fluorescent photosensitive glass ceramics. A mechanism is proposed and discussed in order to explain the breakthrough of the diffraction limit of light. Fluorescent photosensitive glass ceramics act as a coherent perfect absorber, a time-reversed laser. © 2015 Optical Society of America.


PubMed | Storex Technologies
Type: Journal Article | Journal: Nanotechnology | Year: 2010

Here we present a new approach to overcome the optical diffraction limit by using novel materials. In the paper, we report experimental results obtained by high-resolution transmission electron microscopy (HRTEM) and optical absorption spectroscopy, for a fluorescent photosensitive glass-ceramic containing rare-earth ions such as samarium (Sm). Using a home built dynamic tester, with a low power laser, we recorded nanostructures having 5 nm line widths. In the line structure, measurements reveal the presence of silver nanocrystals with few nanometre sizes. HRTEM shows that there is a random orientation of the nanocrystals. A writing mechanism with three steps is proposed.

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