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Zhou Y.,State Key Laboratory of Precision Measuring Technology and Instruments | Wang X.,Tsinghua University
Gaojishu Tongxin/Chinese High Technology Letters | Year: 2012

A RuO 2 micro-supercapacitor with a side-by-side electrode configuration structure was designed and fabricated. It was composed of the micro-structure, the micro-electrode, and the functional RuO 2 film on the electrode. The micro-structure was made by the MEMS technology, while the micro-electrode was made by electroplating the functional RuO 2 film on the surface of the current collector. The electrochemical test results showed that the micro-supercapacitor had the specific capacity of 0.012F·cm -2 and the energy density of 0.006J·cm -2. The performance of the RuO 2-CNT (carbon nanotube) composite functional film was studied. The cyclic voltammetry (CV) and electrochemical impedance spectroscopy (EIS) curves showed that compared with the RuO 2 film, the RuO 2-CNT composite film greatly decreased the internal resistance, and improved the energy-storage density and the charge-CNT discharge quality of the micro-capacitor. Anyway, the micro-capacitor can satisfy the energy requirements of a lot of microsystems for its great stability and discharge power. Source


Zhao Q.,State Key Laboratory of Precision Measuring Technology and Instruments | Qiu Z.,Tianjin University | Fang F.,State Key Laboratory of Precision Measuring Technology and Instruments
Jingangshi yu Moliao Moju Gongcheng/Diamond and Abrasives Engineering | Year: 2010

An image processing system for the automatic lapping of diamond turning tools was researched. Diamond turning tools were installed initially using shape-based template matching method, and then the profile and position information of tools were measured online at sub-micro precision. The results shown that the developed image processing system can be successfully employed for the measurement of diamond tools with radius I mm, 0.5 mm and 0.2 mm, respectively. It can obtain the profile and position informations needed by automatic lapping online, and provide a guarantee for development of automatic grinding system in respects of accuracy and efficiency. Source


Li L.,Xian Jiaotong University | Yang S.,Xian Jiaotong University | Yang S.,Huazhong University of Science and Technology | Zhang X.,Xian Jiaotong University | And 7 more authors.
Microelectronic Engineering | Year: 2014

In this paper, a photodetector based on single cadmium sulfide (CdS) nanowire was fabricated using focused ion beam (FIB) technique. The nanowire manipulation, transferring and electrode fabrication process by the FIB and its influence on the photodetector performance were studied. CdS nanowire was synthesized by Vapor-Phase-Transport (VPT) method. CdS powder was thermally evaporated at 950 °C in the Argon (Ar) gas as the source material. High Resolution Transmission Electron Microscope (HRTEM) and X-ray Diffraction (XRD) experiment results showed that the nanowire presented wurtzite CdS structure and good crystal quality. The photoresponse time and recovery time of the photodetector were 150 ms and 53 ms, respectively. The photosensitivity was 2.83, and the low sensitivity was caused by the deposition of Ga on the surface of the nanowire and electrode gap during the FIB fabricating process. © 2014 Elsevier B.V. All rights reserved. Source


Zhang Y.,CAS Institute of Mechanics | Duan F.,State Key Laboratory of Precision Measuring Technology and Instruments | Li T.,CAS Institute of Mechanics | Li M.,State Key Laboratory of Precision Measuring Technology and Instruments | Ouyang T.,State Key Laboratory of Precision Measuring Technology and Instruments
Proceedings of SPIE - The International Society for Optical Engineering | Year: 2010

Based on vibration measuring principle of blade tip-timing, fiber bundle sensor used as blade tip-timing is designed. "5+2" scheme of double-rate sampling is adopt to solve the under-sampled problem of asynchronous blade vibration. By using frequency identification, blade's real vibration information can be obtained. The method is applied on a model of aerial equipment to do simulation experiment whose result is similar to theoretical model, and the frequency measured is in accord with the result of strain gauge in general. Validity of measuring scheme is verified through the contrast result which also declares high practicable value of this identifying technique. © 2010 Copyright SPIE - The International Society for Optical Engineering. Source


Li D.,State Key Laboratory of Precision Measuring Technology and Instruments | Sun C.,Tianjin Key Laboratory of Biomedical Detecting Techniques and Instruments | Yu S.,State Key Laboratory of Precision Measuring Technology and Instruments | Yu H.,Tianjin Key Laboratory of Biomedical Detecting Techniques and Instruments | Xu K.,State Key Laboratory of Precision Measuring Technology and Instruments
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) | Year: 2015

An implantable U-shaped fiber ATR (attenuated total reflection) sensor enhanced by silver nanoparticles (AgNPs) on cylindrical surface was presented for continuous glucose monitoring. U-shaped structure was addressed to increase effective optical length at limited implantable space to enhance the sensitivity of fiber ATR sensor. A novel method to fabricate silver nanoparticles on cylindrical surface of U-shaped fiber ATR sensor based on chemical reduction of its silver halide material directly without any preliminary nanoparticles synthesis and the following covalent bond or self-assembly was proposed. The silver nanoparticles will further enhance infrared absorption signal of fiber ATR sensor. The experiment result shows that the sensitivity of enhanced fiber ATR sensor enhanced by the silver nanoparticles is about three times than the normal one. © 2015 IEEE. Source

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