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Huang C.-H.,National Tsing Hua University | Huang C.-H.,United Microelectronics | Tsai M.-H.,National Tsing Hua University | Lee C.-H.,Solid State System Corporation 3S | And 5 more authors.
2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 | Year: 2011

This study reports a CMOS-MEMS condenser microphone implemented using the standard thin films stacking of 0.35m UMC CMOS 3.3/5.0V logic process, and followed by post-CMOS micromachining steps without introducing any special materials. The corrugated diaphragm for microphone is designed and implemented using the metal layer to reduce the influence of thin film residual stresses. Moreover, silicon substrate is employed to increase the stiffness of back-plate. Measurements show the sensitivity of microphone is 423dBV/Pa at 1kHz under 6V pumping voltage, the frequency response is 100Hz-10kHz, and the S/N ratio 55dB. Table1 summarizes detail specifications. © 2011 IEEE.


Huang C.-H.,National Tsing Hua University | Huang C.-H.,United Microelectronics | Lee C.-H.,Solid State System Corporation 3S | Hsieh T.-M.,Solid State System Corporation 3S | And 7 more authors.
Sensors | Year: 2011

This study reports a CMOS-MEMS condenser microphone implemented using the standard thin film stacking of 0.35 μm UMC CMOS 3.3/5.0 V logic process, and followed by post-CMOS micromachining steps without introducing any special materials. The corrugated diaphragm for the microphone is designed and implemented using the metal layer to reduce the influence of thin film residual stresses. Moreover, a silicon substrate is employed to increase the stiffness of the back-plate. Measurements show the sensitivity of microphone is -42 ± 3 dBV/Pa at 1 kHz (the reference sound-level is 94 dB) under 6 V pumping voltage, the frequency response is 100 Hz-10 kHz, and the S/N ratio >55 dB. It also has low power consumption of less than 200 μA, and low distortion of less than 1% (referred to 100 dB). © 2011 by the authors; licensee MDPI, Basel, Switzerland.

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