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A non-contact power supply device is used in a processing apparatus including a moving unit movable inside a closed container. The device supplies electric power to the moving unit from outside the closed container. The power supply device includes a feed unit and a heat dissipater. The feed unit includes a feed line and a power supply transformer. The feed line has a feed region arranged inside the closed container along the moving direction of the moving unit. The transformer is arranged inside the closed container so as to be opposed to the feed region in a non-contact manner and is provided so as to move together with the moving unit. The heat dissipater includes a portion on one end side connected to the feed region so as to be capable of conducting heat thereto, and a portion on the other end side extending outside the closed container, so that heat generated in the feed region is partially dissipated outside the closed container.


The present invention aims to provide a non-contact power supply device capable of dissipating heat generated in a feed line as a loss, even if the feed line is arranged inside the closed container. The non-contact power supply device is used in a processing apparatus including a moving unit movable inside the closed container and the non-contact power supply device capable of supplying electric power to the moving unit from outside the closed container. The non-contact power supply device includes a feed unit and a heat dissipator, the feed unit includes a feed line and a power supply transformer, the feed line has a feed region arranged inside the closed container along the moving direction of the moving unit, the power supply transformer is arranged inside the closed container so as to be opposed to the feed region in a non-contact manner and is provided so as to move together with the moving unit, and the heat dissipator includes a portion on one end side connected to the feed region so as to be capable of conducting heat thereto and a portion on the other end side extending outside the closed container, so that heat generated in the feed region is partially dissipated outside the closed container.


Patent
IHI Corporation and Sinfonia Technology Co. | Date: 2015-04-01

Multipliers 21a and 21b output values, which are obtained by multiplying a total drive command value E_(s) by first and second gains G_(1) and G_(2), respectively, as first and second drive command values E_(1) and E_(2). Controllers 23a and 23b control first and second actuators (motors) 5 and 7, respectively, on the basis of the first and second drive command values. The detection values of the drive amounts of the actuators are denoted by E_(f1) and E_(f2), respectively, and the detection value of the drive amount of a driven body is denoted by E_(f). A gain calculator 27 calculates the gains G_(1) and G_(2) on the basis of E_(f1), E_(f) and E_(f2). An upper limit value of E_(f), which denotes the drive amount of the driven body, is denoted by L_(max). When E_(f1), E_(f2) or E_(f) approaches zero, the first gain G_(1) is brought close to (E_(f1) - L_(max)/2)/(E_(f) - L_(max)).


Patent
Sinfonia Technology Co. | Date: 2015-04-17

The left-right span between a light projection section 5a and a light receiving section 5b of a mapping sensor 5 having an optical axis L1 extending in a left-right horizontal direction is arranged to be narrower than the span of a front opening of a open cassette 12 which is a smaller one of differently-sized containers conveyed to a load port, and the mapping sensor is attached to a mapping device 4. A first protrusion sensor 6 having an optical axis L2 extending in the left-right horizontal direction is attached to the mapping device 4 to be separated from the mapping sensor 5 in a moving direction of the mapping sensor 5. Furthermore, a second protrusion sensor 7 having an optical axis extending in the up-down moving direction of the mapping sensor 5 is provided.


Patent
Sinfonia Technology Co. | Date: 2016-03-17

There is provided an end structure of a nozzle 11 including a gas-flow passage 13 communicable with an opening 104 provided through a bottom of a container 100 configured to contain an object, the nozzle 11 configured so that gas is injected into or discharged from the container 100 through the gas-flow passage 13 and the opening 104. The end structure includes a contact portion 19 provided at an upper end portion of the nozzle 11 and around the gas-flow passage 13, and the contact portion 19 is configured to be brought into contact with a contacted portion 103 provided around the opening 104. The contact portion 19 includes a flat portion 19b and protruding portions 19a and 19c each protruding upward relative to the flat portion 19b, and the flat portion 19b is made of material softer than that of the protruding portions 19a and 19c.


A door opening and closing apparatus includes: a frame that structures part of a wall surface of a transfer room and is provided with an opening for opening the transfer room; a door part capable of opening and closing the opening: a placing pedestal on which a storage container can be placed; a chamber provided at a position on the transfer room side so as to face the opening, and having an inner space to be subjected to a purge process with an environmental gas; and a pressure adjusting part causing the inner space of the chamber and the inner space of the storage container to communicate with each other using a route other than the opening. The door opening and closing apparatus can be applied to a wafer transfer apparatus or the like.


Patent
Sinfonia Technology Co. | Date: 2016-03-01

A door opening and closing apparatus shifts a door part holding a lid part of a storage container between a totally closed position where the inner space of the storage container body is sealed and a totally open position where the inner space of the storage container body is totally opened frontward, for putting in and taking out transfer target objects between the storage container and a transfer room. The door opening and closing apparatus puts the door part on standby at the predetermined halfway stop position every time a single access operation of a transfer robot to the storage container ends and until next access operation of the transfer robot to the storage container is performed.


Patent
Sinfonia Technology Co. | Date: 2015-05-04

A vibration damping system comprises a vibration applying device mounted on a frame and a control device that controls the vibration applying device, the control device comprising a voltage command producing part that produces a driving voltage command to drive the vibration applying device and a vibration failure diagnosis part that diagnoses whether there is failure based on a vibration detection signal output by a vibration detecting device, wherein the voltage command producing part produces the driving voltage command corresponding to a diagnosis frequency that is previously set at a frequency identical to a resonance frequency of the frame or the vibration applying device or at a predetermined frequency close to the resonance frequency and makes the vibration applying device generate the vibration applying force according to the driving voltage command, and the vibration failure diagnosis part diagnoses whether there is failure based on the vibration detection signal.


Patent
Sinfonia Technology Co. | Date: 2016-01-20

A linear motor (L) provided with: a stator (2, 3) in which first magnetic pole teeth (22, 32) are disposed at a prescribed pitch along the movement direction (A) of a movable element (4); and the moveable element (4), which has second magnetic pole teeth (41) disposed at a prescribed pitch along the movement direction (A), and a nonmagnetic holder (42) for holding the second magnetic pole teeth (41), wherein thinning holes (422) and holding holes (421) capable of holding the second magnetic pole teeth (41) are alternatingly formed in the holder (42) along the movement direction (A), the boundary portions (423) of the holding holes (421) and the thinning holes (422) adjacent in the movement direction (A) in the holder (42) being caused to function as positioning parts in the movement direction (A) for the second magnetic pole teeth (41), whereby the magnetic pole teeth of the moveable element can be continually held in the prescribed position even during motion of the moveable element at high speed and high acceleration, and correct action of the linear motor can be secured, while reducing the weight of the moveable element.


Patent
Sinfonia Technology Co. | Date: 2015-07-28

The Electronic Module includes body case 2 that comprises a plurality of case members 3, 4 by abutting each other and that has an internal space (S) where the first opening P1 is formed on one side surface of the internal space (S) and the second opening P2 that opens in a direction different from that of the first opening P1 is in an exposed state when a plurality of the case members 3, 4 are separated each other, a substrate 5 on which a sensor IC 51 is mounted and that is housed in the internal space (S) of the body case 2, and a resin body 6 that covers the substrate 5 by being filled in the internal space (S) of the body case 2 and solidified or hardened, and is characterized by that a plurality of the case members 3, 4.

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