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Spokane Valley, WA, United States

Patent
SII Inc and Seiko Instruments Inc. | Date: 2015-03-05

A method of manufacturing a liquid jet head includes: a through hole forming step of forming through holes on first and second base plates; an actuator plate bonding step of bonding actuator plates to the respective base plates; and an electrode forming step of forming electrodes on the bonded bodies of the base plates and the actuator plates. In the through hole forming step, the through holes are formed on the base plates and the inner surfaces of the through holes are roughened. In the electrode forming step, second extraction electrodes are routed to a principal surface of the first base plate through the through holes.


A method of manufacturing a liquid jet head includes: a groove forming step of alternately forming ejection grooves and non-ejection grooves in a reference direction on an upper surface of an actuator substrate; a cover plate processing step of forming a recessed portion on an upper surface of a cover plate and slits penetrating the cover plate from a bottom surface of the recessed portion through a lower surface located opposite to the upper surface of the cover plate; a substrate bonding step of bonding the lower surface of the cover plate to the upper surface of the actuator substrate to allow the slits to communicate with the respective ejection grooves; and an electrode forming step of simultaneously forming conductive films on side surfaces of the ejection grooves, side surfaces of the non-ejection grooves, and inner surfaces of the slits and the recessed portion.


A piezoelectric vibration piece includes: a base portion; a pair of vibration arm portions which extends in a first (+Y) direction from the base portion, and is arranged separately in a second (X) direction intersecting with the first (+Y) direction; and a support arm portion which extends in the first (+Y) direction from the base portion. The support arm portion, includes a first arm portion formed such that a width which is a length along the second (X) direction is gradually narrowed towards a tip end portion side of the support arm portion, and a second arm portion which extends in the first (+Y) direction from the first arm portion and is formed such that the width is broadened towards the tip end portion side.


Patent
SII Inc | Date: 2015-02-12

A liquid jet head includes a side wall installed between channels, and in which two piezoelectric materials having mutually different polarization directions are laminated in a height direction, interposing a polarization boundary, an upper member fixed to an upper end of the side wall and installed on an upper portion of the channel, a lower member fixed to a lower end of the side wall and installed on a lower portion of the channel, and an electrode installed on a wall surface of the side wall, wherein the polarization boundary is positioned above the height of the side wall, and the electrode is installed from an upper end of the wall surface, to a vicinity of the polarization boundary, or below the polarization boundary and above a lower end of the wall surface.


To provide a piezoelectric vibrating piece capable of preventing short circuit at the time of mounting caused by miniaturization. In a piezoelectric vibrating piece having a support arm portion provided with mount electrodes between a pair of vibrating arm portions, a layout wiring connected to the first mount electrode on the base end side of the support arm portion is formed on a mount surface, and at least a layout wiring passing the vicinity of the first mount electrode in the layout wirings connected to the second mount electrode on the tip side of the support arm portion is formed on an opposite mount surface side, thereby preventing short circuit of a conductive adhesive for bonding the first mount electrode to an electrode on the package side with respect to the layout wiring on the second mount electrode side.

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