Spokane Valley, WA, United States
Spokane Valley, WA, United States

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Patent
SII Inc | Date: 2016-09-22

A liquid jet head includes ejection channels which extend in a channel extending direction and are filled with ink, dummy channels which extend in the channel extending direction and are not filled with ink, and a nozzle plate which is laminated on an actuator plate and includes nozzle holes each communicating with the corresponding ejection channel at a central part in the channel extending direction of the ejection channel. The actuator plate includes a first channel row and a second channel row each of which includes the ejection channels and the dummy channels alternately arranged side by side in the X direction, the first and second channel rows being spaced apart in the channel extending direction. The ejection channel and the dummy channel are each symmetric with respect to a plane that passes through the center in the channel extending direction and perpendicular to the channel extending direction.


Patent
SII Inc | Date: 2016-08-24

An exposure portion which exposes a protection plate is formed on a back face of a nozzle plate at a part of a position other than an actuator joining face of the nozzle plate.


Patent
SII Inc | Date: 2017-03-01

An exposure portion which exposes a protection plate is formed on a back face of a nozzle plate at a part of a position other than an actuator joining face of the nozzle plate.


Patent
SII Inc | Date: 2017-04-05

A liquid jet head includes ejection channels which extend in a channel extending direction and are filled with ink, dummy channels which extend in the channel extending direction and are not filled with ink, and a nozzle plate which is laminated on an actuator plate and includes nozzle holes each communicating with the corresponding ejection channel at a central part in the channel extending direction of the ejection channel. The actuator plate includes a first channel row and a second channel row each of which includes the ejection channels and the dummy channels alternately arranged side by side in the X direction, the first and second channel rows being spaced apart in the channel extending direction. The ejection channel and the dummy channel are each symmetric with respect to a plane that passes through the center in the channel extending direction and perpendicular to the channel extending direction.


A manufacturing method of a liquid jet head includes: a groove formation step of forming ejection grooves and non-ejection grooves alternately in the upper surface of an actuator substrate; a cover plate processing step of forming a recessed portion in the upper surface of a cover plate and slits penetrating from the bottom surface of the recessed portion to the lower surface opposite to the upper surface; an electrode formation step of forming conductive films on the both side surfaces and front surface of the ejection grooves, the both side surfaces of the non-ejection grooves, the inner surfaces of the slits and the recessed portion, and the lower surface of the cover plate; and a substrate joining step of joining the lower surface of the cover plate to the upper surface of the actuator substrate so as to communicate the slits with the ejection grooves.


A liquid jet head according to the present invention includes a partition separating adjacent grooves, a lower substrate fixing a lower portion of the partition, and an upper substrate installed on an upper end surface of the partition, the partition including an electrode layer on a surface lower than the upper end surface, the electrode layer including an outer surface approximately perpendicular to the upper end surface, and the outer surface continuing to the upper end surface through a first convex curved surface curving outward.


A pair of vibrating arm portions are disposed lined up in a second direction perpendicular to a first direction and are configured such that base end sides thereof in the first direction are fixed to a base portion. A pair of inclined surfaces are formed on both sides in the second direction on the base end side of the vibrating arm portion so that a width of the vibrating arm portion in the second direction is gradually widened from the distal end side to the base end side. A length of a region, having the pair of inclined surfaces formed therein, in the first direction is set to equal to or greater than 0.25 times and equal to or less than 0.5 times of a total length of the vibrating arm portion from the base end to the distal end.


An individual electrode formed on an inside surface of a dummy channel, a common electrode formed on an inside surface of a discharge channel, an individual pad formed in a connection groove of an actuator plate, connecting the individual electrodes opposed in an X direction across the discharge channel, and to which an FPC is connected, a shallow groove portion opened toward a rear side on the actuator plate, a common pad formed in the shallow groove portion, and connecting the common electrode and the FPC through the shallow groove portion, and a dividing groove formed in a corner portion made by a surface and a rear-side end surface of the actuator plate, and dividing the common pad from the individual pad.


A method of manufacturing a piezoelectric vibrator element, a piezoelectric vibrator element, and a piezoelectric vibrator, superior in vibration characteristics, high in quality, and capable of suppressing a variation in frequency after a frequency adjustment, are provided. The method includes a first frequency adjustment step of performing ion milling on a weight metal film for a frequency adjustment formed on a surface of a tip part in each of a pair of vibrating arm parts, and a second frequency adjustment step of performing ion milling on the weight metal film at a lower etch rate than in the first frequency adjustment step after the first frequency adjustment step.


A pair of vibrating arms are arranged side by side in a second direction crossing the first direction, base end sides of which in the first direction are fixed to the base, a pair of inclined surfaces are formed in both sides of the base end of the vibrating arm in the second direction, an end portion in the base end side of an inner inclined surface is connected to an end surface in the tip end side of the base, and an end portion in the base end side of an outer inclined surface is connected to an end surface of the base in the second direction, and the base-end side end portion of the outer inclined surface is arranged closer to the tip end side than the base-end side end portion of the inner inclined surface.

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