Fang X.-S.,Sichuan Xinguang Silicon Technology Co. |
Liu Y.,Sichuan Xinguang Silicon Technology Co. |
Chen J.,Sichuan Xinguang Silicon Technology Co. |
Luo X.-F.,Sichuan Xinguang Silicon Technology Co. |
And 2 more authors.
Xiandai Huagong/Modern Chemical Industry | Year: 2012
To improve the distillation tower top temperature, silicon tetrachloride (STC) with the volume ratio of 0.9%-20.3% is added to the feedstock trichlorosilane (TCS). The flow rate of gas mixture and the surface temperature of silicon rod are adjusted to weaken the adverse effect of addition of STC on the deposition rate of silicon. The amount of STC in the vent gas is significantly decreased and the quality of poly-silicon and the deposition rate of silicon have no obvious change. Under the optimal conditions, the mass ratio of STC in the inlet gas is increased from 4.21 w% to 18.11 w%, and that of the vent gas is decreased from 32.05 w% to 25.62 w%. The increase rate of STC mass ratio in the vent gas is reduced from 6.61 to 0.41.
Hu X.-D.,Leshan Vocational & Technical College |
Jia X.,Leshan Vocational & Technical College |
Zhang D.,Leshan Vocational & Technical College |
Li Z.-R.,Sichuan Xinguang Silicon Technology Co. |
Pu X.-D.,Sichuan Xinguang Silicon Technology Co.
Xiandai Huagong/Modern Chemical Industry | Year: 2016
To solve the problem existing in the distillation process of SiHCl3 for polysilicon production, the original process is reformed. Compared with the original process, the new process flow is simplified and the quantity of accompanying equipment is greatly reduced. The safety and stability of the system are improved and the monthly average yield is increased by 11.1%. The effective utilization of SiH2Cl2 byproduct and good controll of the tail gas emission are also achieved. The monthly average use of NaOH and CaO is reduced by 0.8 t. The refrigeration duty of condenser of distillation tower is saved by 25%, and heat duty of reboiler is saved by 28.7%. Furthermore, the qualified rates of refined SiHCl3 and polysilicon products are increased by 5.3% and 5.9%, respectively. © 2016, China National Chemical Information Center. All right reserved.