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Peng K.,Siargo Shanghai Ltd. | Zhouand C.Q.,Siargo Shanghai Ltd. | Deng W.H.,Siargo Shanghai Ltd. | Chen C.C.,Siargo Ltd. | Huang L.J.,Siargo Ltd.
16th International Flow Measurement Conference 2013, FLOMEKO 2013 | Year: 2013

Variable area flow meters or rotameters have been widely used for flow monitoring of industrial process, particularly where the cost is the first priority. However, with the constant demands for process digitization, remote data transmission, data log, flow level register and alarm triggered automation have been highly demanded. These characters are not available for the rotameters while the low cost barrier prevents other existing technology to provide the same solution. MEMS mass flow technology on the other hands, is ready to emerge for these applications. In this paper we present the working principle, design and performance of a series of MEMS flow meters that can be used to replace the rotameters. The all new digital flow meters meet all current digitization requirements while excel in performance at a very competitive cost. Copyright© (2013) by the International Measurement Federation (IMEKO). Source


Feng Y.,Siargo Shanghai Ltd. | Jiang C.M.,Siargo Shanghai Ltd. | Deng W.H.,Siargo Shanghai Ltd. | Yao Y.H.,Siargo Ltd. | And 2 more authors.
16th International Flow Measurement Conference 2013, FLOMEKO 2013 | Year: 2013

Peristaltic pumping is a common process in chemical, biomedical and pharmaceutical applications. However, the actual measured flow is frequently found to be erroneous with an accuracy no better than 10%. In this paper we present a design of the precise fluid metering sensing technology using MEMS thermal time-of-flight principle in a close loop with the peristaltic pumping for the bio-fluidic analyser. The data indicate that the MEMS fluidic meter could significantly improve the accuracy and control of the fluid delivery within 5% which not only substantially reduces the cost but boosts the performance of the instrument by better controlling the sample to carrier liquid injections. Copyright© (2013) by the International Measurement Federation (IMEKO). Source


Huang L.J.,Siargo Ltd. | Chen C.C.,Siargo Ltd. | Liu Y.N.,Siargo Shanghai Ltd. | Ruan J.L.,Siargo Shanghai Ltd. | Deng W.H.,Siargo Shanghai Ltd.
16th International Flow Measurement Conference 2013, FLOMEKO 2013 | Year: 2013

Measurement of gas with high humidity or gas converted from liquid phase is frequently encountered. Accurate metering is always a challenging process as the remaining liquid vapors may significantly affect the performance of the measuring unit. In this paper, we presented a novel design of a mass flow meter which is utilizing a single MEMS calorimetric mass flow sensor chip integrated with a substrate micro-heating circuitry. The results indicated that the design can effectively work for the gas flow measurement under the presence of high humidity or liquid vapors with no requirement of additional external heating assistance to avoid condensation that alternates the measurement results. The present meter calibration, tests and applications will be also discussed. Copyright© (2013) by the International Measurement Federation (IMEKO). Source


Luo J.,Siargo Shanghai Ltd. | Liu Y.,Siargo Shanghai Ltd. | Liao X.,Siargo Shanghai Ltd. | Ruan J.,Siargo Shanghai Ltd. | And 2 more authors.
15th International Flow Measurement Conference 2010, FLOMEKO 2010 | Year: 2010

The demands in homecare in North America and Europe have required cost effective disposable flow sensors for avoiding cross contamination and other damages. Examples are the infusion pumps and personal ventilators. For the infusion pump applications, a miniature liquid flow sensor is required to handle the micro flow during the injection of the medicine so that a constant injection can ensure the patient with ultimate comfort and prevention of side effects. This application also requires micro-fluidic design for the flow range of 0-500mL/hr. A MEMS flow sensor designed with the extended range capability could be the choice for this purpose. In this paper we present the design and prototype of such a sensor. The MEMS flow sensor chip with calorimetric principle is separated from the control electronics and encapsulated into a medical plastic package where a pre-manufactured micro-fluidic channel provide the path for the medicine with the sensor placed at the sidewall of the pre-manufactured flow channel. The MEMS sensors that have excellent exchangeability make it possible for disposability of the entire plastic unit. Copyright © FLOMEKO 2010. Source


Peng K.,Siargo Shanghai Ltd. | Jiang C.,Siargo Shanghai Ltd. | Liu Y.,Siargo Shanghai Ltd. | Deng W.,Siargo Shanghai Ltd. | And 4 more authors.
15th International Flow Measurement Conference 2010, FLOMEKO 2010 | Year: 2010

Cost effective flow meters are dominated by rotameters or variable area flow technology. These meters only measure instant volumetric flow rate with a low accuracy. In addition, the meters are not capable for temperature and pressure compensation as well as remote communication. With increasing demands on data communication and remote control in current industrial processes or gas measurement applications, development of new technologies would be necessary. We present a series of MEMS mass flow meters that are cost compatible with the variable area flow meters while providing all digital data process including accumulated flow rate measurements, user programmable flow alarm and flow data storage. These in-line meters provide packages in pipe diameter from 4 mm up to 100mm. It is powered with battery and can be used as a stand-alone potable option. The meter is also equipped with the industrial standard RS485 Modbus communication interface for easy networking and remote management. Copyright © FLOMEKO 2010. Source

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