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Cairo, Egypt

Operating capacitive sensors in force feedback mode has many benefits, such as improved bandwidth, and lower sensitivity to process and temperature variation. To overcome, the non-linearity of the voltage-to-force relation in capacitive feedback, a two-level feedback signal is often used. Therefore, a single-bit - modulator represents a practical way to implement capacitive sensors interface circuits. However, high-Q parasitic modes that exist in high-Q sensors (operating in vacuum) cause a stability problem for the - loop, and hence, limit the applicability of - technique to such sensors. A solution is provided that allows stabilizing the - loop, in the presence of high-Q parasitic modes. The solution is applicable to low or high order - based interfaces for capacitive sensors.


Patent
King Abdulaziz City for Science, Technology and Si-Ware Systems | Date: 2012-09-28

A ring laser gyroscope (RLG) includes moveable minors and a Micro-Electro-Mechanical Systems (MEMS) actuator coupled to the moveable minors to cause a respective displacement thereof that induces a phase modulation on counter-propagating light beams relative to one another. The induced phase modulation creates an optical path difference between the counter-propagating light beams corresponding to a virtual rotation that reduces the lock-in of the RLG.


A Micro-Electro-Mechanical System (MEMS) interferometer provides for self-calibration of mirror positioning of a moveable mirror. The moveable mirror is coupled to a MEMS actuator having a variable capacitance. The MEMS interferometer includes a capacitive sensing circuit for determining the capacitance of the MEMS actuator at two or more known positions of the moveable mirror and a calibration module for using the actuator capacitances at the known positions to compensate for any drift in the capacitive sensing circuit.


Patent
Si-Ware Systems | Date: 2013-02-04

A spatial splitting-based optical Micro Electro-Mechanical Systems (MEMS) Interferometer includes a spatial splitter for spatially splitting an input beam into two interferometer beams and a spatial combiner for spatially combining the two interferometer beams. A MEMS moveable mirror is provided to produce an optical path difference between the first interferometer beam and the second interferometer beam.


Patent
Si-Ware Systems | Date: 2014-03-14

An integrated apertured micromirror is provided in which the micromirror is monolithically integrated with a micro-optical bench fabricated on a substrate using a lithographic and deep etching technique. The micromirror has an aperture therein and is oriented such that the micromirror is optically coupled to receive an incident beam having an optical axis in a plane of the substrate and to at least partially transmit the incident beam therethrough via the aperture.

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