Shinko Seiki Co.

Kōbe-shi, Japan

Shinko Seiki Co.

Kōbe-shi, Japan
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Howlader M.M.R.,McMaster University | Kagami G.,Shinko Seiki Co. | Lee S.H.,University of Texas at Dallas | Wang J.G.,University of Texas at Dallas | And 2 more authors.
Journal of Microelectromechanical Systems | Year: 2010

To investigate the sequentially plasma-activated bonding (SPAB) mechanism of silicon/silicon wafers, the surface hydrophilicity, and the interface voids, nanostructures and chemical compositions that control the bonding quality, such as bonding strength, have been observed. Although the sequentially plasma-activated surfaces are hydrophilic, the SPAB mechanism is not identical to the hydrophilic bonding. SPAB shows high bonding strength at room temperature and water rearrangement below 150 °C, which removes the water from the interface to the bulk. This results in a thinner amorphous silicon oxide layer at the interface. Further heating of the bonded wafers desorbs water from the bulk. The heating at 225 °C starts producing hillocks at the interface, which turn into voids at temperatures above 400 °C for absorbing the hydrogen gas produced from the desorbed water at the interface. The new and bigger voids are due to the hydrogen gas at 600 °C and start accumulating at 800 °C, resulting in bubbles caused by the accumulation of voids at the preferential sites. No nitrogen exists either in silicon or in the amorphous SiO2 layer at the interface. The Si-L2,3 edges from the amorphous silicon oxide at the bonded interface are identical to those of the standard SiO2. © 2006 IEEE.


Tamura M.,University of Electro - Communications | Noma M.,Shinko Seiki Co. | Yamashita M.,Hyogo Prefectural Institute of Technology
Surface and Coatings Technology | Year: 2014

Hydrogen cracking of high-strength steels is a major concern in steel processing and service, and occurs in several applications, such as cracking of rolled steel products, cold cracking of welds, and as a result of corrosion in H2S environments. Low-permeation hard coatings can be used as wear-resistant hydrogen permeation barriers. When coated on stainless steel they can reduce the rate of hydrogen transport. They might be useful for sterling engines, tritium containment, or components of hydrogen fuel cells. The hydrogen permeation behavior of BN-coated Type 316L stainless steel was investigated. In comparison with TiN and SiC coatings, the c-BN (cubic boron nitride) coating, deposited by magnetically enhanced plasma ion plating, was effective to reduce the rate of hydrogen permeation through stainless steel. The BN coating can be used for high-temperature and wear-resistant applications as hydrogen permeation barriers. © 2014 Elsevier B.V.


Patent
Shinko Seiki Company and Matsumoto | Date: 2010-03-24

[Problem to be Solved] Examination more reliable than ever is to be realized. [Solution] An unpolarized light beam emitted from a target presenting light source (12) is collimated by a collimator lens (20), and is made to be incident on a target presenting liquid crystal shutter (22), while an unpolarized light beams emitted from a background presenting light source (14) is collimated by a collimator lens (30), and is made to be incident on a background presenting liquid crystal shutter (32). The liquid crystal shutters (22, 32) have shutter patterns which are reverses to each other. The target and background light beams emerging from said liquid crystal shutters (22, 32) are combined with each other, together with their polarization states, by a half prism (24) acting as combining means. The resultant unpolarized light beam resulting from the combining is projected through a magnifying optical system (26) onto an eye to be examined. Since an unpolarized light beam is projected onto the eye, reliable examination, unaffected by polarization, can be realized.


Patent
Shinko Seiki Company and Ohmae | Date: 2013-03-27

[Means for Realizing Subject] According to the invention, DLC powder, which is hard carbon powder, is produced by plasma CVD using a hydrocarbon gas as a material gas, in a first step, i.e. a DLC powder producing processing step. Then, in a second step, i.e. a DLC-to-OLC converting processing step, the DLC powder is heated in a vacuum or in an inert gas atmosphere to thereby convert the DLC powder into OLC. Like this, according to the invention, since a hydrocarbon gas can be used as a starting material to manufacture OLC, OLC can be manufactured at a significantly low cost.


Kobayashi T.,Ritsumeikan University | Shimizu K.,Ritsumeikan University | Shimizu K.,Kyoto University | Kaizuma Y.,Shinko Seiki Co. | Konishi S.,Ritsumeikan University
Lab on a Chip - Miniaturisation for Chemistry and Biology | Year: 2011

This paper reports a novel combination of hydrophilic/hydrophobic materials for the evolution of liquid manipulation. Droplet generation based on a hydrophilic/hydrophobic mechanism is a promising method for highly accurate liquid manipulations. Although several droplet manipulation devices utilizing hydrophilic/hydrophobic patterns have been reported, it has been difficult to split fluid into droplets solely through hydrophilic/hydrophobic patterns in a microchannel. In this study, a material combination for fabricating hydrophilic/hydrophobic patterns was investigated and their wettability difference was enhanced for droplet generation. To improve hydrophilicity, we attempted to increase the surface area of silicon oxide through pulsed plasma chemical vapor deposition (PPCVD). To improve hydrophobicity, the damage to the hydrophobic patterns in the fabrication process was reduced. We successfully enhanced the difference in contact angles from 54.3° to 86.6° by combining the developed hydrophilic material and hydrophobic material. The developed material combination could successfully split fluid into a quantitative droplet of 14.1 nL in a microfluidic chip. Because the developed hydrophilic/hydrophobic combination enables the formation of a droplet with desirable shape in microchannels, the developed hydrophilic/hydrophobic combination is a promising component for lab-on-a-chip applications. © 2011 The Royal Society of Chemistry.


Kobayashi T.,Ritsumeikan University | Shimizu K.,Ritsumeikan University | Shimizu K.,Kyoto University | Kaizuma Y.,Shinko Seiki Co. | Konishi S.,Ritsumeikan University
Applied Physics Letters | Year: 2011

In this letter, we report a technology for fabricating superhydrophobic/ superhydrophilic patterns using a combination of a nanostructure-imprinted perfluoropolymer and nanostructured silicon oxide. In our previous study, we used a combination of hydrophobic and superhydrophilic materials. However, it was difficult to split low-surface-tension liquids such as biological liquids into droplets solely using hydrophobic/hydrophilic patterns. In this study, the contact angle of the hydrophobic region was enhanced from 109.3°to 155.6°by performing nanostructure imprinting on a damage-reduced perfluoropolymer. The developed superhydrophobic/superhydrophilic patterns allowed the splitting of even those media that contained fetal bovine serum into droplets of a desired shape. © 2011 American Institute of Physics.


Konishi S.,Ritsumeikan University | Nakagami C.,Ritsumeikan University | Kobayashi T.,Ritsumeikan University | Tonomura W.,Ritsumeikan University | Kaizuma Y.,Shinko Seiki Co.
Japanese Journal of Applied Physics | Year: 2015

In this work, a lift-off process with bi-layer photoresist patterns was applied to the formation of hydrophobic/hydrophilic micropatterns on practical polymer substrates used in healthcare diagnostic commercial products. The bi-layer photoresist patterns with undercut structures made it possible to peel the conformal-coated silicon oxide (SiOx) films from substrates. SiOx and silicon carbide (SiCx) layers were deposited by pulsed plasma chemical vapor deposition (PPCVD) method which can form roughened surfaces to enhance hydrophilicity of SiOx and hydrophobicity of SiCx. Microfluidic applications using hydrophobic/hydrophilic patterns were also demonstrated on low-cost substrates such as poly(ethylene terephthalate) (PET) and paper films. © 2015 The Japan Society of Applied Physics.


Ohtsu Y.,Saga University | Yahata Y.,Saga University | Kagami J.,Shinko Seiki Co. | Kawashimo Y.,Shinko Seiki Co. | Takeuchi T.,Shinko Seiki Co.
IEEE Transactions on Plasma Science | Year: 2013

High-density radio-frequency (RF) plasma sources have been produced by ring-shaped hollow-cathode discharge at various trench shapes. The influence of hollow-cathode trench shape on high-density plasma production has been investigated at a wide range of argon gas pressure and various input powers. The trench shapes are selected from well-typed, taper-typed, step-typed, and three improved step-typed trench shapes. It is revealed that, at the lower pressure less than 200 mtorr, the plasma density for the well-typed shape is the highest among the three shapes, while for the step-typed shape, it is the lowest. For the higher pressure more than 200 mtorr, the plasma density for the step-typed shape has the highest value. The results indicate that the plasma density for all typed shapes is almost proportional to RF input power. It is found that the improved step-typed trench shapes can attain a wide range of gas pressure sustaining higher plasma density. © 1973-2012 IEEE.


Hagihara T.,University of Hyogo | Hagihara T.,Shinko Seiki co. | Yaori K.,University of Hyogo | Iwakura K.,University of Hyogo | And 2 more authors.
Electrochimica Acta | Year: 2015

Abstract The electrodeposition of Pt from aqueous solutions of K2PtCl4 (Pt(II)), H2PtCl6 (Pt(IV)), and a mixture of Pt(II) and Pt(IV) was studied using the electrochemical quartz crystal microbalance (EQCM) method. Pt deposition and cathode current flow began at the same potential in the Pt(II) solution. On the other hand, in the Pt(IV) solution, the cathode current increased at a more positive potential followed by Pt deposition at a more negative potential than in the Pt(II) solution. This difference in the potentials is due to the reduction reaction of Pt(IV) to Pt(II). Thus, Pt deposition in the Pt(IV) solution occurred in two potential ranges. In the first range, which was more positive than the second one, Pt was deposited via the reduction of Pt(II) to Pt(0). In the second range, direct deposition from Pt(IV) to Pt(0) proceeded, but was followed by hydrogen adsorption, which inhibited further Pt deposition. © 2015 Elsevier Ltd.


Patent
Shinko Seiki Company | Date: 2011-06-06

[Subject] Manufacturing onion-like carbon at a low cost. [Means for Realizing Subject] According to the invention, DLC powder, which is hard carbon powder, is produced by plasma CVD using a hydrocarbon gas as a material gas, in a first step, i.e. a DLC powder producing processing step. Then, in a second step, i.e. a DLC-to-OLC converting processing step, the DLC powder is heated in a vacuum or in an inert gas atmosphere to thereby convert the DLC powder into OLC. Like this, according to the invention, since a hydrocarbon gas can be used as a starting material to manufacture OLC, OLC can be manufactured at a significantly low cost.

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