Entity

Time filter

Source Type


Patent
Shanghai Micro Electronics Equipment Co. and Tsinghua University | Date: 2013-02-21

A method for measuring the displacement of a planar motor rotor. The measuring method comprises: four magnetic induction intensity sensors are distributed on the planar motor rotor; sampled signals of the four distributed sensors are processed to obtain signals B


Patent
Shanghai Micro Electronics Equipment Co. and Tsinghua University | Date: 2013-12-06

A silicon wafer platform with anti-collision function comprises a silicon wafer platform body (


Patent
Sagem Defense Securite and Shanghai Micro Electronics Equipment Co. | Date: 2013-09-25

The invention relates to a photolithographic illumination device including: a light beam source; a condenser (


Patent
Shanghai Micro Electronics Equipment Co. | Date: 2014-01-22

A magnetic alignment system is disclosed, including a magnet array (


Patent
Shanghai Micro Electronics Equipment Co. | Date: 2013-07-02

A linear motor includes a magnet unit and a coil unit. The magnet unit includes two magnet arrays oppositely parallel and symmetrically located on a magnetic yoke: a first and a second magnet array. The coil unit is disposed in a magnetic gap between the two magnet arrays. In a spatial rectangular coordinate system defined by X, Y and Z axes, the coil unit includes a first and a second coil array arranged in a stacked manner in the Z-axis direction and staggered from each other by a distance of P in the Y-axis direction. P satisfies: when a control system charges the coil unit with a desired current, the coil unit generates a control force along the Y-axis direction, another control force along the Z-axis direction, and a moment about the X-axis direction, which may reduce a magnetic flux leakage and provide higher driving forces, making the linear motor generate required three degrees-of-freedom control force or control torque, and further improve vertical and horizontal magnetic fluxes in the magnet array.

Discover hidden collaborations