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Patent
Shanghai Hua Hong Nec Electronics Co. | Date: 2013-08-16

A method of fabricating a P-type surface-channel laterally diffused metal oxide semiconductor device includes forming a gate structure with polysilicon and metal silicide, and the processes of channel implantation, long-time high-temperature drive-in, formation of a heavily doped N-type polysilicon sinker and boron doping of a polysilicon gate, are performed in this order, thereby ensuring the gate not to be doped with boron during its formation. The high-temperature drive-in process is allowed to be carried out to form a channel with a desired width, and a short channel effect which may cause penetration or electric leakage of the resulting device is prevented. As the polysilicon gate is not processed by any high-temperature drive-in process after it is doped with boron, the penetration of boron through a gate oxide layer and the diffusion of N-type impurity contained in the heavily doped polysilicon sinker into the channel or other regions are prevented.


Patent
Shanghai Hua Hong Nec Electronics Co. | Date: 2013-08-16

A semiconductor device includes: a P+ substrate; a P epitaxial layer over the P+ substrate; a P-well and an N drift region in the P epitaxial layer and laterally adjacent to each other; an N+ source region in the P-well and connected to a front-side metal via a first contact electrode; an N+ drain region in the N drift region and connected to the front-side metal via a second contact electrode; a gate structure on the P epitaxial layer and connected to the front-side metal via a third contact electrode; and a metal plug through the P epitaxial layer and having one end in contact with the P+ substrate and the other end connected to the front-side metal, the metal plug being adjacent to one side of the N+ source region that is farther from the N drift region. A method for fabricating the semiconductor device is also disclosed.


Patent
Shanghai Hua Hong Nec Electronics Co. | Date: 2013-08-19

An LDMOS device is disclosed. The LDMOS device includes: a substrate having a first type of conductivity; a drift region having a second type of conductivity and a doped region having the first type of conductivity both formed in the substrate; a drain region having the second type of conductivity and being formed in the drift region, the drain region being located at an end of the drift region farther from the doped region; and a buried layer having the first type of conductivity and being formed in the drift region, the buried layer being in close proximity to the drain region and having a step-like bottom surface, and wherein a depth of the buried layer decreases progressively in a direction from the drain region to the doped region. A method of fabricating LDMOS device is also disclosed.


Patent
Shanghai Hua Hong Nec Electronics Co. | Date: 2013-08-14

A method of back-side patterning of a silicon wafer is disclosed, which includes: depositing a protective layer on a front side of a silicon wafer; forming one or more deep trenches through the protective layer and extending into the silicon wafer by a depth greater than a target thickness of the silicon wafer; flipping over the silicon wafer and bonding the front side of the silicon wafer with a carrier wafer; polishing a back side of the silicon wafer; performing alignment by using the one or more deep trench alignment marks and performing back-side patterning process on the back side of the silicon wafer; and de-bonding the silicon wafer with the carrier wafer.


Patent
SHANGHAI HUA HONG NEC Electronics CO | Date: 2013-08-12

A radio frequency (RF) laterally diffused metal oxide semiconductor (LDMOS) device includes a substrate, a p-type epitaxial layer, a p-type well, a lightly doped n-type drain region, a gate oxide layer, a polysilicon gate, a dielectric layer and a Faraday shield. The Faraday shield includes: a horizontal portion covering a portion of the polysilicon gate and isolated from the polysilicon gate by the dielectric layer; a step-like portion with at least two steps covering a portion of the lightly doped n-type drain region and isolated from the lightly doped n-type drain region by the dielectric layer; and a vertical portion connecting the horizontal portion with the step-like portion and isolated from the polysilicon gate and the lightly doped n-type drain region by the dielectric layer. A method of fabricating such an RF LDMOS device is also disclosed.

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