Screen Holdings Co. | Date: 2016-03-24
With a cover member being located directly upward of an opening of a casing, a substrate in a horizontal attitude is carried into a gap between the cover member and the opening. The carried-in substrate is moved to the inside of the casing through the opening. The cover member is lowered, so that the opening is closed. An inert gas is supplied to the inside of the casing. One surface of the substrate is irradiated with vacuum ultraviolet rays by a light emitter while the substrate is moved in a horizontal direction in the casing. The cover member is lifted, so that the opening is opened. The substrate is moved to a position between the cover member and the opening from a position inside of the casing through the opening. Thereafter, the substrate in the horizontal attitude is taken out in the horizontal direction.
SCREEN Holdings Co. | Date: 2016-03-07
A substrate processing device includes a holding member for holding a substrate, and an opposed member having a body portion and an extended portion extending from at least a part of a peripheral edge part of the body portion. A protrusion is provided on one part of a tip side part of the extended portion and a side surface part of the holding member, and the other part is provided with a restricting structure disposed opposite to the protrusion and restricting relative motion of the protrusion. The relative motion between the holding member and the opposed member is restricted, and the substrate processing device further includes a rotating mechanism, and a nozzle for discharging a processing solution and the protrusion and the restricting structure are disposed below an upper surface of the holding member.
SCREEN Holdings Co. | Date: 2016-03-11
A solidified body forming step includes: a first step of landing a processing surface of a cooling member on a liquid film to solidify the liquid to be solidified located in an area sandwiched between an upper surface and the processing surface; and a second step of releasing the processing surface from the solidified area solidified in the first step. The processing surface has a lower temperature than a freezing point of the liquid to be solidified. Adhesion between the solidified area and the processing surface is smaller than that between the solidified area and the upper surface.
Screen Holdings Co. | Date: 2016-03-21
Disclosed is a printing apparatus that performs printing onto a print medium including a transporting device that transports a print medium, a plurality of printing heads, a photographing unit that photographs the print medium, a shift detecting chart forming device, and a correcting device. The shift detecting chart forming device forms a shift detecting chart having a first line segment group consisting of first line segments that are printed onto the print medium at given intervals in an orthogonal direction with respect to the transportation direction with a reference printing head, and a second line segment group formed along the first line segment group, and consisting of second line segments that are printed with a subsequent printing head. The correcting device corrects a printing timing with the subsequent printing head relative to the reference printing head in accordance with a density variation of the photographed shift detecting chart.
SCREEN Holdings Co. and Ricoh Co. | Date: 2016-03-16
In printing apparatus, an edge sensor detects a serpentine amount caused by transportation of a web. A predicted waveform data generating unit generates predicted waveform data on the serpentine amount to be produced in the following web in accordance with actually measured waveform data on the detected serpentine amount. A correcting unit corrects a printing position of an image in accordance with a shift amount, and applies a corrected printing position to a printing head. Here, the shift amount is determined with the shift amount determining unit in accordance with the predicted waveform data. Accordingly, the shift amount is determinable in accordance with the actually measured waveform data on the serpentine amount detected with the edge sensor more accurately than that through a method in which a shift amount is directly determined. This allows suppressed misregister.
SCREEN Holdings Co. | Date: 2016-07-19
An inkjet printing apparatus includes a transport speed detector for detecting transport speed of a printing medium, an inkjet head having a plurality of discharge portions for discharging ink droplets from the discharge portions for printing, and a flushing controller for carrying out discrete flushing from the discharge portions. For an acceleration area of the printing medium where the transport speed detector detects an increase in transport speed before printing, a first discharge rate is set as discharge rate of the ink droplets per unit time for the discharge flushing. For a constant speed area of the printing medium where the transport speed detector detects a substantially constant transport speed during printing, a second discharge rate lower than the first discharge rate is set as discharge rate of the ink droplets per unit time for the discharge flushing.
SCREEN Holdings Co. | Date: 2016-03-29
A deoxygenation apparatus reduces the concentration of dissolved oxygen in a target liquid. The deoxygenation apparatus includes a reservoir for holding the target liquid, a gas supply part for supplying an additive gas different from oxygen into the target liquid in the reservoir, a storage part for storing correlation information indicating the relationship between the concentration of dissolved oxygen in the target liquid and a total supply amount that is a total amount of the additive gas supplied from the gas supply part into the target liquid from when supply was started, and a calculation part for obtaining the concentration of dissolved oxygen in the target liquid on the basis of the total supply amount and the correlation information. The concentration of dissolved oxygen in the target liquid is easily acquired without measuring the concentration of dissolved oxygen in the target liquid with an oxygen analyzer.
SCREEN Holdings Co. | Date: 2016-06-16
Light is applied for preheating from a halogen lamp to a lower surface of a semiconductor wafer supported on a susceptor within a chamber. Thereafter, flash light is applied for flash heating from a flash lamp to an upper surface of the semiconductor wafer. Treatment gas supplied from a gas supply source is heated by a heater, and supplied into the chamber. A flow amount control valve is provided to increase a flow amount of the treatment gas supplied into the chamber. Contaminants discharged from a film of the semiconductor wafer during heat treatment are discharged to the outside of the chamber with a gas flow formed by a large amount of high-temperature treatment gas supplied into the chamber to reduce contamination inside the chamber.
SCREEN Holdings Co. | Date: 2016-06-22
Light is applied for preheating from a halogen lamp to a lower surface of a semiconductor wafer supported on a susceptor within a chamber. Thereafter, flash light is applied for flash heating from a flash lamp to an upper surface of the semiconductor wafer. High-temperature treatment gas heated by a heater is supplied into the chamber to preheat a structure inside the chamber including a susceptor before heat treatment for an initial semiconductor wafer of a lot starts. By raising the temperature of the structure inside the chamber to a temperature substantially equivalent to a temperature of the structure during steady treatment, all semiconductor wafers constituting the lot are supportable on the susceptor maintained at a constant temperature without the necessity of dummy running. Accordingly, a temperature history is equalized for all the semiconductor wafers.
Screen Holdings Co. | Date: 2016-03-07
A transport apparatus includes a correction mechanism, a detector, and a meandering attenuator. The detector detects a widthwise position of elongated strip-shaped printing paper. The correction mechanism corrects the widthwise position of the printing paper, based on a detection result from the detector. The meandering attenuator is disposed upstream or downstream of the correction mechanism as seen in a transport direction. The meandering attenuator includes a plurality of attenuation rollers rotating while being in contact with the printing paper. When the printing paper passes over the attenuation rollers, the meandering of the printing paper is attenuated by the friction between the attenuation rollers and the printing paper. Thus, meandering exceeding the correction capability of the correction mechanism and new meandering occurring in the correction mechanism are attenuated.