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A roller-type depressing device, an imprinting device, and a roller-type depressing method which are capable of suppressing an uneven elastic deformation of a main roller, and which are also capable of depressing an object uniformly. A roller-type depressing device depresses an object, and includes a main roller having at least a surface formed of an elastic material, and depressing the object, a roller moving unit moving the main roller relative to the object, a pressure adjusting unit adjusting pressure applied to the object by the main roller, a pressure receiving stage receiving the pressure from the main roller via the object, an intermediate roller having at least a surface formed of a material with a larger elastic modulus than the elastic material, and supporting the main roller, and, a backup roller formed shorter in an axial direction than the main roller and the intermediate roller, and supporting the intermediate roller.


Patent
Scivax Corporation | Date: 2017-02-15

Provided is an optical component capable of sufficiently suppressing a reflection even if the incident angle of a light source changes with a line direction being as a rotation axis in a reflection suppressing structure in a line-and-space shape. The optical component includes a base having a function as an optical component, and a reflection suppressing structure in a line-and-space shape formed on a surface of the base, and including a plurality of sequential concavities and convexities defining a convex shape in a cross-sectional view. When a position of a mid-point of a bottom side of the convex shape is an origin, the bottom side is y-axis, a height direction relative to the bottom side is x-axis, a width of the bottom side of the convex shape is P, a height of the convex shape is H, r = 0.1, and an arbitrary position on the convex shape is (x, y), the convex shape satisfies a following formula (1):


A roller-type depressing device that can depress an object like a die or a molding target by controlling the pressure of a roller, an imprint device and an imprint method utilizing the same are provided. A roller-type depressing device is to depress the object like a die 1 or a molding target 2 by a main roller 38, and includes a pressure adjusting plate provided with the main roller 38, a roller moving unit that moves the main roller 38 relative to the object, a pressure adjusting unit that holds the pressure adjusting plate 332 in such a way that force produced by a pressure difference in fluid applied to both faces of the pressure adjusting plate 332 acts on the main roller 38, a pressure receiving stage 322 receiving pressure of the main roller 38 via the object, a pressure adjuster that adjusts the pressure difference in fluid applied to both faces of the pressure adjusting plate 332, and a pressure equalizer (backup rollers 39) that equalizes, in an axial direction thereof, pressure applied to the object by the main roller 38.


Patent
Scivax Corporation | Date: 2015-07-01

An imprint device and an imprint method are provided which form mold patterns on both surfaces of a molding target. An imprint device transfers mold patterns on both surfaces of a molding target 2 using flexible first and second dies 1A, 1B, and the device includes a first casing 33A that applies pressure of a first pressurizing room 30A to the die 1A and the molding target 2, a second casing 33B that applies pressure of a second pressurizing room 30B to the die 1B and the molding target 2, a pressurizer 35 that adjusts the pressures of the pressurizing room 30A and the pressurizing room 30B, a first moving unit that moves the die 1A and the molding target 2 in a direction coming close to or distant from each other, a second moving unit that moves the die 1B and the molding target 2 in a direction coming close to or distant from each other, a depressurizer 45 that depressurizes a depressurizing room 40 formed between the casing 33A and the casing 33B, and eliminates fluids present between the die 1A and the molding target 2 and between the die 1B and the molding target 2, and a pressure adjuster that adjusts pressures so as to reduce pressure differences between the depressurizing room 40 and the pressurizing room 30A, the pressurizing room 30B.


Patent
Scivax Corporation | Date: 2014-12-24

An imprinting device transfers a molding pattern of a die 1 to a molding target 2. The imprinting device includes a stage 32 and a cover 33 that depress the die 1 and the molding target 2, a frame 43 formed with a hole into which the stage 32 is fitted and surrounding an outer circumference thereof, a first moving means for relatively moving the stage 32 and the cover 33 in a direction coming close to or becoming apart from each other, a second moving means 46 for relatively moving the cover 33 and the frame 43 in a direction coming close to or becoming apart from each other, a first depressurizing means 45 for depressurizing a depressurizing room 40 formed any one of the cover 33, the die 1 or the molding target 2, and the stage 32, and further the frame 43, and eliminating a fluid between the die 1 and the molding target 2, and a second depressurizing means 35 for eliminating a fluid in a space between the cover 33 and the die 1 or the molding target 2. The imprinting device can be thus downsized and costs can be reduced.


Patent
Scivax Corporation | Date: 2014-11-19

A shaping method and a shaping device are provided which can easily and inexpensively form a curved face in a film including a micropattern. A shaping method is for forming, in a predetermined shaping-target area of a film 20 including a patterned face with a micropattern 20a, and a rear face opposite to the patterned face, a curved face beyond the thickness of the film 20, and includes a fixing step for fixing an outer edge of the shaping-target area of the film 20 by fixing means 94, a first heating step for heating the film 20 by heating means 95, and a pressure adjusting step for producing a predetermined pressure difference between both faces of the film 20 by the pressurizing means in such a way that pressure at a side where the film 20 is fixed in the fixing step becomes small to form a pre-curved face. The pre-curved face is shaped on a pressure receiving stage 32 including a pressure receiving surface that is a predetermined curved face, thereby forming a desired curved face.


There is provided a roller-type depressing device, an imprinting device, and a roller-type depressing method which are capable of suppressing an uneven elastic deformation of a main roller, and which are also capable of depressing an object uniformly. A roller-type depressing device depresses an object, and includes a main roller 37 having at least a surface formed of an elastic material 37a, and depressing the object, a roller moving unit moving the main roller 37 relative to the object, a pressure adjusting unit adjusting pressure applied to the object by the main roller 37, a pressure receiving stage 322 receiving the pressure from the main roller 37 via the object, an intermediate roller 38 having at least a surface formed of a material with a larger elastic modulus than the elastic material 37a, and supporting the main roller, and, a backup roller 39 formed so as to be shorter in an axial direction than the main roller 37 and the intermediate roller 38, and supporting the intermediate roller 38.


Patent
Scivax Corporation and Maruzen Petrochemical Co. | Date: 2014-08-01

A cyclic-olefin-based thermoplastic resin for thermal imprint to be used in the production of a sheet or a film which contains at least one of skeletons represented by the following chemical equation 1 or the following chemical equation 2 in a main chain. The glass transition temperature Tg ( C.) and the value ([M]) of MFR at 260 C. satisfy the following equation 1, and [M]<30. The thermal imprint characteristics (transferability, mold release characteristic, and the like) are superior and the productivity (throughput) is improved.


Patent
Scivax Corporation | Date: 2014-10-01

The purpose of the invention is to provide an imprinting device and an imprinting method with which the size of the device and the cost can be reduced. An imprinting device for transferring a molding pattern of a mold (1) to a substance being molded (2), the device being configured from: a case (33) that configures a controlled pressure chamber (30); a stage (32) that supports the mold (1) and the substance being molded (2); a frame (43) that surrounds the perimeter of the stage (32); a first movement means (not shown) capable of moving the case (33) relatively toward and away from the stage (32); a second movement means (46) capable of moving the case (33) relatively toward and away from the frame (43); a pressure-controlling means (35) for adjusting the pressure of the fluid in the controlled pressure chamber (30); and a pressure-reducing means (45) for reducing the pressure of a pressure reduction chamber (40) configured from the stage (32), the frame (43), and the mold (1) or the substance being molded (2), and re moving the fluid between the mold (I) and the substance being molded (2).


Patent
Scivax Corporation | Date: 2015-04-29

A roller-type depressing device, an imprint device and an imprint method utilizing the same which can depress an object like a die or a molding target by controlling the depressing force of a roller is provided. A roller-type depressing device to depress the object with a roller 38 includes a pressure adjusting plate 332 provided with the roller 38, a roller moving unit moving the roller 38 relative to the object, a pressure adjusting unit holding the pressure adjusting plate 332 in such a way that force produced by a pressure difference in fluid applied to both faces of the pressure adjusting plate 332 acts on the roller 38, a pressure receiving stage 322 receiving the pressure of the roller 38 via the object, and a pressure adjuster adjusting the pressure difference in fluid applied to both faces of the pressure adjusting plate 332.

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