Scientific Manufacturing Complex Technological Center

Moscow, Russia

Scientific Manufacturing Complex Technological Center

Moscow, Russia
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Pyatilova O.V.,National Research University of Electronic Technology | Gavrilov S.A.,National Research University of Electronic Technology | Shilyaeva Y.I.,National Research University of Electronic Technology | Pavlov A.A.,Russian Academy of Sciences | And 2 more authors.
Semiconductors | Year: 2017

The formation of porous silicon (por-Si) layers by the galvanic etching of single-crystal Si samples (doped with boron or phosphorus) in an HF/C2H5OH/H2O2 solution is investigated. The por-Si layers are analyzed by the capillary condensation of nitrogen and scanning electron microscopy (SEM). The dependences of the morphological characteristics of por-Si (pore diameter, specific surface area, pore volume, and thickness of the pore walls), which determine the por-Si combustion kinetics, on the dopant type and initial wafer resistivity are established. © 2017, Pleiades Publishing, Ltd.


Lebedev E.,National Research University of Electronic Technology | Alekseyev A.,National Research University of Electronic Technology | Gavrilin I.,National Research University of Electronic Technology | Sysa A.,National Research University of Electronic Technology | And 3 more authors.
Proceedings of SPIE - The International Society for Optical Engineering | Year: 2016

A method based on electrophoretic deposition (EPD) has been developed to produce uniform and local deposits of multiwalled carbon nanotubes (CNT) on interdigital structures of planar supercapacitor (SC) at room temperatures. Alcohol/acetone suspensions were used under constant voltage conditions in the range of 6 to 100 V, with deposition times ranging from 2 to 60 minutes and electrodes space from 2 to 15 mm. It was shown that for dense layers deposition with good adhesion on the narrow lines of the planar SC electrodes it is necessary to use average values of the electric field and multi-stage method in which the deposition and drying processes are alternated. Electrochemical tests of the sandwich-like supercapacitors with electrodes obtained by the described method were carried out. The specific capacity of experimental samples increased from 0.24 to 1.07 mF/cm2 with an increase in the number of EPD cycles from 3 to 9. © 2016 SPIE..


Polokhin A.A.,National Research University of Electronic Technology | Gerasimenko A.Y.,National Research University of Electronic Technology | Kitsyuk E.P.,Russian Academy of Sciences | Orlov A.P.,Russian Academy of Sciences | And 2 more authors.
Proceedings of SPIE - The International Society for Optical Engineering | Year: 2017

Presently laser radiation is widely used in the variety of fields. This indicates the necessity of the control the intensity of laser radiation. In this case use the sensors-devices that convert laser radiation into an electronic signal. Using carbon nanotubes (CNTs) in sensor design is perspective direction, which can lead to of creating devices with impressive parameters. © 2016 SPIE.


Andrianova M.S.,Scientific Manufacturing Complex Technological Center | Grudtsov V.P.,Scientific Manufacturing Complex Technological Center | Komarova N.V.,Scientific Manufacturing Complex Technological Center | Kuznetsov E.V.,Scientific Manufacturing Complex Technological Center | Kuznetsov A.E.,Scientific Manufacturing Complex Technological Center
Procedia Engineering | Year: 2017

Use of an ion-sensitive field-effect transistor (ISFET) as a signal transducer in a chemical analytical system is of great scientific and application interest. Modification of the gate dielectric surface with biomolecules makes ISFET a universal platform for different applications. In this paper horseradish peroxidase (HRP, EC 1.11.1.7) was used as a label for determination of interaction between thrombin and its aptamer on the ISFET surface. The approach for thrombin detection was based on the replacement of complementary sDNA-probe containing HRP from immobilized aptamer (sDNA) with thrombin, and monitoring residual HRP activity. The biosensor was shown to detect thrombin at the level of 7·10-7 M. © 2017 The Authors. Published by Elsevier Ltd.


Puchnin K.,Moscow State University | Andrianova M.,Scientific Manufacturing Complex Technological Center | Kuznetsov A.,Scientific Manufacturing Complex Technological Center | Kovalev V.,Moscow State University
Biosensors and Bioelectronics | Year: 2017

A series of novel calixarene-based tubes comprising different numbers of silatrane anchoring groups was synthesized. For the first time, a self-assembled monolayer (SAM) derived from calixtubes was formed on a SiO2 surface. The formation of the SAM was confirmed by X-ray photoelectron spectroscopy, scanning electron microscopy-energy dispersive X-ray analysis, and contact angle measurements. Modification of the sensitive surface of a conventional ion-selective field effect transistor (ISFET) with the afforded SAM resulted in the production of a KI-sensitive sensor. This sensor selectively determined KI compare to different alkali metal iodides: NaI, RbI, CsI; also investigation of different potassium salts (acetate, iodide, nitrate, chloride, dihydrophosphate, perchlorate) showed the highest response to KI. This sensor was successfully employed to determine the presence of KI in artificial saliva with a limit of detection of ~3 × 10−8 М. In addition, it was found that the detection limit of the sensor could be increased by combining the sensor with a microfluidic system. Due to the obtained sensor sensitivity and its ability to detect KI in artificial saliva, we could conclude that this sensor shows great potential for application in the determination of KI in different media, such as the human body and in biological liquids, such as saliva or urine. © 2017 Elsevier B.V.


Gavrilov S.A.,National Research University of Electronic Technology | Dronov A.A.,National Research University of Electronic Technology | Kitsyuk E.P.,Scientific Manufacturing Complex Technological Center | Lebedev E.A.,National Research University of Electronic Technology | Terashkevich I.M.,National Research University of Electronic Technology
Biomedical and Pharmacology Journal | Year: 2015

The study demonstrates the possibility of the increase of specific capacity of supercapacitors by means of the formation of ultrathin layers of metal oxides (Al2O3, TiO2, NiO) on a surface of an electrode material, which is an oriented arrays of carbon nanotubes. The study discusses the possibility of the application of ultrathin insulating layers of Al2O3 formed by means of ALD method. Deposition of ultrathin oxide layers was carried out by means of successive ionic layer adsorption and reaction (SILAR) and atomic layer deposition (ALD) methods from a gas phase. The authors developed and studied the features of methodologies of conformal deposition of ultrathin layers of metal oxides on complex surface of CNT (carbon nanotubes) based electrode. The study revealed the relationship of the specific capacity of an electrode materials and the thickness of formed layers of metal oxides on its surface. In order to do that the authors prepared experimental specimens, which consisted of two current collectors, made from stainless steel; on the specimen of those collectors composite electrodes, which comprised a separator, made from porous polypropylene, and electrolyte, were synthesized. The specific capacity of a capacitor structure was calculated in the course of the analysis of experimental charge-discharge characteristics. The analysis of the results showed that presence of an ultrathin layer of a metal oxide on a surface of an electrode material based on CNT significantly increases the specific capacity of a structure; however, an optimal thickness of the layer must be specified depending on a material and a method of deposition case-by-case. Presence of an optimum value of thickness of an oxide layer is related to the fact that, from one point of view, the increase of the thickness of a deposited layer increases the influence of pseudocapacity; from another point of view, it can lead to the decrease of the effective area of an electrode surface due to filling of mezapores' space between CNT. It was observed that the optimal method for application of ultrathin oxide layers in mass-production condition is ALD method with implementation of equipment with group loading of slices.


Velichko O.I.,Belarusian State University of Informatics and Radioelectronics | Shaman Y.P.,Scientific Manufacturing Complex Technological Center | Kovaliova A.P.,Belarusian State University of Informatics and Radioelectronics
Modelling and Simulation in Materials Science and Engineering | Year: 2014

The previously developed model of hydrogen migration and reactions of hydrogen atoms with electrically active impurity is applied to simulate the hydrogen diffusion and passivation process during plasma deuteration of silicon substrates doped with boron. The calculated deuterium concentration profiles agree well over the length of the passivated region with the experimental data obtained upon treatment in hydrogen plasma at a temperature of 200 °C for 5, 10 and 15 min. On the other hand, to achieve a good fit to the abruptness of the calculated profiles between the passivated and unpassivated regions, it is necessary to suppose that the values of the parameters that describe the absorption of hydrogen interstitials by electrically active dopant atoms decrease with increase in the depth of the passivated region. For example, nonuniform spatial distributions of nonequilibrium point defects generated during plasma treatment can lead to a spatial dependence of hydrogen absorption. © 2014 IOP Publishing Ltd.


Gromov D.G.,National Research University of Electronic Technology | Bulyarskii S.,Russian Academy of Sciences | Pavlov A.,Russian Academy of Sciences | Scorik S.,Scientific Manufacturing Complex Technological Center | And 2 more authors.
Diamond and Related Materials | Year: 2016

The possibility of formation of arrays of multiwall carbon nanotubes on catalyst-containing amorphous thin film Co-Zr-N-O with low content of Co (~ 15 at.%) by chemical vapor deposition has been demonstrated. On heating the amorphous alloy crystallizes, whereby the faceted crystal clusters of cobalt are formed on the surface. The rest of the film is cobalt depleted. The growth of CNT occurs on cobalt clusters. When using acetylene at the substrate temperature of 650 °C the array of 12 μm high CNT is formed after 2 min of growing. The diameter of CNT in the array varies in the range 3-11 nm. CNTs with the diameter of 5-8 nm prevail. CNT growth process on a thin film of Co-Zr-N-O is low sensitive to the thickness of the film, making it technically attractive. © 2016 Published by Elsevier B.V.


Blagov E.V.,Russian Academy of Sciences | Gerasimenko A.Yu.,National Research University of Electronic Technology | Dudin A.A.,Russian Academy of Sciences | Ichkitidze L.P.,National Research University of Electronic Technology | And 5 more authors.
Progress in Biomedical Optics and Imaging - Proceedings of SPIE | Year: 2016

The technology of production of matrix photoreceivers based on carbon nanotubes (CNTs) consisting of 16 sensitive elements was developed. Working wavelength range, performance and sensitivity were studied. © 2016 SPIE.


Sukhanov A.V.,Scientific Manufacturing Complex Technological Center | Prokof'ev I.V.,Scientific Manufacturing Complex Technological Center | Ivanov A.V.,Scientific Manufacturing Complex Technological Center
Russian Microelectronics | Year: 2016

The design results of a universal digital platform intended for the construction of self-organizing wireless sensor networks of industrial safety and ecological monitoring systems are given. The design-manufacturing principles for the creation of miniature wireless sensor assemblies (WSAs), ensuring the integration of gas sensors of different types, their self-contained power supply, self-deployment of the sensor network, and design features of the miniature WSAs based on a specialized receiving–transmitting module, constructed in accordance with the up-to-date 2.5D assembly technique using a silicon substrate, are considered. The basic principle of the operation of highly sensitive WSA elements, which are intended for the determination of toxic and explosive gases, and the basic development principles of a smart power source integrated into the sensor assembly housing, which ensures its uninterrupted operation for a long time through the electric energy generation and accumulation units from alternative energy supply sources, are presented. Problems related to the development and remote automatic renovation of the WSA software, architecture of the server software for data acquisition, and analysis of industrial and ecological monitoring problems are considered. © 2016, Pleiades Publishing, Ltd.

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