Scientific Manufacturing Complex Technological Center

Moscow, Russia

Scientific Manufacturing Complex Technological Center

Moscow, Russia

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Bulyarskii S.V.,Russian Academy of Sciences | Lakalin A.V.,Russian Academy of Sciences | Abanin I.E.,Scientific Manufacturing Complex Technological Center | Amelichev V.V.,Scientific Manufacturing Complex Technological Center | And 4 more authors.
Russian Microelectronics | Year: 2017

A comparison of the efficiencies of the power supplies produced based on the β-radiation sources has been carried out. The factors decreasing the efficiency of the device have been revealed. The results of the experimental studies and calculations of the efficiency of the direct energy conversion of Ni-63 β-radiation into electrical energy using silicon p–i–n diodes are presented. An expression for the open-circuit voltage of the convertor taking into account the distribution of high-energy electrons in the space charge region (SCR) of the p–i–n diode has been obtained. The ways of optimizing the convertor’s parameters due to improvements in the diode production technology and optimization of the thicknesses of the active emitter layer and i-region of the semiconductor convertor have been indicated. © 2017, Pleiades Publishing, Ltd.


Pyatilova O.V.,National Research University of Electronic Technology | Gavrilov S.A.,National Research University of Electronic Technology | Shilyaeva Y.I.,National Research University of Electronic Technology | Pavlov A.A.,Russian Academy of Sciences | And 2 more authors.
Semiconductors | Year: 2017

The formation of porous silicon (por-Si) layers by the galvanic etching of single-crystal Si samples (doped with boron or phosphorus) in an HF/C2H5OH/H2O2 solution is investigated. The por-Si layers are analyzed by the capillary condensation of nitrogen and scanning electron microscopy (SEM). The dependences of the morphological characteristics of por-Si (pore diameter, specific surface area, pore volume, and thickness of the pore walls), which determine the por-Si combustion kinetics, on the dopant type and initial wafer resistivity are established. © 2017, Pleiades Publishing, Ltd.


Dubkov S.,National Research University of Electronic Technology | Bulyarskii S.,Russian Academy of Sciences | Pavlov A.,Russian Academy of Sciences | Trifonov A.,Research Institute Of Physical Problems Fvlukina | And 6 more authors.
Proceedings of SPIE - The International Society for Optical Engineering | Year: 2016

This work is devoted to the CVD-synthesis of arrays of carbon nanotubes (CNTs) on Co-Zr-N-(O), Ni-Nb-N-(O), Co- Ta-N-(O) catalytic alloy films from gas mixture of C2H2+NH3+Ar at a substrate temperature of about 550°C.Heating of the amorphous alloy causes its crystallization and squeezing of the catalytic metal onto the surface. As a result, small catalyst particles are formed on the surface. The CNT growth takes place after wards on these particles. It should be noted that the growth of CNT arrays on these alloys is insensitive to the thickness of alloy film, which makes this approach technically attractive. In particular, the possibility of local CNT growth at the ends of the Co-Ta-N-(O) film and three-level CNT growth at the end of more complex structure SiO2/Ni-Nb-N-O/SiO2/Ni-Nb-N-O/SiO2/Ni-Nb-N-O/SiO2 is demonstrated. © 2016 SPIE..


Lebedev E.,National Research University of Electronic Technology | Alekseyev A.,National Research University of Electronic Technology | Gavrilin I.,National Research University of Electronic Technology | Sysa A.,National Research University of Electronic Technology | And 3 more authors.
Proceedings of SPIE - The International Society for Optical Engineering | Year: 2016

A method based on electrophoretic deposition (EPD) has been developed to produce uniform and local deposits of multiwalled carbon nanotubes (CNT) on interdigital structures of planar supercapacitor (SC) at room temperatures. Alcohol/acetone suspensions were used under constant voltage conditions in the range of 6 to 100 V, with deposition times ranging from 2 to 60 minutes and electrodes space from 2 to 15 mm. It was shown that for dense layers deposition with good adhesion on the narrow lines of the planar SC electrodes it is necessary to use average values of the electric field and multi-stage method in which the deposition and drying processes are alternated. Electrochemical tests of the sandwich-like supercapacitors with electrodes obtained by the described method were carried out. The specific capacity of experimental samples increased from 0.24 to 1.07 mF/cm2 with an increase in the number of EPD cycles from 3 to 9. © 2016 SPIE..


Velichko O.I.,Belarusian State University of Informatics and Radioelectronics | Shaman Y.P.,Scientific Manufacturing Complex Technological Center | Kovaliova A.P.,Belarusian State University of Informatics and Radioelectronics
Modelling and Simulation in Materials Science and Engineering | Year: 2014

The previously developed model of hydrogen migration and reactions of hydrogen atoms with electrically active impurity is applied to simulate the hydrogen diffusion and passivation process during plasma deuteration of silicon substrates doped with boron. The calculated deuterium concentration profiles agree well over the length of the passivated region with the experimental data obtained upon treatment in hydrogen plasma at a temperature of 200 °C for 5, 10 and 15 min. On the other hand, to achieve a good fit to the abruptness of the calculated profiles between the passivated and unpassivated regions, it is necessary to suppose that the values of the parameters that describe the absorption of hydrogen interstitials by electrically active dopant atoms decrease with increase in the depth of the passivated region. For example, nonuniform spatial distributions of nonequilibrium point defects generated during plasma treatment can lead to a spatial dependence of hydrogen absorption. © 2014 IOP Publishing Ltd.


Kitsyuk E.P.,National Research University of Electronic Technology | Galperin V.A.,Scientific Manufacturing Complex Technological Center | Shaman Y.P.,Scientific Manufacturing Complex Technological Center | Gromov D.G.,National Research University of Electronic Technology | And 2 more authors.
Proceedings of SPIE - The International Society for Optical Engineering | Year: 2012

In this work showed the possibility of creation high capacity thin-film lithium batteries with the Si-CNT nanocomposite anodes. Synthesized multiwall carbon nanotubes were covered by amorphous silicon with magnetron sputtering. Developed method of formation nanostructured composite is simple, efficient and compatible with widely spread equipment. As s result, designed anode structures with deposited Si thickness of 260 and 390 nm exhibit high specific capacities (more than 2500 mAh/g) and significantly improved cycling stability versus silicon films. © 2012 SPIE.


Gromov D.G.,National Research University of Electronic Technology | Bulyarskii S.,Russian Academy of Sciences | Pavlov A.,Russian Academy of Sciences | Scorik S.,Scientific Manufacturing Complex Technological Center | And 2 more authors.
Diamond and Related Materials | Year: 2016

The possibility of formation of arrays of multiwall carbon nanotubes on catalyst-containing amorphous thin film Co-Zr-N-O with low content of Co (~ 15 at.%) by chemical vapor deposition has been demonstrated. On heating the amorphous alloy crystallizes, whereby the faceted crystal clusters of cobalt are formed on the surface. The rest of the film is cobalt depleted. The growth of CNT occurs on cobalt clusters. When using acetylene at the substrate temperature of 650 °C the array of 12 μm high CNT is formed after 2 min of growing. The diameter of CNT in the array varies in the range 3-11 nm. CNTs with the diameter of 5-8 nm prevail. CNT growth process on a thin film of Co-Zr-N-O is low sensitive to the thickness of the film, making it technically attractive. © 2016 Published by Elsevier B.V.


Blagov E.V.,Russian Academy of Sciences | Gerasimenko A.Yu.,National Research University of Electronic Technology | Dudin A.A.,Russian Academy of Sciences | Ichkitidze L.P.,National Research University of Electronic Technology | And 5 more authors.
Progress in Biomedical Optics and Imaging - Proceedings of SPIE | Year: 2016

The technology of production of matrix photoreceivers based on carbon nanotubes (CNTs) consisting of 16 sensitive elements was developed. Working wavelength range, performance and sensitivity were studied. © 2016 SPIE.


Lebedev E.A.,National Research University of Electronic Technology | Kitsyuk E.P.,Scientific Manufacturing Complex Technological Center | Gavrilin I.M.,National Research University of Electronic Technology | Gromov D.G.,National Research University of Electronic Technology | And 4 more authors.
Journal of Physics: Conference Series | Year: 2015

Fabrication technology of planar pseudocapacitor (PsC) based on carbon nanotube (CNT) forest, synthesized using plasma enhanced chemical vapor deposition (PECVD) method, covered with thin nickel oxide layer deposited by successive ionic layer adsorption and reaction (SILAR) method, is demonstrated. Dependences of deposited oxide layers thickness on device specific capacities is studied. It is shown that pseudocapacity of nickel oxide thin layer increases specific capacity of the CNT's based device up to 2.5 times.


Sukhanov A.V.,Scientific Manufacturing Complex Technological Center | Prokof'ev I.V.,Scientific Manufacturing Complex Technological Center | Ivanov A.V.,Scientific Manufacturing Complex Technological Center
Russian Microelectronics | Year: 2016

The design results of a universal digital platform intended for the construction of self-organizing wireless sensor networks of industrial safety and ecological monitoring systems are given. The design-manufacturing principles for the creation of miniature wireless sensor assemblies (WSAs), ensuring the integration of gas sensors of different types, their self-contained power supply, self-deployment of the sensor network, and design features of the miniature WSAs based on a specialized receiving–transmitting module, constructed in accordance with the up-to-date 2.5D assembly technique using a silicon substrate, are considered. The basic principle of the operation of highly sensitive WSA elements, which are intended for the determination of toxic and explosive gases, and the basic development principles of a smart power source integrated into the sensor assembly housing, which ensures its uninterrupted operation for a long time through the electric energy generation and accumulation units from alternative energy supply sources, are presented. Problems related to the development and remote automatic renovation of the WSA software, architecture of the server software for data acquisition, and analysis of industrial and ecological monitoring problems are considered. © 2016, Pleiades Publishing, Ltd.

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