Smyaglikov I.P.,National Academy of Sciences of Belarus |
Chubrik N.I.,National Academy of Sciences of Belarus |
Goncharik S.V.,National Academy of Sciences of Belarus |
Azharonok V.V.,National Academy of Sciences of Belarus |
And 2 more authors.
High Temperature Material Processes | Year: 2010
The high-current pulsed arc discharge in vacuum used for technology of diamond-like carbon coating deposition is considered. The pulse-periodic carbon plasma flows are generated as a result of graphite cathode sputtering with the use of four-electrode arc system with self-recovering thin-film conductor of ignition device. It was found that fluctuations of plasma radiation intensity are due to formation and decay of cathode spot groups with lifetime of 5-10 s. Three characteristic spatial zones of discharge radiation are observed - cathode spots, diffuse radiation area of carbon ions near the cathode spots, and molecular carbon emission in the interelectrode gap near the anode attachment. The value of gas-kinetic temperature of plasma was found to be about 1000 K while the plasma electron temperature is approximately 10 eV. Source