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Volkov R.L.,Moscow Institute of Electronic Technology | Borgardt N.I.,Moscow Institute of Electronic Technology | Kukin V.N.,Moscow Institute of Electronic Technology | Prikhod'ko A.S.,Moscow Institute of Electronic Technology | And 2 more authors.
Journal of Surface Investigation | Year: 2011

Carbon nanotubes grown on a silicon substrate with an array of FeNiCo20 catalyst islands are studied using focused ion beam and transmission electron microscopy. A method for preparing cross-sectional samples is proposed, which makes it possible to exclude the destructive effect of the ion beam on surface nanostructures during sample preparation using a microscopic three-dimensional protective barrier. © 2011 Pleiades Publishing, Ltd. Source

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