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Fengshan, Taiwan

Ma R.-H.,Roc Military Academy No1 | Sung C.-K.,Roc Military Academy No1
Sensors and Transducers | Year: 2011

The goal of this study is to develop an airflow meter sensor for vehicle intake system detection in internal combustion engines. The alumina plate used in this study is produced by polishing an alumina substrate, a platinum film is then deposited on the plate to complete the micro-heater used in the sensor. The study uses micro-electromechanical process technology to develop a hot-film flow meter with an alumina substrate and platinum film heater; the hotline method is used to create a micro anemometry meter sensor relying on variations airflow at the set temperatures. Resistance on the sensor side varies as gas flows through the sensor, and the instrument determines airflow velocity on the basis of the changes in resistance caused by airflow differences. Airflow velocity form 10m/s to 60m/s are used to test. Resistance displays a regular slope, indicating the relationship between airflow velocities varies remain predictable throughout the sensing range. Copyright © 2011 IFSA. Source

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