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Xu F.,Southwest University of Science and Technology | Xu F.,Robot Technology Used for Special Environment Key Laboratory of Sichuan Province | Zhou S.,South China University of Technology | Hu S.,CAS Chengdu Institute of Optics and Electronics
Optik | Year: 2014

The fringe pattern phase analysis method is proposed for the leveling of mask and wafer in proximity lithography. The tilt between mask and wafer in the space is reflected in the tilted fringe pattern. The method combining the 2-D Fourier transform and 2-D Hanning window is proposed for processing the tilted fringe pattern. The offset and angle of tilt are extracted through phase analysis. Computer simulation and experiment are both performed to verify this method. The results indicate that the tilt of the mask and wafer in the space can be extracted with high accuracy through this method. © 2014 Elsevier GmbH. Source


Xu F.,Southwest University of Science and Technology | Xu F.,Robot Technology Used for Special Environment Key Laboratory of Sichuan Province | Hu S.,CAS Chengdu Institute of Optics and Electronics
Guangzi Xuebao/Acta Photonica Sinica | Year: 2014

The phase unwrapping method based on the polar coordinate to get the alignment offset was proposed for the wrapped phase generated after the single closed interference fringe phase extraction in alignment of nanolithography. The phase distribution of the fringe pattern occurs in the relative movement between two circular gratings was transformed from rectangular coordinates system to polar coordinates system firstly; then the relationship between the alignment offset and the phase parameter was analysis in polar coordinates system; the initial phase amplitude and phase delay in different radial radius were got to acquire the alignment offset finally. The feasibility of the method was verified by numerical simulation and experiment and the comparisons of the tradition least squares method and path tracking method are given. The results show that the wrapped phase can be unwrapped for the alignment with high precision in tens of nanometers through the method with good adaptability. ©, 2014, Chinese Optical Society. All right reserved. Source


Guo F.,Southwest University of Science and Technology | Guo F.,Robot Technology Used for Special Environment Key Laboratory of Sichuan Province | Li H.,Southwest University of Science and Technology | Liu J.,Southwest University of Science and Technology
Chinese Journal of Physics | Year: 2015

Stochastic resonance (SR) in a second-order linear oscillator with quadratic trichotomous noise driven by an external periodic signal is investigated. By applying the property of the trichotomous noise and using the Shapiro-Loginov formula, the exact expression for the output spectral amplification (SPA) of the oscillator is obtained. Results show that the SPA varies non-monotonically with the amplitude, with the correlation rate, with the flatness of the trichotomous noise, as well as with the frequency of the driving signal. Moreover, the non-monotonic dependence of the SPA on the damping coefficient, on the frequency of the linear oscillator, as well as on the coefficient of the quadratic noise is also found. © 2015 The Physical Society Of The Republic Of China. Source


Guo F.,Southwest University of Science and Technology | Guo F.,Robot Technology Used for Special Environment Key Laboratory of Sichuan Province | Li H.,Southwest University of Science and Technology | Liu J.,Southwest University of Science and Technology
Physica A: Statistical Mechanics and its Applications | Year: 2014

The stochastic resonance (SR) in a second-order linear system driven by a trichotomous noise and an external periodic signal is investigated. By the use of the properties of the trichotomous noise and the Shapiro-Loginov formula, the exact expression for the output spectral amplification (SPA) of the system is obtained. The non-monotonic influence of the coefficient of the trichotomous noise on the SPA is found. It is shown that the SPA is a non-monotonic function of the amplitude, the correlation rate and the probability of the trichotomous noise. The SPA varies non-monotonically with the frequency of the driving signal, the damping coefficient and the frequency of the linear system. © 2014 Elsevier B.V. All rights reserved. Source


Xing L.,Southwest University of Science and Technology | Xing L.,Robot Technology Used for Special Environment Key Laboratory of Sichuan Province | Ma Q.,Southwest University of Science and Technology | Ma Q.,Robot Technology Used for Special Environment Key Laboratory of Sichuan Province | And 2 more authors.
Beijing Youdian Daxue Xuebao/Journal of Beijing University of Posts and Telecommunications | Year: 2015

In order to characterize local features of network redundant traffic on small-time scale more accurately, a new Cauchy-Laplace multifractal wavelet model was proposed. An algorithm for estimating parameters of wavelets was also put forward. A joint distribution function was adopted to describe local features, i.e., Cauchy and Laplace distributions were used to obtain the parameter multiply factors for heavy-tailed and spike features, respectively. A threshold for ratio of wavelets to scaling parameters, which decides how these two distributions affected redundant traffic modeling, was achieved by probability comparison. Experiments show that the proposed model can well characterize small-time scale multifractal features of network redundant traffic. © 2015, Beijing University of Posts and Telecommunications. All right reserved. Source

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