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Hata S.,Kagawa University | Morimoto S.,Rexxam Co. | Kobayashi H.,Industrial Technology Center Of Okayama Prefecture
Proceedings of SPIE - The International Society for Optical Engineering | Year: 2012

Nano-level 3-D measurement is one of the key technologies for the current and future generation of production systems for semi-conductors, LCDs and nano-devices. To meet with these applications, wide range nano-level 3-D shape measurement method using combination of RGB lights has been developed. It measures the height of nano-objects using RGB lights interference color fringes. To analyze the RGB color fringes, the adaptive phase analysis method of interference fringes has been developed and achieved its efficiency. But it cannot measure the shape of edges. To meet with the difficulty, the color analysis method on xy-color plane has been introduced. The combination of the phase measurement method and the color analysis method has measured the 5 micrometer columns precisely. The evaluation shows that the method has the ability to measure the plane height at 10 nm level measuring deviation with 0,5 micrometer horizontal preciseness. For a practical application, the shape of needles for AFM has been extracted, successfully. © 2012 Copyright Society of Photo-Optical Instrumentation Engineers (SPIE).

Yamauchi H.,Osaka University | Ito S.,Osaka University | Yoshida K.-I.,Rexxam Co. | Itoh T.,Japan National Institute of Advanced Industrial Science and Technology | And 4 more authors.
Journal of Physical Chemistry C | Year: 2013

Fluorescence correlation spectroscopy was applied to the measurement of local temperature in the vicinity of gold nanoparticles adsorbed on the surface of glass substrate under the photoexcitation at a wavelength of 633 nm. From the diffusion coefficient of fluorescent guest dyes and the temperature dependence of the viscosity of a solution, the increase in the temperature was estimated. It was revealed that the temperature ca. 5 μm from the gold nanoparticles linearly increased with an increase in the incident laser power and an increase in the number of gold nanoparticles on the substrates. Temperature elevation coefficients of single gold nanoparticles with 100 and 150 nm diameters under the irradiation at 633 nm were, respectively, estimated to be (2.3 and 6.9) × 10-3 K·kW-1·cm2. These values could be interpreted on the basis of the absorption coefficients of gold nanoparticles and the thermal conduction in the solution. © 2013 American Chemical Society.

Rexxam Co. and Ryusyo Industrial Co. | Date: 2012-05-22

Hygroscopic preparations, namely, desiccants; chemical preparations for industrial use, namely, aerogels, for the production of thermal and acoustic insulation materials and for catalysis. Industrial robots for transferring semiconductor wafers for use with semiconductor manufacturing systems; machines and apparatus for transferring semiconductor wafers; machines and apparatus for cleaning semiconductor wafers; machines and apparatus for drying semiconductor wafers; plating machines and apparatus for use in semiconductor manufacturing; machines and apparatus for manufacturing semiconductors; machines and apparatus for processing semiconductors; cleaning machines and apparatus for electronic components, ceramic and glass parts, plastic moldings and metal parts; drying machines and apparatus for electronic components, ceramic and glass parts, plastic moldings and metal parts; machines and apparatus for manufacturing liquid crystal displays; machines and apparatus for transferring glass substrate for liquid crystal displays; machines and apparatus for transferring metal parts; rinsing machines and apparatus using supercritical fluids; drying machines and apparatus using supercritical fluids; coating machines and apparatus using supercritical fluids for manufacturing semiconductors; coating machines and apparatus using supercritical fluids for use with manufacturing semiconductor wafers; chemical processing machines and apparatus for manufacturing semiconductors; chemical processing machines and apparatus for use with manufacturing semiconductor wafers; painting machines and apparatus; press dies for metal forming; metalworking machines and tools; structural parts and fittings for all the aforesaid goods. Visual inspecting apparatus for printed circuit boards, namely, digital cameras for industrial use and testing apparatus for testing printed circuit boards; automatic lensometers other than for medical use; optical measuring apparatus for measuring index of refraction, namely, refractometers, salt-meters, polarimeters; light wave interferometers; flatness measurement apparatus; distance measuring apparatus; measuring or testing machines and instruments, namely, 3D shape measurement apparatus, goniometer, surface roughness tester, health management equipment, namely, clinical laboratory analyzers for measuring, testing and analyzing blood and other bodily fluids, and power consumption monitor for measuring and indicating the power consumption of the device to measure electric information; ultrasonic sounding apparatus for measuring distance from the apparatus to the objects; ultrasonic detecting apparatus for searching objects; electronic circuits; integrated circuits; large-scale integrated circuits; computer programs for database management; electric machines and apparatus, namely, temperature controllers for cooling semiconductor and LCD manufacturing equipments, chargers for electric vehicles or chargers for electric batteries, and security cameras; radar machines and apparatus; loran navigation devices and apparatus; mobile telecommunication apparatus, namely, mobile computing and operating platforms consisting of data transceivers, wireless networks, and gateways for collection and management of data; remote control telemetering machines and instruments for controlling surveying machines, namely, displacement meters, tiltmeters, industrial robots and cameras; telecommunication devices and apparatus, namely, web cameras; structural parts and fittings for all the aforesaid goods. Eye testing machines and apparatus; ophthalmotonometers; ocular fundus cameras for medical use; automatic lensometers for medical use; medical instruments and apparatus, namely, medical diagnostic instruments for the analysis of body fluids; ophthalmic apparatus and instruments, namely, eye charts for medical examination use; keratometers.

Naya H.,Meiji Consultant Co. | Kubo T.,Rexxam Co. | Nakashima S.,Yamaguchi University | Shimizu N.,Meiji Consultant Co.
ISRM International Symposium - 8th Asian Rock Mechanics Symposium, ARMS 2014 | Year: 2014

A new diffusion laser displacement meter (DLDM) has been developed for monitoring rock/ground displacements. It adopts the large diameter and cone angle of laser beams to improve the measurement performance under rainy or foggy conditions and to avoid the harmful effects on human eyes, skin, etc. The resolution of the distance meter is up to 0.1 mm. Although the authors firstly developed a twin-lens type of DLDM, the newly developed single-lens DLDM has been found to have a higher cost performance. Moreover, the single-lens model has a fewer number of components and a wider range of laser reflection intensity than the twin-lens model. In this study, experiments were conducted to investigate the measurement performance of the single-lens DLDM under hard rain conditions using an indoor rainfall simulator. The test results showed that this single-lens DLDM was able to measure displacements without missing any data under rainfall intensities up to 200 mm/hr for a baseline length of 30 m and up to 120 mm/hr for a baseline length of 62.5 m. In order to verify its practical applicability, the DLDM was applied to the landslide monitoring of a large steep slope. It was proven that the DLDM can continuously measure displacements under hard rain, of around 50 mm/hr, and can detect 110-mm displacements together with the local failure of the slope. The performance of the new single-lens DLDM was found to surpass that of surface extensometers. © 2014 by Japanese Committee for Rock Mechanics.

Yamashita S.,Kagawa University | Yoshida H.,Kagawa University | Uchiyama N.,Rexxam Co. | Nakakita Y.,Kagawa University | And 5 more authors.
FEBS Letters | Year: 2012

Clostridium botulinum produces the botulinum neurotoxin, forming a large complex as progenitor toxins in association with non-toxic non-hemagglutinin and/or several different hemagglutinin (HA) subcomponents, HA33, HA17 and HA70, which bind to carbohydrate of glycoproteins from epithelial cells in the infection process. To elucidate the carbohydrate recognition mechanism of HA70, X-ray structures of HA70 from type C toxin (HA70/C) in complexes with sialylated oligosaccharides were determined, and a binding assay by the glycoconjugate microarray was performed. These results suggested that HA70/C can recognize both α2-3- and α2-6-sialylated oligosaccharides, and that it has a higher affinity for α2-3-sialylated oligosaccharides. Crown Copyright © 2012 Published by Elsevier B.V. on behalf of Federation of European Biochemical society. All rights reserved.

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