Entity

Time filter

Source Type

Palo Alto, CA, United States

Almanza-Workman A.M.,Phicot Inc. | Taussig C.P.,Hewlett - Packard | Jeans A.H.,Hewlett - Packard | Cobene R.L.,Hewlett - Packard
Journal of Materials Chemistry | Year: 2011

Self-aligned imprint lithography (SAIL) enables the patterning and alignment of submicron-sized features on metre-scaled flexible substrates in the roll-to roll (R2R) environment. SAIL solves the problem of precision interlayer registry on a moving web by encoding all the geometry information required for the entire patterning steps into a monolithic three-dimensional mask that is imprinted on the thin film stack deposited on a flexible substrate. Soft molds made of plastics or elastomers cast on a silicon master have been used as stamps to pattern the 3D masks because of their low cost and ease of fabrication. However, the durability of these stamps is one factor that limits their efficiency in a R2R process. Fluorothermoplastics are low cost imprint stamp materials with great mechanical strength and chemical compatibility but with low gas permeability that trap air bubbles in the photopolymer during the imprint process. This paper describes the strategy for increasing gas permeability of fluorothermoplastics by introducing voids or pores in the stamp material by fabricating the stamps with aqueous colloidal dispersions of tetrafluoroethylene-hexafluoropropylene copolymer (FEP) nanoparticles. The basic idea is that the hard fluorinated particles, whose modulus is too high to deform during drying, remain as hard spheres and lead to a porous packing when drying is complete. The selection of suitable additives to eliminate cracks created by capillary stresses during water evaporation is also described in this paper. © 2011 The Royal Society of Chemistry.


Jackson W.B.,Hewlett - Packard | Kim H.-J.,Phicot Inc. | Kwon O.,Phicot Inc. | Yeh B.,Hewlett - Packard | And 6 more authors.
Proceedings of SPIE - The International Society for Optical Engineering | Year: 2011

A roll-to-roll process is used to fabricate amorphous silicon and amorphous multicomponent oxide (MCO) transistors on flexible substrates using self aligned imprint lithography (SAIL). SAIL solves the layer to layer alignment problem. The imprint lithography patterned MCO transistors had a mobility of 15 cm2V-1 sec-1 and an on-off ratio of 10 7. Full display arrays with data, gate, hold capacitors and cross-overs were patterned using SAIL technology. Studies of stability of the MCO transistors indicate the importance of controlling O vacancies in the material particularly the back channel. Devices subjected to -10V gate bias stress at 60C under illumination exhibited behavior consistent with state creation in the upper and lower half of the gap near the back channel interface possibly associated with O vacancy formation.


Jeans A.,Hewlett - Packard | Almanza-Workman M.,Phicot Inc. | Cobene R.,Hewlett - Packard | Elder R.,Hewlett - Packard | And 18 more authors.
Proceedings of SPIE - The International Society for Optical Engineering | Year: 2010

A solution to the problems of roll-to-roll lithography on flexible substrates is presented. We have developed a roll-toroll imprint lithography technique to fabricate active matrix transistor backplanes on flexible webs of polyimide that have a blanket material stack of metals, dielectrics, and semiconductors. Imprint lithography produces a multi-level 3- dimensional mask that is then successively etched to pattern the underlying layers into the desired structures. This process, Self-Aligned Imprint Lithography (SAIL), solves the layer-to-layer alignment problem because all masking levels are created with one imprint step. The processes and equipment required for complete roll-to-roll SAIL fabrication will be described. Emphasis will be placed on the advances in the roll-to-roll imprint process which have enabled us to produce working transistor arrays. © 2010 Copyright SPIE - The International Society for Optical Engineering.


Elder R.E.,Hewlett - Packard | Jackson W.B.,Hewlett - Packard | Jam M.,Hewlett - Packard | Jeans A.,Hewlett - Packard | And 11 more authors.
Digest of Technical Papers - SID International Symposium | Year: 2011

HP and Phicot are making a fully roll-to roll fabricated display for a solar powered wrist display. We have developed methods for electrical testing of display backplanes on flexible substrates which are not bonded to a carrier. This has enabled improvement of yield through rapid electrical test feedback. © 2011 SID.


Elder R.E.,Hewlett - Packard | Jackson W.B.,Hewlett - Packard | Jam M.,Hewlett - Packard | Jeans A.,Hewlett - Packard | And 11 more authors.
49th Annual SID Symposium, Seminar, and Exhibition 2011, Display Week 2011 | Year: 2011

HP and Phicot are making a fully roll-to roll fabricated display for a solar powered wrist display. We have developed methods for electrical testing of display backplanes on flexible substrates which are not bonded to a carrier. This has enabled improvement of yield through rapid electrical test feedback.

Discover hidden collaborations