Pfeiffer Vacuum GmbH

Aßlar, Germany

Pfeiffer Vacuum GmbH

Aßlar, Germany
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Patent
Pfeiffer Vacuum GmbH | Date: 2016-08-24

A membrane vacuum pump has at least one working space which is bounded by a membrane deformable to change the size of the working space and by a wall in which at least one inlet and at least one outlet are formed for a medium which is sucked into the working space which increases in size in so doing in a suction phase and is expelled via the outlet from the working space which decreases in size in so doing in a compression phase. The membrane vacuum pump furthermore has a controllable actuator unit for deforming the membrane by a contactless action on the membrane by means of electrical and/or magnetic fields.


Patent
Pfeiffer Vacuum GmbH | Date: 2014-09-02

A vacuum pump includes a housing having an axial inlet a pumping unit including a stator, a rotor rotatably supported in the stator, and a drive for driving the rotor. At least one housing part which has at least one outlet, is placed on the housing in an axial direction and is connected with the housing.


Patent
Pfeiffer Vacuum GmbH | Date: 2014-11-11

A housing for a rotary vane pump includes a suction flange and a discharge flange having a multi-angular cross-section with at least two sides extending parallel to each other, cooling ribs provided on an outer surface of the housing, with the number of cooling ribs in the region with a high internal pressure being greater than a number of cooling ribs in the region with a low internal pressure, inlet and outlet, with the inlet cross-section being greater than the outlet cross-section, and connection elements provided on the housing and each having two installation surfaces connected by a connection surface.


Patent
Pfeiffer Vacuum GmbH | Date: 2014-05-28

A vacuum pump includes a rotor and a rotary bearing, which is to be supplied with an operating medium, for the rotatable support of the rotor, wherein the rotor has a conveying section, in particular a conical conveying section, for supplying the operating medium to the rotary agent. A conveying pump is provided for conveying the operating medium and/or an operating medium store is provided having an absorbent storage means for the operating medium. Further, at least one wick is provided which is in contact with the conveying section to transfer the operating medium provided from the conveying pump and/or from the absorbent storage means to the conveying section in a desired quantity.


Patent
Pfeiffer Vacuum GmbH | Date: 2014-02-27

A vacuum pump, in particular to a turbomolecular pump, has a pump inlet, a pump outlet and a pump space for a gas to be pumped arranged between the pump inlet and the pump outlet, and at least one cooling gas inlet for a cooling gas for cooling the vacuum pump, the pump further having one or more hollow regions for the cooling gas connected in a gas conducting manner to the cooling gas inlet and arranged outside the pump space, wherein the or each hollow region is bounded by at least one component of the vacuum pump to be cooled.


Patent
Pfeiffer Vacuum GmbH | Date: 2014-10-29

A receiving apparatus for the partial reception of a flange which is or can be connected to a vacuum pump, and having at least one fastening section for fastening to a recipient, at least one support section on which the flange lies in an assembly state and at least one receiving opening bounded by the support section, wherein the flange can be inserted into the receiving opening and can be pulled out of the receiving opening from an access side of the receiving apparatus with a receiving apparatus fastened to the recipient.


An arrangement includes a vacuum pump having a rotor, and a drive unit for driving the rotor and having at least one magnetic interference field-generating component and at least one compensation coil for compensating the magnetic interference field generated by the at least one component.


Patent
Pfeiffer Vacuum GmbH | Date: 2014-07-01

A membrane vacuum pump includes at least one membrane pump stage, at least one inlet valve for a process gas to be conveyed associated with the membrane pump stage, and at least one gas ballast valve for the supply of a ballast gas. The flow path for the ballast gas, leading through the gas ballast valve, opens into the flow path for the process gas behind the inlet valve in the direction of flow of the process gas.


Patent
Pfeiffer Vacuum GmbH | Date: 2014-02-27

A vacuum pump has at least one side passage pump stage which comprises a side passage bounded by at least one stator element and having a coolant circuit for cooling the vacuum pump with a coolant, wherein the coolant circuit has at least one coolant passage for the side passage pump stage which is bounded at least regionally by the stator element.


An apparatus having at least one passage for conducting a gaseous or a liquid operating medium, in particular a vacuum pump, wherein the passage is closed in a fluid-tight manner at a side by at least one elongate sealing element following the extent of the passage. A method of manufacturing an apparatus having at least one passage for conducting a gaseous or a liquid operating medium includes providing a component with a passage-forming groove.

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