Orsay Physics

Fuveau, France

Orsay Physics

Fuveau, France

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Misevic G.N.,Gimmune GmbH | Benassayag G.,French National Center for Scientific Research | Rasser B.,Orsay Physics | Sales P.,French National Center for Scientific Research | And 3 more authors.
Journal of Molecular Structure | Year: 2014

Single cell 'omics' requires a technological platform with reliable and high throughput single cell analyses with single molecular detection and quantification. Presently available options are to either to detect many different macromolecules and metabolites extracted from many cells, thus obtaining partial 'omics' of an average cell or to study only few single cells and be limited to semi-quantitative analyses and detection of a few abundant molecules. Here we present a new design and prototype proof of concept construction of high throughput nano-electrophoretic separation (NEA) device and nano in micro array (NiMA) affinity probe device for a complete single cell 'omics' single bio-molecule polymers detection and quantification analyses. Prototype devices were constructed using gallium ion Focus Ion Beam (FIB), Gas Injection System (GIS) and Scanning Electron Microscope (SEM) crossbeam instruments. The NEA device accommodates 100 different cell samplings per 1 cm2 chip with arrays of open nano-electrophoretic guides. The NiMA bio-sensor device on 1 cm2 can accommodate 2500 cells in a micro-well array which consists of 250,000 probe markers in nano-well array located in each micro-well. Using Secondary Ion Mass Spectrometry (SIMS) we have demonstrated the direct detection of a single protein molecule and proved the feasibility of single bio-molecular detection and quantification concept for NEA and NIMA. Our concept validates high throughput and complete and quantitative single cell 'omics' with single molecular detection analyses without labeling. Thus, it is superior to commonly used microfluidics, capillary electrophoresis and micro-arrays using mass spectrometry and fluorescent labeling for molecular detection. © 2014 Elsevier B.V. All rights reserved.

Aouassa M.,CNRS Institute Materials Microelectronics nanosciences of Provence | Berbezier I.,CNRS Institute Materials Microelectronics nanosciences of Provence | Favre L.,CNRS Institute Materials Microelectronics nanosciences of Provence | Ronda A.,CNRS Institute Materials Microelectronics nanosciences of Provence | And 4 more authors.
Applied Physics Letters | Year: 2012

Design of monodisperse ultra-small nanocrystals (NCs) into large scale patterns with ad hoc features is demonstrated. The process makes use of solid state dewetting of a thin film templated through alloy liquid metal ion source focused ion beam (LMIS-FIB) nanopatterning. The solid state dewetting initiated at the edges of the patterns controllably creates the ordering of NCs with ad hoc placement and periodicity. The NC size is tuned by varying the nominal thickness of the film while their position results from the association of film retraction from the edges of the lay out and Rayleigh-like instability. The use of ultra-high resolution LMIS-FIB enables to produce monocrystalline NCs with size, periodicity, and placement tunable as well. It provides routes for the free design of nanostructures for generic applications in nanoelectronics. © 2012 American Institute of Physics.

Kime L.,University Paris - Sud | Fioretti A.,University Paris - Sud | Fioretti A.,University of Pisa | Fioretti A.,National Research Council Italy | And 11 more authors.
Physical Review A - Atomic, Molecular, and Optical Physics | Year: 2013

We propose a source for high-brightness ion and electron beams based on the ionization of an effusive atomic beam which is transversely laser cooled and compressed. The very low transverse temperature (mK range) and the relative low density of the starting atomic sample ensure excellent initial conditions for obtaining bright and monochromatic charge sources. In contrast to the standard photoionization techniques used by similar sources, we utilize field ionization of Rydberg atoms. This approach allows a substantial reduction of the required laser power and copes differently with the problems of the energy spread created during the ionization process and of the stochastic space-charge effect. Theoretical modeling and prospective ideas of this emerging technology are given. © 2013 American Physical Society.

PubMed | University of Pisa, University Paris - Sud, Orsay Physics and National Research Council Italy
Type: | Journal: Ultramicroscopy | Year: 2016

We demonstrate a prototype of a Focused Ion Beam machine based on the ionization of a laser-cooled cesium beam and adapted for imaging and modifying different surfaces in the few-tens nanometer range. Efficient atomic ionization is obtained by laser promoting ground-state atoms into a target excited Rydberg state, then field-ionizing them in an electric field gradient. The method allows obtaining ion currents up to 130pA. Comparison with the standard direct photo-ionization of the atomic beam shows, in our conditions, a 40-times larger ion yield. Preliminary imaging results at ion energies in the 1-5keV range are obtained with a resolution around 40nm, in the present version of the prototype. Our ion beam is expected to be extremely monochromatic, with an energy spread of the order of the eV, offering great prospects for lithography, imaging and surface analysis.

Berbezier I.,CNRS Institute Materials Microelectronics nanosciences of Provence | Aouassa M.,CNRS Institute Materials Microelectronics nanosciences of Provence | Ronda A.,CNRS Institute Materials Microelectronics nanosciences of Provence | Favre L.,CNRS Institute Materials Microelectronics nanosciences of Provence | And 4 more authors.
Journal of Applied Physics | Year: 2013

We develop self-organisation processes for the fabrication of 2D arrays of Si and Ge quantum dots. The processes make use of the dewetting phenomenon which involves the transformation of a 2D thin film into an array of isolated 3D islands through a morphological instability. We show that self-organization of monodisperse ultra-small nanocrystals (NCs) into large scale patterns with ad hoc features can be created via heterogeneous dewetting. The process involves dewetting of thin films nanopatterned by electron beam lithography (EBL) or liquid metal alloy source focused ion beam (LMAIS-FIB). Heterogeneous dewetting is initiated at the edges of the patterns. It provokes the retraction of the thin film following the kinetics of surface diffusion and ends by the formation of faceted monocrystalline NCs regularly positioned. Their geometrical features and lateral arrangements can be tuned by changing the pitch, size, and shape of the patterns. The process developed in this study is adapted to the fabrication of NCs based floating gate memories. © 2013 American Institute of Physics.

Benkouider A.,Aix - Marseille University | Ronda A.,Aix - Marseille University | Gouye A.,Aix - Marseille University | Herrier C.,Aix - Marseille University | And 6 more authors.
Nanotechnology | Year: 2014

Selective growth and self-organization of silicon-germanium (SiGe) nanowires (NWs) on focused ion beam (FIB) patterned Si(111) substrates is reported. In its first step, the process involves the selective synthesis of Au catalysts in SiO2-free areas; its second step involves the preferential nucleation and growth of SiGe NWs on the catalysts. The selective synthesis process is based on a simple, room-temperature reduction of gold salts (Au3+Cl?/4 ) in aqueous solution, which provides well-organized Au catalysts. By optimizing the reduction process, we are able to generate a bidimensional regular array of Au catalysts with self-limited sizes positioned in SiO2 -free windows opened in a SiO /Si2 (111) substrate by FIB patterning. Such Au catalysts subsequently serve as preferential nucleation and growth sites of well-organized NWs. Furthermore, these NWs with tunable position and size exhibit the relevant features and bright luminescence that would find several applications in optoelectronic nanodevices. © 2014 IOP Publishing Ltd Printed in the UK.

Aouassa M.,CNRS Institute Materials Microelectronics nanosciences of Provence | Ronda A.,CNRS Institute Materials Microelectronics nanosciences of Provence | Favre L.,CNRS Institute Materials Microelectronics nanosciences of Provence | Delobbe A.,Orsay Physics | And 2 more authors.
Journal of Applied Physics | Year: 2013

We demonstrate that perfectly reproducible and homogeneous core-shell Si1-xGex/Ge nanowires can be produced by a two step nanofabrication process. The process makes use of a combination of Liquid Metal Alloy Ion Source-Focused Ion Beam (LMAIS-FIB) nanomilling and condensation. In a first step, we fabricate arrays of SiGe wires by LMAIS-FIB milling of fully relaxed Si1-xGex pseudo-substrates. The use of Ge 2+ ions during this step avoids any metallic contamination of the nanowires. In a second step, we both reduce the diameter of the wires and form the core-shell configuration by oxido-reduction of the wires. Large arrays of core-shell nanowires with extended aspect ratio (length over diameter), small diameters and ultra-thin shell thickness are fabricated. Multilayer core-shell configurations with tunable arrangements could also be produced by repeated condensation cycles. © 2013 AIP Publishing LLC.

Marcus I.C.,CSIC - Institute of Materials Science | Marcus I.C.,Aix - Marseille University | Berbezier I.,Aix - Marseille University | Ronda A.,Aix - Marseille University | And 8 more authors.
Crystal Growth and Design | Year: 2011

We report a novel method for obtaining ordered arrays of self-assembled Ge nanowires (NWs) using Au seed catalysts, with the latter deposited using a focused ion beam (FIB). For this purpose we apply a three-step process involving first FIB nanopatterning, a second step of AuSi seed formation during UHV annealing, and third the nucleation and growth of Ge NWs by combining molecular-beam epitaxy (MBE) and the vapor-liquid-solid (VLS) process. We show that FIB allows for the local implantation of Au in the areas impacted by the ion beam; the implanted Au evolves during annealing into AuSi clusters, serving as nucleation seeds for the nucleation and growth of Ge NWs. We thus prove that FIB with gold ions is a successful method to obtain gold-catalyzed self-assembled nanowires. We obtain Ge NWs of homogeneous dimensions and oriented in-plane along [110] directions, as a consequence of a strain-driven process. Wire kinking is governed by surface morphological features. Based on our experimental results, we elaborate on the general mechanisms of MBE growth of quantum wires under epitaxial strain, which we exemplify for Ge NWs on Si(001) but hold for many other lattice-mismatched semiconductor material combinations. © 2011 American Chemical Society.

Benkouider A.,Aix - Marseille University | Berbezier I.,Aix - Marseille University | Ronda A.,Aix - Marseille University | Favre L.,Aix - Marseille University | And 5 more authors.
Thin Solid Films | Year: 2013

In this work we study the influence of the major focused ion beam operating parameters: ion chemical species, beam current, lens voltage and ion dose on the ultimate nanopatterning resolution. We propose a two-step process based on first ion milling of a SiO2 sacrificial layer and second SiO 2 chemical etching for the fabrication of nanopatterns with ultimate size/density and ad libitum shape. Examples of resulting patterns are presented. © 2013 Elsevier B.V.

PubMed | Aix - Marseille University and Orsay Physics
Type: Journal Article | Journal: Small (Weinheim an der Bergstrasse, Germany) | Year: 2016

Thin film dewetting can be efficiently exploited for the implementation of functionalized surfaces over very large scales. Although the formation of sub-micrometer sized crystals via solid-state dewetting represents a viable method for the fabrication of quantum dots and optical meta-surfaces, there are several limitations related to the intrinsic features of dewetting in a crystalline medium. Disordered spatial organization, size, and shape fluctuations are relevant issues not properly addressed so far. This study reports on the deterministic nucleation and precise positioning of Si- and SiGe-based nanocrystals by templated solid-state dewetting of thin silicon films. The dewetting dynamics is guided by pattern size and shape taking full control over number, size, shape, and relative position of the particles (islands dimensions and relative distances are in the hundreds nm range and fluctuate 11% for the volumes and 5% for the positioning).

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