Guo Y.,Opto Electronics Facility of Wuhan Mechanical College |
Cheng Y.,Opto Electronics Facility of Wuhan Mechanical College |
Lu Y.,Opto Electronics Facility of Wuhan Mechanical College |
Sun B.,Opto Electronics Facility of Wuhan Mechanical College |
And 2 more authors.
Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology | Year: 2014
The diamond-like-carbon (DLC) thin films were grown by KrF pulsed laser deposition on Si substrate. The influence of the deposition conditions, including the laser power density, deposition angle and pressure, on the microstructures and properties of DLC films was investigated. The DLC films were characterized with Raman spectroscopy, Fourier transform infrared spectroscopy, ellipsometry and nano mechanical probes. The results show that the incident angle of carbon ions has a major impact on C-bonding and properties of DLC films. For example, as the incident angle increased from 0° to 40° in the DLC film growth, its optical absorption coefficient increased, its nano-hardness and Young's modulus decreased, accompaniedby an increase of ID/IG and a decrease of the full-width half-maximum of the G band, indicating a decreased sp3 content in the DLC films. The possible mechanisms responsible for its incident-angle dependent growth were tentatively discussed in sub-plantation theory. ©, 2014, Science Press. All right reserved.