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Moscow, Russia

Borisov M.V.,OOO Nanotekh | Borovikov V.A.,OOO Nanotekh | Gavrikov A.A.,OOO Nanotekh | Knyaz'kov D.Y.,OOO Nanotekh | And 3 more authors.
Doklady Physics | Year: 2010

Methods of the development and correction of the quality of holographic images of geometry objects with subwave size elements were studied. A software package for the synthesis of holograms, optimization of their images, and reconstruction of the images from gray and binary holograms, as well as for the synthesis of holograms of the objects of complex structure similar to integrated microcircuits was developed. It is shown that when forming the light holographic images of simple geometric objects, the characteristic sizes of which are comparable with wavelength, the error is 10-12% of the maximal value of brightness. At the light intensity, oscillations of brightness similar to the Gibbs phenomena in the theory of the Fourier rows appear. Using mathematical modeling, it is shown that binarization by holes with diameters allows one to reproduce the image obtained by reconstruction from the hologram with continuous transmission function with a high degree of accuracy.

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