Moscow, Russia
Moscow, Russia

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Loparev A.V.,OOO Amphora Laboratories | Zenzinov A.B.,OOO Amphora Laboratories | Ignat'ev P.S.,OOO Amphora Laboratories | Indukaev K.V.,OOO Amphora Laboratories | And 2 more authors.
Journal of Optical Technology (A Translation of Opticheskii Zhurnal) | Year: 2012

A new version of the modulation interference microscope with a long-path coordinate stage on aeromagnetic guides has been developed that can displace the microscope with nonrectilinearity no greater than 0:1 μm on a path length of up to 300 mm. The given modification of the microscope can be used to investigate the surface of large optical items having dimensions up to 300 × 300 × 100 mm with a resolution of 0.1 nm along the vertical and 10-100 nm in the sample plane. The design and operating principles of the main modules of the microscope are considered. Examples are used to show that the microscope thus developed has possibilities and advantages when optical surfaces are being investigated. © 2012 Optical Society of America.


Loparev A.V.,OOO Amphora Laboratories | Pravdivtsev A.V.,OOO Amphora Laboratories | Ignat'ev P.S.,OOO Amphora Laboratories | Indukaev K.V.,OOO Amphora Laboratories | And 2 more authors.
Journal of Optical Technology (A Translation of Opticheskii Zhurnal) | Year: 2012

This paper presents the results of the development of a unique metrologic platform intended for the study of the nanodefects of an object and the measurement of its surface flatness on large areas. The design of the platform is based on the simultaneous use of modulation interference microscopy and noncontact aeromagnetic guides. The optical layout and an algorithm for obtaining panoramic images are considered. It is shown to be promising to use the metrologic platform in the optics and semiconductor industries. © 2012 Optical Society of America.


Ignat'ev P.S.,OAO Amphora Laboratories | Loparev A.V.,OAO Amphora Laboratories | Indukaev K.V.,OAO Amphora Laboratories | Osipov P.A.,OAO Amphora Laboratories
Journal of Optical Technology (A Translation of Opticheskii Zhurnal) | Year: 2011

A modulation interference microscope has been developed with record-breaking lateral resolution (10-100 nm) and high image-production rate (up to 250 frames per second). The optical layout of the device, the operating principles, and the problems of superhigh optical resolution in phase images are described. Possible ways of developing a method for modulation interference microscopy are discussed, along with areas in which the method can be used to study nanostructured materials, the topology of integrated microcircuits, and the morphology of biological objects. © 2011 Optical Society of America.

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