Ogawa Creation Research Laboratory

Kōbe-shi, Japan

Ogawa Creation Research Laboratory

Kōbe-shi, Japan
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Kondo S.,Asahi Electronics Laboratory Co. | Tamaki H.,Asahi Electronics Laboratory Co. | Takenaka H.,Nippon Liniax Co. | Takemura M.,Osaka Institute of Technology | Ogawa S.,Ogawa Creation Research Laboratory
Journal of the Vacuum Society of Japan | Year: 2010

Chromium silicon carbide (Cr-Si-C) composite thin film has been deposited on the stainless steel substrate by radio frequency (RF) sputtering and the possibility of the force sensor is discussed. The characteristic of the Cr-Si-C composite thin film force sensor is also described. Small temperature coefficient of resistance (TCR) dispersion has been obtained by a Cr-Si-C composite thin film force sensor, and the TCR was between -20 and 10 ppm/°C at the aspect ratio of 510 and the film thickness of 15 nm. The force sensor with hysteresis-free and good linearity has been prepared on the stainless steel substrate by using the Cr-Si-C composite film. The gauge factor of force sensor has increased according to the reduction of film thickness and the increase of sensor pattern aspect ratio. The gauge factor reached 14.2 at the aspect ratio of 510 and the film thickness of 15 nm, which is 7 times larger than that of Ni-Cr strain gauge.


Kondo S.,Asahi Electronics Laboratory Co. | Tamaki H.,Asahi Electronics Laboratory Co. | Takenaka H.,Nippon Liniax Co. | Takemura M.,Osaka Institute of Technology | Ogawa S.,Ogawa Creation Research Laboratory
Journal of the Vacuum Society of Japan | Year: 2011

Highly efficient micro-sized force sensor by using chromium silicon carbide (Cr-Si-C) composite thin film has been developed. The characteristic of the tension measurement system by using this force sensor for tension control as "Sensor roll", for roll-to-roll sputtering system is also described. Sensor roll can speed up the response to tension changes for 0.5 seconds than that of electromagnetic transformer type tension sensor. Sensor roll has been installed in roll-to-roll sputtering system and the behavior of the film has been observed, Sensor roll has enabled measuring in real time transient changes in tension. The tension measurement system with high- efficiency and high-stability has been prepared in a vacuum environment by using the highly efficient micro-sized force sensor.


Ogawa S.,Ogawa Creation Research Laboratory | Kondo M.,Ogawa Creation Research Laboratory | Shimizu M.,Shimizu Manufacturing Co. | Yasuda M.,Shimizu Manufacturing Co. | Sagara R.,Shimizu Manufacturing Co.
Journal of the Vacuum Society of Japan | Year: 2013

Low resistivity transparent conductive coating consisting of AlN/Ag/AlN nano-multilayer film was fabricated using New Magnetic Hollow-Cathode V-type Sputtering Systems. The electrical and optical properties of multilayer films have been examined. A minimum sheet resistance of less than 10 Ohm/sq. and a maximum transmittance of >90% were obtained for AlN (40 nm)/Ag (10 nm)/AlN (40 nm) on Polyethylene terephthalate substrate.

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