Nissin Electric Co. and Japan Steel Works | Date: 2014-08-22
The antenna has a structure that the high frequency electrode is received in a dielectric case. The high frequency electrode has a go-and-return conductor structure that two electrode conductors are disposed close to and in parallel to each other with a gap therebetween to form a rectangular plate shape as a whole, and the two electrode conductors are connected by a conductor at an end in the longitudinal direction. A high frequency current flows in the two electrode conductors in opposite directions. A plurality of openings are formed on edges of the two electrode conductors on the side of the gap, and the openings are dispersed and arranged in the longitudinal direction of the high frequency electrode. The antenna is disposed in a vacuum container in a direction that a main surface of the high frequency electrode and a surface of the substrate are substantially perpendicular to each other.
Nissin Electric Co. | Date: 2012-04-17
An inductively-coupled-plasma (ICP) type plasma processing apparatus is provided. The plasma processing includes an antenna which is substantially straight in a plan view of the antenna. A plasma is generated for performing a plasma treatment to a substrate when a high frequency current is applied to the antenna to form an electric field in a vacuum container. The antenna includes two go-and-return conductors closely disposed to each other in an up-down direction, wherein the up-down direction is perpendicular to a surface of the substrate, and the high frequency current is applied to flow in opposite directions between the two go-and-return conductors. An interval is defined by a distance between the two go-and-return conductors in the up-down direction, varies in a longitudinal direction of the antenna.
Nissin Electric Co. | Date: 2013-03-21
An electricity storage battery is described, including an anode electrolyte solution 32 that contains a zinc redox material and an amine represented by a general formula (1) below: In the general formula (1), n is one of the integers 0 to 4, and each of R
Nissin Electric Co. | Date: 2014-01-21
A plasma device including a vacuum container, an arc-type evaporation source, a negative electrode member, a shutter, a power source, and a trigger electrode is described. The arc-type evaporation source is fixed to the side wall of the vacuum container so as to face the substrate. The negative electrode member is made from vitreous carbon having a protrusion and is mounted on the arc-type evaporation source. The power source applies a negative voltage to the arc-type evaporation source. The trigger electrode comes into contact with or separates away from the protrusion on the negative electrode member. A negative voltage is applied to the arc-type evaporation source, the trigger electrode is brought into contact with the protrusion on the negative electrode member, an arc discharge is generated, the shutter is opened, and a carbon thin film is formed on the substrate.
Nissin Electric Co. | Date: 2012-12-25
An electricity storage battery is described, including a cathode electrolyte solution that contains a manganese redox material and an amine represented by a general formula (1) below: In the general formula (1), n is one of the integers 0 to 4, and each of R