Fukuoka, Japan
Fukuoka, Japan
SEARCH FILTERS
Time filter
Source Type

Patent
Nippon Tungsten Co., Japan Fine Ceramics Center, Trek Holding Co. and SHINKO Electrical INDUSTRIES CO. | Date: 2013-10-15

A dielectric layer for an electrostatic chuck is formed of a ceramic material having a first phase including aluminum oxide and a second phase including composite carbonitride (Ti, Me)(C, N) that contains titanium as fine grains. The Me represents a transition element and metals of Group 4 to Group 6 such as Mo and W. The ceramic material that includes the second phase by 0.05 vol % to 2.5 vol % has a volume resistivity value of about 10^(8 )to 10^(13 )(cm) necessary for a Johnsen-Rahbek type electrostatic chuck.


Disclosed is a highly-pure fine titanium carbide powder having a maximum particle size of 100 nm or less and containing metals except titanium in an amount of 0.05 wt % or less and free carbon in an amount of 0.5 wt % or less. The powder has a NaCl-type crystal structure, and a composition represented by TiCxOyNz, wherein X, Y and Z satisfy the relations: 0.5X1.0; 0Y0.3; 0Z0.2; and 0.5X+Y+Z1.0.) The powder is produced by: dissolving an organic substance serving as a carbon source in a solvent to prepare a liquid, wherein the organic substance contains at least one OH or COOH group which is a functional group coordinatable to titanium of titanium alkoxide, and no element except C, H, N and O; mixing titanium alkoxide with the liquid to satisfy the following relation: 0.71.0 (wherein is a molar ratio of the carbon source to the titanium alkoxide), so as to obtain a precursor solution; and subjecting a product in the precursor solution to a heat treatment in a non-oxidizing atmosphere or a vacuum atmosphere at a temperature of 1050 to 1500 C. The present invention can provide fine titanium carbide powders with nano-scale particle sizes, which are free of inorganic impurities, such as titanium oxide and metal, low in free carbon, and effective in enhancing characteristics of a titanium carbide-ceramics composite sintered body.


Patent
Nippon Tungsten Co. and Ube Industries | Date: 2012-06-29

Disclosed is an MgO target for sputtering, which can accelerate a film formation rate even when MgO is used as a target for sputtering in the formation of an MgO film. The MgO target for sputtering, which includes MgO and an electroconductive material as main components, and in which the electroconductive material is capable of imparting orientation to a MgO film when the MgO film containing the electroconductive material is formed by a DC sputtering.


Patent
Nippon Tungsten Co. and Hitachi Ltd. | Date: 2015-06-26

An AlTiC-based substrate suitable for a thin-film magnetic head is provided. The Al_(2)O_(3)TiC based substrate for a thin-film magnetic head including an Al_(2)O_(3 )phase and a TiC phase, wherein a c-axis lattice constant of the Al_(2)O_(3 )phase is 12.992 or more and 12.998 or less, and a lattice constant of the TiC phase is 4.297 or more and 4.315 or less.


Patent
Nippon Tungsten Co. and Hitachi Ltd. | Date: 2015-06-26

An AlTiC-based substrate suitable for a thin-film magnetic head is provided. The Al_(2)O_(3)-TiC based substrate for a thin-film magnetic head including an Al_(2)O_(3 )phase and a TiC phase, wherein a c-axis lattice constant of the Al_(2)O_(3 )phase is 12.985 or more and 12.992 or less, and a lattice constant of the TiC phase is 4.297 or more and 4.325 or less.


Patent
Nippon Tungsten Co. and Hitachi Ltd. | Date: 2015-06-26

An AlTiC-based substrate suitable for a thin-film magnetic head is provided. The Al_(2)O_(3)TiC based substrate for a thin-film magnetic head including an Al_(2)O_(3 )phase and a TiC phase, wherein a c-axis lattice constant of the Al_(2)O_(3 )phase is 12.992 or more and 12.998 or less, and a lattice constant of the TiC phase is 4.317 or more and 4.325 or less.


Patent
Nippon Tungsten Co. | Date: 2012-03-22

Provided is a cathode material which becomes an alternative material of a cathode material formed of a WThO_(2 )alloy and is formed of a tungsten alloy that does not include thorium which is a radioactive element. When particles of a rare earth oxide and tungsten carbide are finely dispersed in a tungsten cathode material used as a discharge cathode material used in TIG, plasma spraying, plasma cutting, electrical discharge machining, discharge lamps and the like, reduction and diffusion of the rare earth oxide are accelerated, and supply of rare earth elements to a cathode surface is ensured, thereby improving discharge characteristics.


A composite ceramic body which includes three phases consisting of a MgO phase, a YAP (YAlO_(3)) phase and a spinel (MgAl_(2)O_(4)) phase. This composite ceramic body has a plasma resistance greater than that of alumina and approximately equal to that of MgO. Mechanical properties, such as hardness and bending strength, of the composite ceramic body, are approximately equal or superior to those of Al_(2)O_(3). A raw material cost and a manufacturing cost thereof are lower than those of a rare-earth oxide. Further, electric conductive particles may be added thereto to lower an electrical resistivity. The composite ceramic body is suitably usable as component parts for a semiconductor manufacturing equipment.


Patent
Nippon Tungsten Co. | Date: 2014-01-29

Provided is a cathode material which becomes an alternative material of a cathode material formed of a W-ThO_(2) alloy and is formed of a tungsten alloy that does not include thorium which is a radioactive element. When particles of a rare earth oxide and tungsten carbide are finely dispersed in a tungsten cathode material used as a discharge cathode material used in TIG, plasma spraying, plasma cutting, electrical discharge machining, discharge lamps and the like, reduction and diffusion of the rare earth oxide are accelerated, and supply of rare earth elements to a cathode surface is ensured, thereby improving discharge characteristics.


Patent
Nippon Tungsten Co. | Date: 2012-07-18

A tungsten cathode material to be used for TIG welding, plasma spraying, plasma cutting, electro-discharge machining, discharge lamps, and the like is improved; use of the radioactive element thorium is reduced; and a long life and a high performance are realized. In a tungsten cathode material, oxide particles containing an oxide or oxides of at least one selected from the group consisting of Sm, Nd, Gd, and La in a total amount of 50 vol% or more are dispersed, the oxide particles having an average particle diameter d satisfying the relationship 0

Loading Nippon Tungsten Co. collaborators
Loading Nippon Tungsten Co. collaborators