Cai J.,Ningbo Key Laboratory of Marine Protection Materials |
Yang W.,Ningbo Key Laboratory of Marine Protection Materials |
Ke P.,Ningbo Key Laboratory of Marine Protection Materials |
Wang A.,Ningbo Key Laboratory of Marine Protection Materials |
Fang Y.,Zhejiang University
Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology | Year: 2012
The tetrahedral amorphous carbon (ta-C) films were grown by vacuum filtered cathodic arc deposition on p-type Si (100) wafer substrate, with a lab built cathode. The impacts of the deposition conditions, such as the argon flow rate, pressure, and substrate temperature, on microstructures and tribological properties of the ta-C films were evaluated. The ta-C films were characterized with X-ray photoelectron spectroscopy and mechanical probes. The results show that the argon flow rate strongly affects the surface morphologies, deposition rate, and fraction of sp 3. For example, as the Ar flow rate increased, the deposition rate and surface roughness decreased, accompanied with an increasing friction coefficient; the sp 3 fraction decreased, from 68% at an argon flow rate of 2 ml/min to 56% at 10 ml/min; the compressive stress also decreased, minimized at 10 ml/min. The average friction coefficients of all the ta-C films were found to be in the range of 0.024 and 0.045.