Saitama, Japan
Saitama, Japan

Time filter

Source Type

A detector comprises a plurality of photoelectric converters to output an electrical signal corresponding to an incident light, and a plurality of filter circuits provided corresponding to each of the plurality of photoelectric converters or to each of a plurality of element groups respectively including a predetermined number of the photoelectric converters of the plurality of photoelectric converters, the plurality of filter circuits attenuating a signal having a predetermined frequency from the electrical signal output from the plurality of photoelectric converters. In the above-described detector, the plurality of photoelectric converters may be provided in a first substrate, and the plurality of filter circuits may be provided in a second substrate laminated on the first substrate.


Patent
Nikon Corporation | Date: 2017-02-08

A supporting apparatus (1) has: a columnar first member (12); and a cylindrical second member (13) having an inner surface (13b) that is allowed to face with at least one portion of an outer surface (122c) of the first member, at least one portion of the first member is inserted in a cylinder defined by the inner surface, a state of the first and second members is allowed to change from a first state to a second state, the first state includes a state in which a predetermined space (SP1) is ensured, the predetermined space is surrounded by at least one portion (13b-1) of the inner surface of the second member and an edge surface (122a) at one side of the first member that is different from the outer surface, the second state includes a state in which the second member has moved toward other side that is opposite to the one side relative to the first member from a base position of the first and second members in the first state.


Patent
Nikon Corporation | Date: 2017-03-08

When a transition from a first state where one stage (WST1 (or WST2)) is positioned at a first area directly below projection optical system (PL) to which liquid (Lq) is supplied to a state where the other stage (WST2 (or WST1)) is positioned at the first area, both stages are simultaneously driven while a state where both stages are close together in the X-axis direction is maintained. Therefore, it becomes possible to make a transition from the first state to the second state in a state where liquid is supplied in the space between the projection optical system and the specific stage directly under the projection optical system. Accordingly, the time from the completion of exposure operation on one stage side until the exposure operation begins on the other stage side can be reduced, which allows processing with high throughput. Further, because the liquid can constantly exist on the image plane side of the projection optical system, generation of water marks on optical members of the projection optical system on the image plane side is prevented.


The art is formed of, disposed in order from an object, a first lens group (G1) having positive refractive power, a second lens group (G2) having negative refractive power, and a third lens group (G3) having positive refractive power, in which at least a part of the second lens group (G2) or at least a part of the third lens group (G3) is configured to be movable, as a vibration-proof lens group for correcting an image blur, so as to have a component in a direction perpendicular to an optical axis, and the following conditional expression is satisfied:


Patent
Nikon Corporation | Date: 2017-03-29

Positional information of a movable body (RST) in a Y-axis direction is measured using an interferometer (16y) and an encoder ((24A, 26A_(1)), (24B, 26B_(1))) whose short-term stability of measurement values excels when compared with the interferometer, and based on the measurement results, a predetermined calibration operation for obtaining correction information for correcting measurement values of the encoder is performed. Accordingly, by using measurement values of the interferometer, correction information for correcting the measurement values of the encoder whose short-term stability of the measurement values excels the interferometer is obtained. Then, based on the measurement values of the encoder and the correction information, the movable body is driven in the Y-axis direction with good precision.


Provided is a CaF2 monocrystalline optical member reliably usable even at a high temperature and under a high pressure. A calcium fluoride optical member (1) is formed of monocrystalline calcium fluoride and has a tubular shape. A {110} crystal plane or a {111} crystal plane of the monocrystalline calcium fluoride is orthogonal to the center axis (A) of the tube.


Patent
Nikon Corporation | Date: 2017-02-01

The art has, disposed in order from an object, a first lens group (G1) having positive refractive power, a second lens group (G2) having negative refractive power, a third lens group (G3) having negative refractive power, and a fourth lens group (G4) having positive refractive power, in which zooming is made by varying an air distance between the first lens group (G1) and the second lens group (G2), and the following conditional expression (1) is satisfied: where f4 denotes a focal distance of the fourth lens group (G4), andfw denotes a focal distance of a zoom lens in a wide-angle end state upon focusing on infinity.


Patent
Nikon Corporation | Date: 2017-02-08

A microscope objective lens OL comprises, in order from the object side: a first lens group G1 having a positive refractive power, a second lens group G2, and a third lens group G3 having a negative refractive power, wherein the first lens group G1 includes a positive lens component L1 having a lens surface with a negative refractive power and at least one cemented lens component CL11 having a positive refractive power, the second lens group G2 includes a diffractive optical element GD that joins two diffractive element components L6 and L7 respectively made from different optical materials and which has a diffractive optical surface D on which diffractive grating grooves are formed on the bonded surface of the two diffractive element components, and at least one cemented lens component CL21, and the third lens group G3 includes at least one achromatic lens component CL31 and a lens surface of the third lens group G3 nearest to the image side is arranged so that a concave surface of the lens surface faces the image side.


A multilayer film reflective mirror for reflecting incident light is provided with: a substrate; a first multilayer film formed by alternately layering a Mo layer and a Si layer on a surface of the substrate; a detachable layer detachable from the first multilayer film; and a second multilayer film formed by alternately layering the Mo layer and the Si layer on the detachable layer, and the second multilayer film is removable by detaching the detachable layer by dissolving it with acid. When reflectance of the multilayer film reflective mirror is reduced, the reflectance can be increased by a simple operation.


Patent
Nikon Corporation | Date: 2017-02-08

An achromatic phase modulator (300) arranged to modulate the phase of linearly polarized light and to output the linearly polarized light having undergone phase modulation, comprising: means to establish a predefined light path; a linear input polarizer (301); at least two liquid crystal elements (1, 2) disposed in series downstream the linear input polarizer (301) on and orthogonally to the predefined light path, the liquid crystal elements (1, 2) being each constituted with a respective liquid crystal material and the refractive index wavelength dependence characteristics of the respective liquid crystal materials are different from each other; and a control unit (15) arranged to apply drive electric signals individually to the liquid crystal elements (1, 2) so as to achieve achromatic phase modulation for linearly polarized light exiting the linear input polarizer (301) and orthogonally passing through the liquid crystal elements (1, 2) along the predefined light path, wherein in each liquid crystal element (1, 2), the alignment direction of the liquid crystal molecules therein can be altered between a first alignment direction substantially parallel to the light path direction, and a second alignment direction substantially parallel to the polarization direction of the linearly polarized light, in the plane including the first alignment direction and the second alignment direction, in correspondence to the drive electric signals applied to the liquid crystal elements (1, 2), and the polarization direction of linearly polarized light entering the liquid crystal element (1) facing the linear input polarizer (301) coincides with the polarization direction of the linearly polarized light exiting the liquid crystal element (2) farthest from the linear input polarizer (301).

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