Nikon Corporation | Date: 2017-01-27
In a measurement device, positional information of a mark of an object is measured. A holding member that holds the object, with a movable member that is supported by levitation on a base member, moves so that the mark is detected with a detection system having an optical member that irradiates the mark with a detection light, the base member being disposed below the detection system so that a surface of the base member is substantially parallel to a predetermined plane. The holding member is supported by the movable member and has a mounting area for the object on an upper surface side of the holding member in a direction orthogonal to the predetermined plane and being provided with a measurement surface on a lower surface side of the holding member, the measurement surface having a grating.
Nikon Corporation | Date: 2017-01-26
A liquid immersion member including first and second members forming the immersion space; first member having a first lower surface disposed at a portion of the optical member surrounding, second member having a second upper surface opposite to the first lower surface via a gap and a second lower surface opposing the substrate and second member disposed at a portion of exposure light optical path surrounding; driving apparatus to move the second member with respect to the first; controlling the driving apparatus so the second members operation in the substrate first operation movement is between exposure termination and start of a first and second shot regions differently from a second members operation in the substrate second movement period which is between exposure termination and start of a third and fourth shot regions; first and second shot regions are in the same row contrary to third and fourth shot regions.
Nikon Corporation | Date: 2016-12-16
An information storage device is a device that communicates over a network with another device that is used by another user different from an own user who uses an own device, and includes a storage unit including a first storage area available to the own user and a second storage area available to the other user, an information output unit that outputs information of the own user stored in the first storage area to the other device over the network, an information writing unit that stores information of the other user output by the other device over the network, in the second storage area, and a use control unit that controls whether the second storage area is available to the own user on the basis of an instruction of the other user.
University of Tokyo and Nikon Corporation | Date: 2017-05-17
A valve is provided with a tubular structure having an outer tube and an inner tube, and a diaphragm member having a thin film disposed to cover one end of the inner tube and an anchor part which encircles a peripheral edge of the thin film and comes into close contact with an inner wall of the outer tube and an outer wall of the inner tube.
Nikon Corporation | Date: 2017-02-06
An exposure method and apparatus for illuminating a pattern with an illumination system to expose a substrate through a projection system. The pattern is illuminated with illumination light with a light amount distribution in which an amount of light is larger in a pair of first areas and a pair of second areas than in an area other than the first and second areas on a pupil plane of the illumination system. The pair of the first areas being arranged outside an optical axis, the pair of the second areas being arranged on ten same straight line as the pair of the first areas are arranged on, and the pair of the second areas being arranged outside the pair of the first areas.
Nikon Corporation | Date: 2017-01-10
An image analysis apparatus includes: a distribution data generator that generates, on the basis of a sample image obtained by irradiating a biological tissue with light having an infrared bandwidth, distribution data indicating a distribution of light intensity in the infrared bandwidth in the tissue; a differential calculator that calculates, on the basis of the distribution data, an Nth-order derivative of the distribution of the light intensity in a first wavelength band in the infrared bandwidth, where N is an integer of 2 or more, for each region in the sample image; and an image data generator that converts the Nth-order derivative into a gray-scale value to generate image data.
Nikon Corporation | Date: 2017-05-24
An exposure apparatus (100) for exposing a substrate (W) via a projection optical system (PL), the apparatus comprising an encoder system for measuring positional information of a movable body by irradiating each of four areas (52A, 52B, 52C, 52D), in which a grating (44) is formed, with a beam via each of four heads (46A, 46B, 46C, 46D). A controller controls the drive of the movable body such that as the movable body moves, a relationship between the grating and the heads changes between a first state and a second state. In the first state, the four heads respectively face the four areas. In the second state, only three of the heads respectively face three areas of the four areas, such that none of the heads face a fourth one of the four areas.
University of Tokyo and Nikon Corporation | Date: 2017-05-24
A method for detecting a nucleic acid includes (a) bringing a solution including a nucleic acid and a detection probe labeled with a labeling substance into contact with a solid phase on which a capture probe is immobilized, the capture probe having a first portion including a sequence capable of hybridizing with the nucleic acid, a second portion including a sequence capable of hybridizing with the detection probe, and a stem portion for forming a double strand; (b) hybridizing the nucleic acid with the first portion, hybridizing the detection probe with the second portion, and forming a nucleic acid-detection probe-capture probe complex on the solid phase; (c) ligating the nucleic acid and the detection probe; (d) eliminating binding between the capture probe and the detection probe that has not been ligated with the nucleic acid; and (e) detecting the labeling substance in the complex.
Nikon Corporation | Date: 2017-02-08
An achromatic phase modulator (300) arranged to modulate the phase of linearly polarized light and to output the linearly polarized light having undergone phase modulation, comprising: means to establish a predefined light path; a linear input polarizer (301); at least two liquid crystal elements (1, 2) disposed in series downstream the linear input polarizer (301) on and orthogonally to the predefined light path, the liquid crystal elements (1, 2) being each constituted with a respective liquid crystal material and the refractive index wavelength dependence characteristics of the respective liquid crystal materials are different from each other; and a control unit (15) arranged to apply drive electric signals individually to the liquid crystal elements (1, 2) so as to achieve achromatic phase modulation for linearly polarized light exiting the linear input polarizer (301) and orthogonally passing through the liquid crystal elements (1, 2) along the predefined light path, wherein in each liquid crystal element (1, 2), the alignment direction of the liquid crystal molecules therein can be altered between a first alignment direction substantially parallel to the light path direction, and a second alignment direction substantially parallel to the polarization direction of the linearly polarized light, in the plane including the first alignment direction and the second alignment direction, in correspondence to the drive electric signals applied to the liquid crystal elements (1, 2), and the polarization direction of linearly polarized light entering the liquid crystal element (1) facing the linear input polarizer (301) coincides with the polarization direction of the linearly polarized light exiting the liquid crystal element (2) farthest from the linear input polarizer (301).
Nikon Corporation | Date: 2017-03-31
A cellular phone is capable of telephone-calling with an external device, and includes an antenna by which to communicate with the external device; a lens; an image sensor that outputs an image signal; a display; a loudspeaker; and a processer. The processor controls the display to display an announcement of an incoming call from the external device after receiving a calling signal via the antenna, and in a case that the calling signal is received during operation of the image sensor in a moving image mode, the processor permits communication between the cellular phone and the external device via the antenna and using the loudspeaker and a microphone of the cellular phone after the announcement of the incoming call is displayed by the display and after the processor receives an instruction from an input device of the cellular phone to allow starting of the telephone-calling with the external device.