Nikon Corporation

Saitama, Japan

Nikon Corporation

Saitama, Japan
SEARCH FILTERS
Time filter
Source Type

In a measurement device, positional information of a mark of an object is measured. A holding member that holds the object, with a movable member that is supported by levitation on a base member, moves so that the mark is detected with a detection system having an optical member that irradiates the mark with a detection light, the base member being disposed below the detection system so that a surface of the base member is substantially parallel to a predetermined plane. The holding member is supported by the movable member and has a mounting area for the object on an upper surface side of the holding member in a direction orthogonal to the predetermined plane and being provided with a measurement surface on a lower surface side of the holding member, the measurement surface having a grating.


A liquid immersion member including first and second members forming the immersion space; first member having a first lower surface disposed at a portion of the optical member surrounding, second member having a second upper surface opposite to the first lower surface via a gap and a second lower surface opposing the substrate and second member disposed at a portion of exposure light optical path surrounding; driving apparatus to move the second member with respect to the first; controlling the driving apparatus so the second members operation in the substrate first operation movement is between exposure termination and start of a first and second shot regions differently from a second members operation in the substrate second movement period which is between exposure termination and start of a third and fourth shot regions; first and second shot regions are in the same row contrary to third and fourth shot regions.


An information storage device is a device that communicates over a network with another device that is used by another user different from an own user who uses an own device, and includes a storage unit including a first storage area available to the own user and a second storage area available to the other user, an information output unit that outputs information of the own user stored in the first storage area to the other device over the network, an information writing unit that stores information of the other user output by the other device over the network, in the second storage area, and a use control unit that controls whether the second storage area is available to the own user on the basis of an instruction of the other user.


Patent
Nikon Corporation | Date: 2017-02-08

An achromatic phase modulator (300) arranged to modulate the phase of linearly polarized light and to output the linearly polarized light having undergone phase modulation, comprising: means to establish a predefined light path; a linear input polarizer (301); at least two liquid crystal elements (1, 2) disposed in series downstream the linear input polarizer (301) on and orthogonally to the predefined light path, the liquid crystal elements (1, 2) being each constituted with a respective liquid crystal material and the refractive index wavelength dependence characteristics of the respective liquid crystal materials are different from each other; and a control unit (15) arranged to apply drive electric signals individually to the liquid crystal elements (1, 2) so as to achieve achromatic phase modulation for linearly polarized light exiting the linear input polarizer (301) and orthogonally passing through the liquid crystal elements (1, 2) along the predefined light path, wherein in each liquid crystal element (1, 2), the alignment direction of the liquid crystal molecules therein can be altered between a first alignment direction substantially parallel to the light path direction, and a second alignment direction substantially parallel to the polarization direction of the linearly polarized light, in the plane including the first alignment direction and the second alignment direction, in correspondence to the drive electric signals applied to the liquid crystal elements (1, 2), and the polarization direction of linearly polarized light entering the liquid crystal element (1) facing the linear input polarizer (301) coincides with the polarization direction of the linearly polarized light exiting the liquid crystal element (2) farthest from the linear input polarizer (301).


Patent
University of Tokyo and Nikon Corporation | Date: 2017-05-17

A valve is provided with a tubular structure having an outer tube and an inner tube, and a diaphragm member having a thin film disposed to cover one end of the inner tube and an anchor part which encircles a peripheral edge of the thin film and comes into close contact with an inner wall of the outer tube and an outer wall of the inner tube.


A detector comprises a plurality of photoelectric converters to output an electrical signal corresponding to an incident light, and a plurality of filter circuits provided corresponding to each of the plurality of photoelectric converters or to each of a plurality of element groups respectively including a predetermined number of the photoelectric converters of the plurality of photoelectric converters, the plurality of filter circuits attenuating a signal having a predetermined frequency from the electrical signal output from the plurality of photoelectric converters. In the above-described detector, the plurality of photoelectric converters may be provided in a first substrate, and the plurality of filter circuits may be provided in a second substrate laminated on the first substrate.


Patent
Nikon Corporation | Date: 2017-02-01

The art has, disposed in order from an object, a first lens group (G1) having positive refractive power, a second lens group (G2) having negative refractive power, a third lens group (G3) having negative refractive power, and a fourth lens group (G4) having positive refractive power, in which zooming is made by varying an air distance between the first lens group (G1) and the second lens group (G2), and the following conditional expression (1) is satisfied: where f4 denotes a focal distance of the fourth lens group (G4), andfw denotes a focal distance of a zoom lens in a wide-angle end state upon focusing on infinity.


The art is formed of, disposed in order from an object, a first lens group (G1) having positive refractive power, a second lens group (G2) having negative refractive power, and a third lens group (G3) having positive refractive power, in which at least a part of the second lens group (G2) or at least a part of the third lens group (G3) is configured to be movable, as a vibration-proof lens group for correcting an image blur, so as to have a component in a direction perpendicular to an optical axis, and the following conditional expression is satisfied:


Patent
Nikon Corporation | Date: 2017-03-08

When a transition from a first state where one stage (WST1 (or WST2)) is positioned at a first area directly below projection optical system (PL) to which liquid (Lq) is supplied to a state where the other stage (WST2 (or WST1)) is positioned at the first area, both stages are simultaneously driven while a state where both stages are close together in the X-axis direction is maintained. Therefore, it becomes possible to make a transition from the first state to the second state in a state where liquid is supplied in the space between the projection optical system and the specific stage directly under the projection optical system. Accordingly, the time from the completion of exposure operation on one stage side until the exposure operation begins on the other stage side can be reduced, which allows processing with high throughput. Further, because the liquid can constantly exist on the image plane side of the projection optical system, generation of water marks on optical members of the projection optical system on the image plane side is prevented.


Patent
Nikon Corporation | Date: 2017-02-08

A supporting apparatus (1) has: a columnar first member (12); and a cylindrical second member (13) having an inner surface (13b) that is allowed to face with at least one portion of an outer surface (122c) of the first member, at least one portion of the first member is inserted in a cylinder defined by the inner surface, a state of the first and second members is allowed to change from a first state to a second state, the first state includes a state in which a predetermined space (SP1) is ensured, the predetermined space is surrounded by at least one portion (13b-1) of the inner surface of the second member and an edge surface (122a) at one side of the first member that is different from the outer surface, the second state includes a state in which the second member has moved toward other side that is opposite to the one side relative to the first member from a base position of the first and second members in the first state.

Loading Nikon Corporation collaborators
Loading Nikon Corporation collaborators