Nikon Corporation

Saitama, Japan

Nikon Corporation

Saitama, Japan
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In a measurement device, positional information of a mark of an object is measured. A holding member that holds the object, with a movable member that is supported by levitation on a base member, moves so that the mark is detected with a detection system having an optical member that irradiates the mark with a detection light, the base member being disposed below the detection system so that a surface of the base member is substantially parallel to a predetermined plane. The holding member is supported by the movable member and has a mounting area for the object on an upper surface side of the holding member in a direction orthogonal to the predetermined plane and being provided with a measurement surface on a lower surface side of the holding member, the measurement surface having a grating.


A liquid immersion member including first and second members forming the immersion space; first member having a first lower surface disposed at a portion of the optical member surrounding, second member having a second upper surface opposite to the first lower surface via a gap and a second lower surface opposing the substrate and second member disposed at a portion of exposure light optical path surrounding; driving apparatus to move the second member with respect to the first; controlling the driving apparatus so the second members operation in the substrate first operation movement is between exposure termination and start of a first and second shot regions differently from a second members operation in the substrate second movement period which is between exposure termination and start of a third and fourth shot regions; first and second shot regions are in the same row contrary to third and fourth shot regions.


An information storage device is a device that communicates over a network with another device that is used by another user different from an own user who uses an own device, and includes a storage unit including a first storage area available to the own user and a second storage area available to the other user, an information output unit that outputs information of the own user stored in the first storage area to the other device over the network, an information writing unit that stores information of the other user output by the other device over the network, in the second storage area, and a use control unit that controls whether the second storage area is available to the own user on the basis of an instruction of the other user.


Patent
Nikon Corporation | Date: 2017-02-08

An achromatic phase modulator (300) arranged to modulate the phase of linearly polarized light and to output the linearly polarized light having undergone phase modulation, comprising: means to establish a predefined light path; a linear input polarizer (301); at least two liquid crystal elements (1, 2) disposed in series downstream the linear input polarizer (301) on and orthogonally to the predefined light path, the liquid crystal elements (1, 2) being each constituted with a respective liquid crystal material and the refractive index wavelength dependence characteristics of the respective liquid crystal materials are different from each other; and a control unit (15) arranged to apply drive electric signals individually to the liquid crystal elements (1, 2) so as to achieve achromatic phase modulation for linearly polarized light exiting the linear input polarizer (301) and orthogonally passing through the liquid crystal elements (1, 2) along the predefined light path, wherein in each liquid crystal element (1, 2), the alignment direction of the liquid crystal molecules therein can be altered between a first alignment direction substantially parallel to the light path direction, and a second alignment direction substantially parallel to the polarization direction of the linearly polarized light, in the plane including the first alignment direction and the second alignment direction, in correspondence to the drive electric signals applied to the liquid crystal elements (1, 2), and the polarization direction of linearly polarized light entering the liquid crystal element (1) facing the linear input polarizer (301) coincides with the polarization direction of the linearly polarized light exiting the liquid crystal element (2) farthest from the linear input polarizer (301).


Patent
University of Tokyo and Nikon Corporation | Date: 2017-05-17

A valve is provided with a tubular structure having an outer tube and an inner tube, and a diaphragm member having a thin film disposed to cover one end of the inner tube and an anchor part which encircles a peripheral edge of the thin film and comes into close contact with an inner wall of the outer tube and an outer wall of the inner tube.


Patent
Nikon Corporation | Date: 2017-09-13

An exchangeable lens mountable on a camera body includes: a selection unit configured to select a first state in which a movement range of a focusing optical system changing a focal position of the exchangeable lens is limited and a second state which is different from the first state, and a transmission unit configured to transmit a first value and a second value which is equal to or smaller than the first value to the camera body in the second state, the first value indicating a relationship between a moving amount of the focusing optical system and a moving amount of an image plane at a position in which the focusing optical system has moved, the second value indicating a relationship between the moving amount of the focusing optical system and the moving amount of the image plane, and transmit a value which changes depending on the position of the focusing optical system as the second value in the first state.


Patent
Nikon Corporation | Date: 2017-09-27

Embodiments of the present invention are directed to a system and a method of controlling the fluid flow and pressure to provide stable conditions for immersion lithography. A fluid is provided in a space (34) between the lens (22) and the substrate (16) during the immersion lithography process. Fluid is supplied to the space and is recovered from the space through a porous member (51) in ffuidic communication with the space. Maintaining the pressure in the porous member under the bubble point of the porous member can eliminate noise created by mixing air with the fluid during fluid recovery. In one embodiment, the method comprises drawing the fluid from the space via a recovery flow line through a porous member; and maintaining a pressure of the fluid in the porous member below a bubble point of the porous member during drawing of the fluid from the space.


Provided is a light detecting apparatus including: a first photoelectric converting unit which outputs a first electrical signal in accordance with an incident light including a modulated light component and a background light component; a filter unit which outputs a second electrical signal resulting from the modulated light component being reduced in the incident light; and a signal processing unit which subtracts the second electrical signal from the first electrical signal to reduce a component corresponding to the background light component in the first electrical signal. In the light detecting apparatus described above, the photoelectric converting unit may include a first photoelectric converting element and a second photoelectric converting element each of which outputs the first electrical signal, the filter unit may attenuate the signal corresponding to the modulated light component in the first electrical signal output from the second photoelectric converting element, and the signal processing unit may subtract the second electrical signal from the first electrical signal output from the first photoelectric converting element.


Patent
Nikon Corporation | Date: 2017-09-27

Embodiments of the present invention are directed to a system and a method of controlling the fluid flow and pressure to provide stable conditions for immersion lithography. A fluid is provided in a space (34) between the lens (22) and the substrate (16) during the immersion lithography process. Fluid is supplied to the space and is recovered from the space through a porous member (51) in fluidic communication with the space. Maintaining the pressure in the porous member under the bubble point of the porous member can eliminate noise created by mixing air with the fluid during fluid recovery. In one embodiment, the method comprises drawing the fluid from the space via a recovery flow line through a porous member; and maintaining a pressure of the fluid in the porous member below a bubble point of the porous member during drawing of the fluid from the space.


Patent
Nikon Corporation | Date: 2017-09-20

A shaping apparatus is equipped with: a beam shaping system (500) having a beam irradiation section (520) that includes a condensing optical system (82) which emits a beam and a material processing section (530) which supplies a shaping material irradiated by the beam from the beam irradiation section (520) ; and a controller which, on the basis of 3D data of a three-dimensional shaped object to be formed on a target surface, controls a workpiece movement system and the beam shaping system (500) such that a target portion (TA) on the target surface is shaped by supplying the shaping material from the material processing section (530) while moving the beam from the beam irradiation section (520) and the target surface (TAS) on a workpiece (W) (or a table (12)) relative to each other. Further the intensity distribution of the beam in the shaping plane (MP) facing the emitting surface of the condensing optical system can be modified. Consequently, it becomes possible for three-dimensional shaped obj ects with excellent processing accuracy to be formed on the target surface.

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