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Komaki, Japan

Patent
Ngk Spark Plug Co. | Date: 2015-09-18

A circuit board is provided that includes an outermost conductor layer including a plurality of terminals for flip-chip bonding and an outermost resin insulating layer defining a first opening and a second opening in an electronic-component mounting region. One of a power supply terminal and a ground terminal is exposed in the first opening. A plurality of signal terminals are exposed in the second opening. The resin insulating layer includes a reinforcing portion that defines an inner bottom surface of the second opening. A height of a portion of the terminal exposed in the first opening, the portion projecting from an inner bottom surface of the first opening, is greater than a height of portions of the terminals exposed in the second opening, the portions projecting from the inner bottom surface of the second opening.


A method of making a semiconductor manufacturing equipment component, such as an electrostatic chuck, includes an application step of applying a photosensitive metal paste onto a ceramic green sheet, which is to become the body substrate, the photosensitive metal paste being a heating element material; an exposure-and-development step of exposing the photosensitive metal paste, which has been applied onto the ceramic green sheet, to light and developing the photosensitive metal paste to form an intermediate heating element, which is to become the heating element, on the ceramic green sheet; and a firing step of co-firing the ceramic green sheet and the intermediate heating element to form the body substrate and the heating element.


Patent
Ngk Spark Plug Co. | Date: 2015-09-30

A gas sensor system (


Patent
Ngk Spark Plug Co. | Date: 2015-09-30

A gas sensor system (


Patent
Ngk Spark Plug Co. | Date: 2015-08-07

A temperature sensor includes a sheath member having an insulative holding member which contains an oxygen supplying substance and is formed in such a manner that the oxygen supplying substance is exposed when viewed from an opening on the distal end side of a sheath tube. Since the insulative holding member releases oxygen from the distal end side of the sheath member, a decrease in oxygen concentration around a thermistor element can be suppressed. Thus, it is possible to suppress a change in the characteristics of the thermistor element due to reduction action, and to suppress decrease in temperature detection accuracy. Since the oxygen supplying substance is contained in the insulative holding member, compared with a configuration where a pellet is disposed on the distal end side of the thermistor element, delay in heat conduction is less likely to occur, and a decrease in temperature detection response can be suppressed.

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