National Key Laboratory of Micro Nano Fabrication Technology

Beijing, China

National Key Laboratory of Micro Nano Fabrication Technology

Beijing, China
SEARCH FILTERS
Time filter
Source Type

Shao L.,Peking University | Shao L.,Harvard University | Zheng M.,Peking University | Zheng M.,Beth Israel Deaconess Medical Center | And 3 more authors.
Applied Physics Letters | Year: 2015

Ions in electrolytes have been proposed to resemble carriers in solid semiconductors over decades. Recently, nanofluidic devices have been demonstrated to phenomenologically mimic semiconductor devices by modulating ion concentrations near the interface of electrolytes and solids. However, the link between the ion transportation in nanofluidics and the solid semiconductor is still missing. This letter proposes an electrolyte doping scheme by introducing charged nanoparticles as dopers, which holds potential in modulating ion concentration in a bulk sense. These nanoparticles show a strong modulation of ion concentrations, and thus bridge the ion transportation in nanofluidics with the well-established semiconductor physics. Ionic diodes based on the present electrolyte doping picture are theoretically and experimentally demonstrated. The current-voltage characteristics are scrutinized by the depletion approximation. © 2015 AIP Publishing LLC.


Zhang L.,Peking University | Liu Y.,Peking University | Yang F.,Peking University | Yang F.,National Key Laboratory of Micro Nano Fabrication Technology | And 10 more authors.
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) | Year: 2015

This paper reported a MEMS fabrication compatible, damage free method for in-process 3D morphology reconstruction of high aspect ratio microstructure. As a novel morphology tracer, Parylene C thin film was conformally deposited onto the structure and annealed at high temperature under N2. The autofluorescence of Parylene C was considerably enhanced by the annealing, which made it possible to image the microstructure. By scanning with a confocal microscopy, 3D morphology of the microstructure was reconstructed. The preliminary result indicated that microstructure with width of 8 μm and depth of 34 μm (34.1 μm actual depth by SEM) was successfully and accurately measured by this method. © 2015 IEEE.

Loading National Key Laboratory of Micro Nano Fabrication Technology collaborators
Loading National Key Laboratory of Micro Nano Fabrication Technology collaborators