Liu H.-T.,National Key Discipline Laboratory of Novel Micro Nano Devices and Systems Technologies |
Liu H.-T.,National Center for International Research of Micro Nano System and New Material Technologies |
Liu H.-T.,Chongqing University |
Wen Z.-Y.,National Key Discipline Laboratory of Novel Micro Nano Devices and Systems Technologies |
And 8 more authors.
Key Engineering Materials | Year: 2013
Abstract. Field emission accelerometer work in vacuum environment, the negative exponential relationship between the current and the distance of the cathode and anode electrode make the accelerometer has high sensitivity and serious non-linearity. A system simulation method by using SIMULINK tools was put forward, and the system simulation model was proposed. The system simulation was carried out under low vacuum and high vacuum environment. On the guidance of the simulation result, the circuit was designed and the performance of accelerometer was tested. The result indicated that the accelerometer have good linearity and sensitivity. © 2013 Trans Tech Publications Ltd, Switzerland.
Liu H.,National Key Discipline Laboratory of Novel Micro Nano Devices and Systems Technologies |
Liu H.,National Center for International Research of Micro Nano System and New Material Technologies |
Liu H.,Chongqing University |
Wen Z.,National Key Discipline Laboratory of Novel Micro Nano Devices and Systems Technologies |
And 8 more authors.
Chinese Journal of Sensors and Actuators | Year: 2012
The vacuum microelectronic accelerometer works based on tunneling effect, the inherent low frequency noise such as 1/f noise decreases the signal-to-noise ratio greatly, and it is the main influencing factors to precision and linearity of accelerometer. In order to eliminate the noise and improved the linearity characteristic, in this paper a novel low noise interface ASIC(Application Specific Integrated Circuit)was bring forward and designed according to the frequency mixing technique and coherent detection technology. Finally the noise and linearity of the accelerometer was tested, the mean noise spectrum density of output signal is 69 μV·Hz-1/2 from 0 Hz to 200 Hz. the correlation coefficient of the least-square linear fitting curve is 99.99%, the maxim nonlinearity is 0.41%. Through the results and compare with the previous results of circuit, we can draw conclusion that the noise and linear performs have been improved through interface circuit, and furthermore, the idea of circuit design can also be used to the other tunneling accelerometer.